SEMI International Standards
Standards Locale: Europe
Committee: Liquid Chemicals
Place of Meeting: Messe Dresden, Dresden, Germany
Date of Meeting: 10/12/2011
Meeting End Date: 10/12/2011
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 10/23/2011
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 5224 | Reapproval of SEMI C52-0301, Specification for the Shelf Life of a Specialty Gas | Passed |  |
| 5230 | Revision of SEMI C3.56-0600, Specification for Diborane Mixtures | Passed |  |
| 5231 | Revision of SEMI C3.57-0600, Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders | Passed |  |
| 5232 | Reapproval of SEMI C53-0704, Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 And 2] | Passed |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 5324 | SNARF | Solvents in Advanced Processes TF | New Standard: Guide for Cyclopentanone |
| 5325 | SNARF | Precursor Specifications TF | New Standard: Guide For Dimethyl Dimethoxy Silane (DMDMOS) |
| 5326 | SNARF | Solvents in Advanced Processes TF | New Standard: Guide for Methyl Isobutyl Carbinol (MIBC) or 4-Methyl 2-Pentanol |
| 5327 | SNARF | Precursor Specifications TF | New Standard: Guide for Monomethyl Silane |
| 5328 | SNARF | Precursor Specifications TF | New Standard: Guide for Tetrakis(Dimethylamino) Silane (TDMAS) |
| 5329 | SNARF | Precursor Specifications TF | New Standard: Guide for Tris(Dimethylamino) Silane (3DMAS) |
Authorized Ballots
# | When | SC/TF/WG | Details |
| 5324 | Cycle 1/2-2012 | Solvents in Advanced Processes TF | New Standard: Guide for Cyclopentanone |
| 5325 | Cycle 1/2-2012 | Precursor Specifications TF | New Standard: Guide For Dimethyl Dimethoxy Silane (DMDMOS) |
| 5326 | Cycle 1/2-2012 | Solvents in Advanced Processes TF | New Standard: Guide for Methyl Isobutyl Carbinol (MIBC) or 4-Methyl 2-Pentanol |
| 5328 | Cycle 1/2-2012 | Precursor Specifications TF | New Standard: Guide for Tetrakis(Dimethylamino) Silane (TDMAS) |
| 5329 | Cycle 1/2-2012 | Precursor Specifications TF | New Standard: Guide for Tris(Dimethylamino) Silane (3DMAS) |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for Intersolar Europe in June 2012 in Munich, Germany. Check www.semi.org/standards for the latest update
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