SEMI International Standards
| Standards Locale: North America |
| Committee: Information & Control |
| Place of Meeting: Sheraton San Jose Hotel in Milpitas, California |
| Date of Meeting: 04/02/2009 |
| Meeting End Date: 04/02/2009 |
 |
| Recording SEMI Standards Staff: Paul Trio |
| CER Posted to Web: |
Leadership Changes
Name of Technical Committee/Task Force | Name/Company of Retired Leadership | Name/Company of Newly Appointed Leadership | Remarks (if any) |
| Vacuum Pump SDM Task Force | | | TF disbanded. |
| XML Network Communications Standard E54 Task Force | | | TF disbanded. |
| Sensor Actuator Bus Subcommittee | Dan Judd (Arlington Laboratory) | Rich Gwizdak (Canton Control Solutions) | James Moyne continues as Sensor Bus SC co-chair. |
| Process Control Systems Task Force | Hazem Hajj (Intel) | Chris Maloney (Intel) | James Moyne continues as PCS TF co-leader |
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review. Procedural review files for approved ballots and line items will be attached below the table when they are completed.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
* * * Cycle 1 * * * |
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
4410C-LI1 | Revision to SEMI E87, Specification for Carrier Management (CMS). Revision for conflicts and errata
Line Item 1 - E87-0707 clarify section 11 Access Mode | Passed as balloted | |
4410C-LI2 | Line Item 2 - E87-0707 Add to the Related Information "R1-4 Flowcharts for Access Mode Violation" | Passed with editorial changes | |
* * * Cycle 2 * * * |
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
4626A | Revision to SEMI E87, Specification for Carrier Management. CancelCarrierAtPort
Line Item 1 - E87 – Clarify the meaning of the CancelCarrierAtPort service. | Passed as balloted | |
4685-LI1 | Revisions to:
* SEMI E139, Specification for Recipe and Parameter Management (RaP)
SEMI E139.1, XML Schema for the RaP PDE
* SEMI E139.2, SECS-II Protocol for Recipe and Parameter Management
* SEMI E139.3, XML/SOAP Binding for Recipe and Parameter Management
For Error Handling and Maintenance
Line Item 1 - ResolvePDE() Logic and Error Handling | Passed as balloted | |
4685-LI2 | Line Item 2 - Error Condition for SendPDE() | Passed with editorial changes | |
4685-LI3 | Line Item 3 - Filters for GetPDEdirectory() | Passed as balloted | |
4685-LI4 | Line Item 4 - Support for Local Recipe Management and Execution | Passed as balloted | |
4685-LI5 | Line Item 5 - Consistent Date-Time Format | Passed as balloted | |
4685-LI6 | Line Item 6 - Error Code Cleanup | Passed as balloted | |
4686 | Revisions to SEMI E40, Standard for Processing Management and SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II)
Line Item 1 - E40 - Clarify Response of PRJobSetStartMethod | Passed as balloted | |
4729 | Revisions to:
* SEMI E125, Specification for Equipment Self Description (EqSD)SEMI E125.1, Specification for SOAP Binding for Equipment Self Description (EqSD)
* SEMI E125.1, Specification for SOAP Binding for Equipment Self Description (EqSD)
* SEMI E134, Specification for Data Collection Management
* SEMI E134.1, Specification for Soap Binding of Data Collection Management (DCM)
* SEMI E138, XML Semiconductor Common Components
Updates and Corrections
Line Item 1 - E125, E125.1, E134, E134.1, E138 Updates to the Data Collection Interface. | Passed with editorial changes | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Document # | Type | Title | Details |
4507 | SNARF | Revisions to SEMI E133, Provisional Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS). Line item changes and enhancements to E133.1: Fault Detection XML Schema Enhancements and updates to E133.1 base schema as necessary | PCS TF
SNARF revised. |
4596 | SNARF | Revisions to:
* SEMI E128, Provisional Specification for XML Message Structures
* SEMI E125.1, Specification for SOAP Binding for Equipment Self Description (EqSD)
* SEMI E132.1, Specifcation for SOAP Binding for Equipment Client Authentication and Authorization (ECA)
* SEMI E134.1, Specification for Soap Binding of Data Collection Management (DCM)
* SEMI E147, Guide for Equipment Data Acquisition (EDA) | DDA TF
SNARF revised. |
4693 | SNARF | Revision to SEMI E133, Provisional Specification for Automated Process Control Systems Interface. Line item changes to E133 to provide specification for wafer to wafer (W2W) control. | PCS TF
SNARF revised. |
4742 | SNARF | New Standard: Recipe Execution Tracking | GEM300 TF |
4743 | SNARF | New Standard: Specification for Communication of Data Quality | Data Quality TF |
