SEMI International Standards
Standards Locale: North America
Committee: Metrics
Place of Meeting: SEMI HQ, San Jose, California
Date of Meeting: 10/26/2011
Meeting End Date: 10/26/2011
Recording SEMI Standards Staff: James Amano
CER Posted to Web: 10/31/2011
Leadership Changes
Chona Shumate has stepped down as leader of the Equipment Training and Documentation Task Force.
TC Chapter Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 3846A | Revision To SEMI E10-0304E, Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM), with title change to: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization | Approved as balloted |  |
| 3847C | Revision of SEMI E33-94, Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility, with title change to: Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC) | Failed | |
| 4783A | New Standard: Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas | Approved with editorial changes | |
| 5049 | Revision to SEMI E35-0307, Guide to Calculate Cost Of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment | Approved as balloted | |
| 5050 | Revision to SEMI E140-0305, Guide to Calculate Cost Of Ownership (COO) Metrics for Gas Delivery Systems | Approved as balloted | |
| 5234 | Reapproval of E135-0704, Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment | Approved as balloted | |
| 5235 | Reapproval of E113-0306, Specification for Semiconductor Processing Equipment RF Power Delivery Systems | Approved as balloted | |
| 5236 | Reapproval of E136-1104, Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems | Approved as balloted | |
| 5237 | Reapproval of E143-0306, Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle | Approved as balloted | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| TF | Equipment RAMP (Reliability, Availability, Maintainability, and Productivity) Metrics Task Force | This TF represents a consolidation of the existing E10 Revision Task Force and the existing Equipment Productivity Metrics Task Force into a single task force |
| 5340 | SNARF | Equipment RAMP Metrics TF | Revision to SEMI E10 to add Multi-Path Cluster Tool calculation examples |
| 5341 | SNARF | Equipment RAMP Metrics TF | SEMI E79 (Productivity and OEE) Revision and Reconciliation with SEMI E10 |
Authorized Ballots
# | When | SC/TF/WG | Details |
| 3847D | Cycle 2-2012 | EMC Task Force | Revision of SEMI E33-94, Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility, with title change to: Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC) |
| 5169 | Cycle 1-2012 | ESD/ESC Task Force | Revision to SEMI E78-0309, Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment |
| 5238 | Cycle 1-2012 | ESD/ESC Task Force | Revision to SEMI E129-0709, Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
In conjunction with NA Spring 2002 meetings, to be held April 2 - 6 at SEMI HQ in San Jose, California..
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