SEMI International Standards
Standards Locale: Korea
Committee: Facilities
Place of Meeting: Seoul, Korea
Date of Meeting: 09/21/2011
Meeting End Date: 09/21/2011
Recording SEMI Standards Staff: Natalie Shim
CER Posted to Web: 09/28/2011
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the committee.
# | Type | SC/TF/WG | Details |
| 4771 | SNARF | Equipment Cleanness TF | The SNARF scope is narrowed down to “particle removal test method”
The SNARF title is also revised as follow the changed scope from “Test Method for Equipment Fan Filter Unit, EFFU” to “Test Method for Equipment Fan Filter Unit, EFFU, Particle Removal” |
| 4922 | SNARF | Equipment Cleanness TF | The document type changed for Specification to Guide and based on the new type, the SNARF Scope and title are also revised. |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF.
Authorized Ballots
Listing of documents approved by the committee for letter ballot.
# | When | SC/TF/WG | Details |
| 4771A | Cycle 7 | Equipment Cleanness TF | New Standard: Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal |
| 4922A | Cycle 7 | Equipment Cleanness TF | New Standard: Guide for Equipment Fan Filter Unit (EFFU) |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
Thursday, 9 February, 2012 at COEX, Seoul, Korea, in conjunction with SEMICON Korea 2012
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