SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: Applied Materials in Santa Clara, California
Date of Meeting: 10/27/2011
Meeting End Date: 10/27/2011
Recording SEMI Standards Staff: Paul Trio
CER Posted to Web: 11/10/2011
Leadership Changes
Group | Previous Leader | New Leader |
| AMHS Safety Task Force disbanded. | Alan Crockett (KLA-Tencor) |  |
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
4449C | Delayed Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Line Item Revisions related to Work at Elevated Locations and to Removal of Burrs and Sharp Edges | | |
Line Item 1 | Provisions for work at elevated locations | Failed and returned to task force. |  |
Line Item 2 | General safety precaution concerning the removal of burrs and sharp edges | Passed as balloted. Superclean |  |
4605E | Line Item Revisions to SEMI S22-1110, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
Delayed Revisions on Multiple Topics | | |
Line Item 1 | Clarification of the creepage and clearance material | Passed as balloted. Superclean |  |
Line Item 2 | Clarification of Ampacity Tables | Passed with editorial changes. |  |
4774B | Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Non-Ionizing Radiation | | |
Line Item 1 | Section 25 Reference and Appendix 4 Introductory Material Cleanup | Passed as balloted. Superclean |  |
Line Item 2 | Revision of Static Magnetic Radiation Criteria in Appendix 4 | Passed with editorial changes. |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| TBA | SNARF | S2 Non-Ionizing Radiation TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revisions Related to Non-Ionizing Radiation
[To be submitted to the GCS for approval] |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
| 5000 | Cycle 1, 2012
(or C2-12) | S2 Interlock Reliability TF | Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revisions Related to Interlock Reliability and Selection |
| 5171 | Cycle 1, 2012
(or C2-12) | S25 Revision TF | Revision to SEMI S25-0706, Safety Guideline for Hydrogen Peroxide Storage & Handling Systems |
| 5009 | Cycle 2, 2012 | Ergonomics TF | Revisions to SEMI S8-0308, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment (Revisions related to the SESC checklist) |
| TBA | Cycle 2, 2012 | S2 Non-Ionizing Radiation TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revisions Related to Non-Ionizing Radiation
[To be submitted to the GCS for approval] |
| 5170 | Cycle 2, 2012 | S2 3.3 Limitations TF | Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Revisions Related to Section 3.3 |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
North America Standards Spring 2012 Meetings
April 2-5, 2012
The location of this meeting will be announced when finalized.
Proposed meting schedule:
Monday, April 2
- Fire Protection TF (9:00 AM to 10:00 AM)
- Section & Paragraph Symbols WG (10:00 AM to 11:00 AM)
- EHS Committee Process & Regs (11:00 AM to 12:00 Noon)
- S2 Ladders/Steps TF (1:00 PM to 2:30 PM)
- S2 Interlock Reliability (2:30 PM to 4:00 PM)
- S22 Electrical Safety TF (4:00 PM to 6:00 PM)
Tuesday, April 3
- S2 Chemical Exposure TF (9:00 AM to 10:00 AM)
- S2 3.3 Limitations TF (10:00 AM to 10:30 AM)
- S2 Non-Ionizing Radiation TF (10:30 AM to 12:00 Noon)
- S6 Revision TF (1:00 PM to 2:00 PM)
- S18 Support TF (2:00 PM to 3:00 PM)
- S25 Revision TF (3:00 PM to 4:30 PM)
[- I&CC Energy Saving Communications TF (3:00 PM to 6:00 PM), included for reference ]
- Ergonomics TF (4:30 PM to 6:00 PM)
Wednesday, April 4
- ICRC (9:00 AM to 11:00 AM)
- EHS Leaders Meeting (11:00 AM to 12:00 Noon)
- S23 Revision Japan TF (1:00 PM to 2:00 PM)
- S13 Revision Japan TF (2:00 PM to 3:00 PM)
- S3 Revision TF (3:00 PM to 4:00 PM)
- S2 to Machinery Directive TF (4:00 PM to 5:00 PM)
- MESSC (5:00 PM to 6:00 PM)
Thursday, April 5
- EHS Committee (9:00 AM to 6:00 PM)
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