Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
 | * Cycle 5-11 Ballots * | | |
5102A | Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges to SEMI E54-0710, Sensor/Actuator Network Standard | Passed as balloted. Superclean |  |
5179A | Revision to SEMI E90.1-0706, Provisional Specification for SECS-II Protocol Substrate Tracking | | |
Line Item 1 | Addition of Missing Data Variables | Passed as balloted. |  |
| * Cycle 6-11 Ballots * | | |
4828 | Revision to SEMI E133-1110, Specification for Automated Process Control Systems Interface. Line item changes to E133 to provide a virtual metrology capability | | |
Line Item 1 | PCS Event Notification and Data Collection to Provide a Virtual Metrology Capability | Passed as balloted. |  |
5002A | New Standard: Specification for EDA Common Metadata | Failed and reballoted |  |
5181 | Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network to SEMI E54-0710, Sensor/Actuator Network Standard | Passed as balloted. Superclean |  |
5273 | Revisions to:
· SEMI E40-0709, Standard for Processing Management
· SEMI E40.1-1106, SECS-II Support for Processing Management Standard
· SEMI E87-0709, Specification for Carrier Management (CMS)
· SEMI E90-0707, Specification for Substrate Tracking
· SEMI E94-0309, Specification for Control Job Management,
· SEMI E94.1-1107, Specification for SECS-II Protocol for Control Job Management (CJM)
To remove References to Inactive Standards and Defects in the GEM 300 Standards | |  |
Line Item 1 | E40 – Remove references to E53 | Passed as balloted. Superclean | |
Line Item 2 | E40.1 - Remove references to E53 | Passed as balloted. Superclean | |
Line Item 3 | E87 – Remove references to E41 and E53 | Passed as balloted. Superclean | |
Line Item 4 | E90 – Remove references to SEMI E53 | Passed as balloted. Superclean | |
Line Item 5 | E90- Remove unused service “Change Substrate State” | Passed as balloted. Superclean | |
Line Item 6 | E94 – Remove references to SEMI E53 | Passed as balloted. Superclean | |
Line Item 7 | E94.1 – Remove references to SEMI E53 | Passed as balloted. Superclean | |
Line Item 8 | E87 – Fix Related Information Table R1-20 | Passed as balloted. Superclean | |
5316 | Reapproval for SEMI E4-0699 (Reapproved 0307), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) | Passed as balloted. |  |
5317 | Reapproval for SEMI E95-1101 (Reapproved 0307), Specification for Human Interface for Semiconductor Manufacturing Equipment | Failed and discontinued. TC allowed E95 to go into Inactive status. |  |
5318 | Reapprovals for SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT) | Failed and discontinued. E116 to be revised by Korea I&CC. |  |
SNARF # | SNARF for | Details |
| 5318 | Reapprovals for SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1-0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT) | Korea I&C revising SEMI E116 (SNARF #5320), to be balloted for Cycle 1, 2012. |
| 5319 | Reapprovals for SEMI E118-1104E, Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service and SEMI E118.1-1104, Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communicaton Interface Standards | SEMI E118 and E118.1 Standards are the responsibility of the Japan I&C Committee. Japan I&CC to perform 5-Year maintenance on E118 and E118.1. |