SEMI International Standards
Standards Locale: Japan
Committee: EHS
Place of Meeting: Makuhari Messe, Chiba, Japan
Date of Meeting: 12/09/2011
Meeting End Date: 12/09/2011
Recording SEMI Standards Staff: Akiko Yamamoto
CER Posted to Web: 12/27/2011
Leadership Changes
Group | Previous Leader | New Leader |
| S19 Revision Task Force | Shigehito Ibuka (Tokyo Electron)
Takao Nojima (Intel) | None (task force disbanded) |
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 4976A | Revision to SEMI S13-0305, Environmental, Health
and Safety Guideline for Documents Provided to
the Equipment User for Use with Semiconductor
Manufacturing Equipment | Failed |  |
| 4712A | New Standard: Guide for F-GHG (Fluorinated
Greenhouse Gas) Emission Characterization and
Reduction | Failed |  |
| 5323 | Reapproval of SEMI S21-1106E, Safety Guideline for Worker Protection | Passed as balloted |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
# | When | SC/TF/WG | Details |
| 4976B | As early cycle as possible | S13 Revision Task Force | Revision to SEMI S13-0305, Environmental, Health
and Safety Guideline for Documents Provided to
the Equipment User for Use with Semiconductor
Manufacturing Equipment |
| 4712B | As early cycle as possible | GHG Emission Characterization TF | New Standard: Guide for GHG (Greenhouse Gas) Emission Characterization |
| TBD | C1-11 | EHS Committee | Reapproval of SEMI S16-0307, Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
SEMI Japan Standards Spring 2012 Meetings
Thursday, April 19, 2012 10:00-17:00
SEMI Japan, Tokyo, Japan
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