4744 | SNARF | Revision to SEMI E148, Specification for Time Synchronization and Definition of the TS-Clock Object | Data Quality TF |
4745 | SNARF | Reapproval of SEMI E54.13, Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM) | NA I&C Committee |
4746 | SNARF | Reapproval of SEMI E91, Specification for Prober Specific Equipment Model (PSEM) | NA I&C Committee |
4747 | SNARF | Reapprovals for SEMI E122, Standard for Tester Equipment Specific Equipment Model (TSEM) and SEMI E122.1, Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM) | NA I&C Committee |
4748 | SNARF | Reapprovals of SEMI E123, Standard for Handler Equipment Specific Equipment Model (HSEM) and SEMI E123.1, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM) | NA I&C Committee |
4749 | SNARF | Reapprovals of SEMI E39, Object Services Standard: Concepts, Behavior, and Services and SEMI E39.1, SECS-II Protocol for Object Services Standard (OSS) | NA I&C Committee |
4750 | SNARF | Withdrawal for SEMI E37.2, High-Speed SECS Message Services General Session (HSMS-GS) | NA I&C Committee |
4751 | SNARF | Withdrawals for SEMI E58, Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services and SEMI E58.1, SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services | NA I&C Committee |
Authorized Ballots
* * * Cycle – 4 * * * |
Document # | Document Title | Task Force | Special Condition |
4507A | Revisions to SEMI E133, Provisional Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS). Line item changes and enhancements to E133.1: Fault Detection XML Schema Enhancements and updates to E133.1 base schema as necessary | PCS TF | |
4596 | Revisions to:
* SEMI E128, Provisional Specification for XML Message Structures
* SEMI E125.1, Specification for SOAP Binding for Equipment Self Description (EqSD)
* SEMI E132.1, Specifcation for SOAP Binding for Equipment Client Authentication and Authorization (ECA)
* SEMI E134.1, Specification for Soap Binding of Data Collection Management (DCM)
* SEMI E147, Guide for Equipment Data Acquisition (EDA)
| DDA TF | May be submitted for Cycle 6, 2009 |
4693 | Revision to SEMI E133, Provisional Specification for Automated Process Control Systems Interface. Line item changes to E133 to provide specification for wafer to wafer (W2W) control. | PCS TF | |
4743 | New Standard: Specification for Communication of Data Quality | Data Quality TF | |
4744 | Revision to SEMI E148, Specification for Time Synchronization and Definition of the TS-Clock Object | Data Quality TF | |
4745 | Reapproval of SEMI E54.13, Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM) | NA I&C Committee | |
4746 | Reapproval of SEMI E91, Specification for Prober Specific Equipment Model (PSEM) | NA I&C Committee | |
4747 | Reapprovals for SEMI E122, Standard for Tester Equipment Specific Equipment Model (TSEM) and SEMI E122.1, Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM) | NA I&C Committee | |
4748 | Reapprovals of SEMI E123, Standard for Handler Equipment Specific Equipment Model (HSEM) and SEMI E123.1, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM) | NA I&C Committee | |
4749 | Reapprovals of SEMI E39, Object Services Standard: Concepts, Behavior, and Services and SEMI E39.1, SECS-II Protocol for Object Services Standard (OSS) | NA I&C Committee | |
4750 | Withdrawal for SEMI E37.2, High-Speed SECS Message Services General Session (HSMS-GS) | NA I&C Committee | |
4751 | Withdrawals for SEMI E58, Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services and SEMI E58.1, SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services | NA I&C Committee | |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
West 2009 Meeting Schedule
July 12 – 15, 2009
San Francisco Marriott Hotel
San Francisco, California
Note: The NA I&C meetings at West will be shifted one day earlier with the committee meeting scheduled for Wednesday, July 15.
Sunday, July 12
SITF (3:00 PM – 6:00 PM) (?)
Sort Map (3:00 PM – 6:00 PM) (?)
Monday, July 13
I&C GCS (8:00 AM – 9:30 AM)
I&C Leadership (9:30 AM – 11:00 AM)
Data Quality TF (11:00 AM – 3:00 PM)
GEM300 TF (11:00 AM – 6:00 PM)
PCS TF (3:00 PM – 6:00 PM)
Tuesday, July 14
DDA TF (8:00 AM – 11:00 AM)
AMHS IBSEM TF (8:00 AM – 11:00 AM)
XML TF (11:00 AM – 3:00 PM)
Sensor Actuator Bus SC (11:00 AM – 3:00 PM)
IEE TF (3:00 PM – 6:00 PM)
Wednesday, July 15
I&C Committee (8:00 AM – 5:00 PM)
ISMI NGF Briefing / e-Manufacturing Workshop
Friday, July 17
9:00 AM – 1:00 PM
San Francisco Marriott
STEP: PCS – Coming Soon!
September 2009
AEC/APC Symposium
Next Meeting
None.
Copyright ©2024 Semiconductor Equipment and Materials International (SEMI®). All rights reserved.
|