SEMI International Standards
Standards Locale: North America
Committee: MEMS / NEMS
Place of Meeting: SEMI Headquarters in San Jose, CA
Date of Meeting: 04/01/2013
Meeting End Date: 04/01/2013
Recording SEMI Standards Staff: Michael Tran
CER Posted to Web: 04/11/2013
Leadership Changes
Group | Previous Leader | New Leader |
| MEMS / NEMS Reliability TF | Ravi Doraiswami (University of Maryland) |  |
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5514 | Line Items Revisions to SEMI MS5-1211, Test Method for Wafer Bond Strength Measurements Using Micro-Chevron Test Structures | |  |
Line Item 1 | Revision to Referenced Standards and Documents | Line Item 1 passed as balloted. Superclean | |
Line Item 2 | Revisions to Terminology | Line Item 2 passed as balloted. Superclean | |
5267 | New Standard: Specification for Microfluidic Port and Pitch Dimensions | Failed committee review. |  |
5515 | Revision to SEMI MS7-0708, Specification for Microfluidic Interfaces to Electronic Device Packages | Failed committee review. |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the committee.
# | Type | SC/TF/WG | Details |
--- | SNARF | Materials Characterization TF | Line Item Revision to SEMI MS2-0212, Test Method for Step Height Measurements of Thin Films
Note: SNARF will be submitted after the committee meeting to the MEMS/NEMS GCS for approval |
--- | SNARF | Materials Characterization TF | Line Items Revisions to SEMI MS4-0212, Standard Test Method for Young’s Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance
Note: SNARF will be submitted after the committee meeting to the MEMS/NEMS GCS for approval |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents approved by the committee for letter ballot.
# | When | SC/TF/WG | Details |
--- | Cycle 3 or 4-2013 | Materials Characterization TF | Line Item Revision to SEMI MS2-0212, Test Method for Step Height Measurements of Thin Films
Note: Ballot authorization of this document will be submitted after the committee meeting to the MEMS/NEMS GCS for approval |
--- | Cycle 3 or 4-2013 | Materials Characterization TF | Line Items Revisions to SEMI MS4-0212, Standard Test Method for Young’s Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance
Note: Ballot authorization of this document will be submitted after the committee meeting to the MEMS/NEMS GCS for approval |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next N.A. MEMS/NEMS standards meetings will be held on July 08, 2013 at the San Francisco Marriott Marquis Hotel in San Francisco, CA in conjunction with SEMICON West 2013.
*Tentative schedule:
Monday, July 08
· Wafer Bond TF (9:00 AM - 10:00 AM)
· Microfluidics TF (10:00 AM - 11:00 AM)
· Packaging TF (11:00 AM - 11:30 AM)
· Terminology TF (11:30AM - 12:30 PM)
· Materials Characterization TF (1:30 PM - 2:30 PM)
· N.A. MEMS/NEMS Committee (2:30 PM - 4:30 PM)
*All times are in PST. Times and dates are subject to change without notice.
For meeting details, registration, the latest schedule, and travel information please visit http://www.semi.org/node/45276
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