SEMI International Standards
Standards Locale: Korea
Committee: Facilities
Place of Meeting: #304, Conference Room (South), Coex, Seoul
Date of Meeting: 01/30/2013
Meeting End Date: 01/30/2013
Recording SEMI Standards Staff: Natalie Shim
CER Posted to Web: 02/18/2013
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 4771C | New Standard, Test Method for Equipment Fan Filter Unit Particle Removal | Passed with editorial change |  |
| 4922B | New Standard, Guide for Equipment Fan Filter Unit (EFFU) | Failed and reballot |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
# | When | SC/TF/WG | Details |
| 4922C | Cycle 2-13 or Cycle 3-13 | Equipment Cleanness TF | New Standard, Guide for Equipment Fan Filter Unit (EFFU) |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
April 24, 2013 @ SEMI Korea Office, Seoul
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