SEMI International Standards Committee Express Report
| Standards Region: North America |
| Committee: Liquid Chemicals |
| Place of Meeting: SEMI Headquaters in San Jose, CA |
| Date of Meeting: 04/03/2012 |
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| Recording SEMI Standards Staff: Michael Tran |
| CER Posted to Web: 04/16/2012 |
Leadership Changes in the Committee
None.
Technical Ballot Actions
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
4543A | Revision to SEMI C20-1101, Specification and Guidelines for Ammonium Fluoride 40%, with title change to: Specification and Guide for Ammonium Fluoride 40% | Passed as balloted
Superclean |  |
4544C | Revision to SEMI C24-0301, Specification for n-Butyl Acetate | Failed and reballoted |  |
4547C | Revision to SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone | Failed and reballoted |  |
5191A | Revision to SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants | Failed and reballoted |  |
5193 | Revision to SEMI C46-0306, Guideline for 25% Tetramethylammonium Hydroxide, with title change to: Guide for 25% Tetramethylammonium Hydroxide | Passed as balloted
Superclean |  |
5299A | Revision of SEMI C26-0306 with title change to: Specification and Guide for Hexamethyldisilazane (HMDS) | Failed and reballoted |  |
5354 | Revision to SEMI C47-0706, Guideline for Trans 1, 2 Dichloroethylene with title change to: Guide for Trans 1, 2 Dichloroethylene | Passed as balloted
Superclean |  |
5355 | Revision to SEMI C48-0706, Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade with title change to: Specification and Guide for 1,1,1-Trichloroethane, Furnace Grade | Passed as balloted |  |
5356 | Revision to SEMI C51-0706, Specifications and Guidelines for Xylenes with title change to: Specifications and Guide for Xylenes | Failed and reballoted |  |
New Committee or Task Force Activities
# | Type | SC/TF/WG | Details |
| 5415 | SNARF | F63 Revision TF | Revision to SEMI F63, Guide for Ultrapure Water Used in Semiconductor Processing |
| 5416 | SNARF | F104 Revision TF | Revision of SEMI F104-0312, Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems |
Technical Ballots Expected for Review at the Next Committee Meeting
# | When | SC/TF/WG | Details |
| 4544D | Cycle 3 or 4-2012 | Analytical Methods TF | Revision to SEMI C24-0301, Specification for n-Butyl Acetate |
| 4547D | Cycle 3 or 4-2012 | Analytical Methods TF | Revision to SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone |
| 5188 | Cycle 4-2012 | UPW Filtration Efficiency TF | New Standard: Guide to Evaluate the Performance of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems |
| 5191B | Cycle 3 or 4-2012 | Analytical Methods TF | Revision to SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants |
| 5299B | Cycle 3 or 4-2012 | Analytical Methods TF | Revision of SEMI C26-0306 with title change to: Specification and Guide for Hexamethyldisilazane (HMDS) |
| 5356A | Cycle 3 or 4-2012 | Analytical Methods TF | Revision to SEMI C51-0706, Specifications and Guidelines for Xylenes with title change to: Specifications and Guide for Xylenes |
Special Announcements of the Committee (Workshops, Programs, etc.)
5 Year Standards Reviews
The Analytical Methods TF will look into the following Standards due for 5-Year Review:
The committee will also be performing 5-Year Review on the following Standards:
| SEMI E49.2-1104 | Guideline for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment |
| SEMI E49.4-0298 | Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment |
| SEMI E49.5-1104 | Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment |
| SEMI E49.7-0304 | Purity Guide for the Design and Manufacture of Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment |
Next Meeting
Next meeting: July 09-10, 2012 @ SEMICON West 2012
San Francisco Marriott Marquis Hotel, San Francisco, CA
http://www.semi.org/en/node/40776
Monday, July 9
-F104 Rewrite TF (1:00 PM to 2:00 PM)
-F39, F31& F41 Rewrite TF (2:00 PM to 3:00 PM)
-Polymer Surface Roughness TF (3:00 PM to 4:00 PM)
-UPW Filtration TF/ F63 TF (4:00 PM to 5:00 PM)
Tuesday, July 10
-F57 Discussion/ITRS Alignment (8:00 AM to 10:00 AM)
-Analytical Methods TF (10:00 AM to 12 Noon)
-Liquid Chemicals Committee (1:00 PM to 4:00 PM)
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