SEMI Downloads




Volume(s): Safety Guidelines

SEMI S23-0708 - GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMICONDUCTOR MANUFACTURING EQUIPMENT

SEMI Standards Copyright Policy/License Agreements


Status
CURRENT - Supported by the technical committee.

Abstract
This standard was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008 and on CD-ROM in July 2008. Originally published March 2005; previously published July 2005.

Purpose
This guide addresses concepts related to energy, utilities and materials conservation on semiconductor manufacturing equipment.

This guide addresses measurements related to energy, utilities and materials usage on semiconductor manufacturing equipment.

This guide also addresses continuous improvement planning for energy, utilities and materials usage on semiconductor manufacturing equipment in order to promote energy, utilities and materials conservation.

This guide is a series of options and instructions intended to increase awareness of the reader to available techniques in the area of energy, utilities and materials conservation. A particular course of action is suggested for utilities and materials use measurement and conversion of use measurements into equivalent energy.

Scope
This guide is intended to be a tool that can be used to analyze energy, utilities and materials conservation on semiconductor manufacturing equipment.

This guide describes methods for reporting energy, utilities and material use rate, and the consumption reduction in semiconductor manufacturing equipment.

This guide also suggests use of energy equivalent values in order to facilitate quantification of overall energy consumption and conservation related to SME as well as easy planning of energy conservation.

This guide focuses only on the use stage of equipment life cycle and addresses a limited set of utilities and materials to be considered.

Additionally, this guide describes setting targets for, verifying and improving utilities and materials use rate and energy conservation.

Referenced SEMI Standards
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI S2 — Environment, Health and Safety Guideline for Semiconductor Manufacturing Equipment

Revision History
SEMI S23-0708 (technical revision)
SEMI S23-0705 (technical revision)
SEMI S23-0305 (first published)