Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5544 | Revision of SEMI M9.1-96E (Reapproved 0308), Standard for Round 50.8 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 50.8 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications | Passed as balloted. Superclean. |  |
5545 | Revision of SEMI M9.2-96E (Reapproved 0308), Standard for Round 76.2 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 76.2 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications | Passed as balloted. Superclean. |  |
5546 | Revision of SEMI M9.5-96E (Reapproved 0308), Standard for Round 100 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications with title change to: Specification for Round 100 mm Polished Monocrystalline Gallium Arsenide Wafers for Electronic Device Applications | Passed as balloted. Superclean. |  |
5547 | Revision of SEMI M9.6-95E (Reapproved 0308), Standard for Round 125 mm Diameter Polished Monocrystalline Gallium Arsenide Wafers with title change to: Specification for Round 125 mm Diameter Polished Monocrystalline Gallium Arsenide Wafers | Passed as balloted. Superclean. |  |