SEMI International Standards
Standards Locale: North America
Committee: Physical Interfaces & Carriers
Place of Meeting: SEMI Headquarters in San Jose, CA
Date of Meeting: 04/03/2013
Meeting End Date: 04/03/2013
Recording SEMI Standards Staff: Michael Tran
CER Posted to Web: 04/12/2013
Leadership Changes
Group | Previous Leader | New Leader |
| International Reticle SMIF Pods and Loadports Interoperability TF | Tom Kielbaso (Entegris) |  |
| North America 450 mm Shipping Box TF | Eric Olson (Entegris) | |
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5464 | Revision to SEMI E154-0612, Mechanical Interface Specification for 450 mm Load Port | Passed as balloted. Superclean. |  |
5523 | Removal of SEMI E7-91 (Withdrawn 0312), Specification for Electrical Interfaces for the U.S. Only | Passed as balloted. Superclean. |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the committee.
# | Type | SC/TF/WG | Details |
5584 | SNARF | International Reticle SMIF Pods and Loadports Interoperability TF | Revision to SEMI E19-0912, Standard Mechanical Interface (SMIF) |
5585 | SNARF | International Reticle SMIF Pods and Loadports Interoperability TF | Revision to SEMI E19.3-0309, Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port |
5465 | Revised
SNARF | International Reticle SMIF Pods and Loadports Interoperability TF | Revision to SEMI E111-1106, Mechanical Specification for a 150 mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle |
5466 | Revised
SNARF | International Reticle SMIF Pods and Loadports Interoperability TF | Revision to SEMI E112-1106, Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles |
--- | Editorial Changes to SEMI E159 | International 450 mm Shipping Box TF | Editorial changes made to SEMI E159-0912, Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers |
--- | Revision to AUX 023 | 450 mm IPIC TF | Revision to SEMI AUX023-1211, Overview Guide to SEMI Standard for 450 mm Wafers |
--- | Transfer ownership of SEMI E156 | 450 mm IPIC TF | The 450 mm IPIC TF transfer the ownership of SEMI E156-0710, Mechanical Specification for 450 mm AMHS Stocker to Transport Interface to the Japan AMHS TF |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
5584 | Cycle 4-2013 | International Reticle SMIF Pods and Loadports Interoperability TF | Revision to SEMI E19-0912, Standard Mechanical Interface (SMIF) |
5585 | Cycle 4-2013 | International Reticle SMIF Pods and Loadports Interoperability TF | Revision to SEMI E19.3-0309, Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port |
5465 | Cycle 4-2013 | International Reticle SMIF Pods and Loadports Interoperability TF | Revision to SEMI E111-1106, Mechanical Specification for a 150 mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle |
5466 | Cycle 4-2013 | International Reticle SMIF Pods and Loadports Interoperability TF | Revision to SEMI E112-1106, Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles |
5069 | Cycle 3 or 4-2013 | International 450 mm Shipping Box | New Standard: Specification for 450 mm Wafer Shipping System |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next N.A. Physical Interfaces & Carriers standards meetings will be held at the San Francisco Marriott Marquis Hotel in conjunction with SEMICON West 2013
*Tentative Schedule*
Monday, July 8*
· Int’l Reticle SMIF Pods and Loadports Interoperability TF (10:00 AM – 12:00 PM Noon)
· Int’l 450 mm Shipping Box TF (1:00 PM – 4:00 PM)
Tuesday, July 9*
· EUV Reticle Handling TF (10:00 AM – 12:00 PM Noon)
· Int’l Process Module Physical Interface TF (1:00 PM – 3:00 PM)
· Int’l PIC TF (3:00 PM – 5:00 PM)
Wednesday, July 10*
· Physical Interfaces & Carriers Committee (9:00 AM – 12:00 PM Noon)
*All times are in PST. Times and dates are subject to change without notice.
For additional meeting details, registration, travel information, and the latest schedule, please visit http://www.semi.org/node/45276
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