SEMI International Standards
Standards Locale: Korea
Committee: Information & Control
Place of Meeting: #304, Conference Room(South), Coex, Seoul
Date of Meeting: 01/31/2013
Meeting End Date: 01/31/2013
Recording SEMI Standards Staff: Natalie Shim
CER Posted to Web: 02/19/2013
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 5320A | Line Item Revision to SEMI E116, Specification for Equipment Performance Tracking | Failed and rework |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
# | When | SC/TF/WG | Details |
| 5320B | Cycle 3-13 | GEM300 TF | Line Item Revision to SEMI E116, Specification for Equipment Performance Tracking |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
April 19, 2013 at SEMI Korea Office, Seoul
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