SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: SEMI HQ, San Jose, CA
Date of Meeting: 04/02/2013
Meeting End Date: 04/02/2013
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 04/11/2013
Leadership Changes
Group | Previous Leader | New Leader |
| Gases Committee |  | Mohamed Saleem (Fujikin) |
TC Chapter Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5446 | New Standard: Test Method For Determination Of Moisture Dry-Down Characteristics Of Surface-Mounted And Conventional Gas Delivery Systems By Cavity Ring Down Spectroscopy (CRDS) | Passed superclean |  |
5516 | Reapproval of SEMI F43-0308, Test Method for Determination of Particle Contribution by Point of Use Gas Purifiers and Gas Filters | Passed as balloted |  |
5517 | Reapproval of SEMI F59-0302 (Reapproved 1108), Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves | Passed as balloted |  |
5518 | Reapproval of SEMI F67-1101 (Reapproved 1108), Test Method for Determining Inert Gas Purifier Capacity | Passed as balloted |  |
5519 | Reapproval of SEMI F68-1101 (Reapproved 1108), Test Method for Determining Purifier Efficiency | Passed as balloted |  |
5520 | Reapproval of SEMI F69-0708, Test Methods for Transport and Shock Testing of Gas Delivery Systems | Failed and reballot | |
5504 | Revision of SEMI E52-0912, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers | Failed and reballot | |
5505 | Revision to SEMI C58-0305 (Reapproved 0211), Specifications and Guidelines for Hydrogen | Failed and reballot | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
5568 | SNARF | Filters and Purifiers TF | Reapproval of SEMI C14-95 (Reapproved 0309), Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges |
5569 | SNARF | MFC TF | Reapproval of SEMI E12-0303 (Reapproved 0309), Standard for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers |
5570 | SNARF | Facilities committee | Reapproval of SEMI E51-0200, Guide for Typical Facilities Services and Termination Matrix |
5571 | SNARF | MFC TF | Reapproval of SEMI E56-0309, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers |
5572 | SNARF | Facilities committee | Reapproval of SEMI E6-0303, Guide for Semiconductor Equipment Installation Documentation |
5573 | SNARF | MFC TF | Reapproval of SEMI E68-0997 (Reapproved 0309), Test Method for Determining Warm-Up Time of Mass Flow Controllers |
5574 | SNARF | MFC TF | Reapproval of SEMI E69-0298 (Reapproved 0309), Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers |
5575 | SNARF | Facilities committee | Reapproval of SEMI E70-1103, Guide for Tool Accommodation Process |
5576 | SNARF | Facilities committee | Reapproval of SEMI E76-0299, Guide for 300 mm Process Equipment Points of Connection to Facility Services |
5577 | SNARF | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F105-0708, Guide for Metallic Material Compatibility in Gas Distribution Systems |
5578 | SNARF | Filters and Purifiers TF | Reapproval of SEMI F36-0299 (Reapproved 1104), Guide for Dimensions and Connections of Gas Distribution Components |
5579 | SNARF | Facilities committee | Reapproval of SEMI F49-0200 (Reapproved 1108), Guide for Semiconductor Factory Systems Voltage Sag Immunity |
5580 | SNARF | Facilities committee | Reapproval of SEMI F50-0200 (Reapproved 1108), Guide for Electric Utility Voltage Sag Performance for Semiconductor Factories |
5504 | SNARF | MFC TF | Revision of SEMI E52-0912, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers (SNARF was revised) |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
5571 | Cycle 3-2013 | MFC TF | Reapproval of SEMI E56-0309, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers |
5572 | Cycle 3-2013 | Facilities committee | Reapproval of SEMI E6-0303, Guide for Semiconductor Equipment Installation Documentation |
5573 | Cycle 3-2013 | MFC TF | Reapproval of SEMI E68-0997 (Reapproved 0309), Test Method for Determining Warm-Up Time of Mass Flow Controllers |
5574 | Cycle 3-2013 | MFC TF | Reapproval of SEMI E69-0298 (Reapproved 0309), Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers |
5575 | Cycle 3-2013 | Facilities committee | Reapproval of SEMI E70-1103, Guide for Tool Accommodation Process |
5576 | Cycle 3-2013 | Facilities committee | Reapproval of SEMI E76-0299, Guide for 300 mm Process Equipment Points of Connection to Facility Services |
5577 | Cycle 3-2013 | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F105-0708, Guide for Metallic Material Compatibility in Gas Distribution Systems |
5578 | Cycle 3-2013 | Filters and Purifiers TF | Reapproval of SEMI F36-0299 (Reapproved 1104), Guide for Dimensions and Connections of Gas Distribution Components |
5579 | Cycle 3-2013 | Facilities committee | Reapproval of SEMI F49-0200 (Reapproved 1108), Guide for Semiconductor Factory Systems Voltage Sag Immunity |
5580 | Cycle 3-2013 | Facilities committee | Reapproval of SEMI F50-0200 (Reapproved 1108), Guide for Electric Utility Voltage Sag Performance for Semiconductor Factories |
5520A | Cycle 3-2013 | Filters and Purifiers TF | Revision of SEMI F69-0708, Test Methods for Transport and Shock Testing of Gas Delivery Systems |
5504A | Cycle 4-2013 | MFC TF | Revision of SEMI E52-0912, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers |
5505A | Cycle 3-2013 | Gas Specification TF | Revision of SEMI C58-0305 (Reapproved 0211), Specifications and Guidelines for Hydrogen |
3440B | Cycle 3-2013 | Pressure Measurement TF | New Standard: Test Method For Pressure Transducers In Gas Delivery Systems |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
The NA Facilities committee is looking for volunteers to help drive standardization effort in this area. Contact Steve Lewis at [email protected] or Kevin Nguyen at [email protected] for more information.
Next Meeting
The next meeting will be in conjunction with SEMICON West Standards Meetings at the San Francisco Marriott Marquis in San Francisco, California. The committee will meet on Tuesday, July 9, 2013 from 9:00 AM-Noon. Check http://www.semi.org/node/45276 for the latest schedule including Task Force meetings.
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