SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: SEMI Headquarters in San Jose, California
Date of Meeting: 04/04/2013
Meeting End Date: 04/04/2013
Recording SEMI Standards Staff: Paul Trio
CER Posted to Web: 04/12/2013
Leadership Changes
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
 | * * * Cycle 1, 2013 Voting Period * * * | | |
4316I | Line Item Revision to SEMI S2-0712a, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22-0712, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment | |  |
Line Item 1 | Fail-to-safe Equipment Control Systems Revision | Failed and returned to task force. | |
5521 | Reapproval of SEMI S1-0708E, Safety Guideline for Equipment Safety Labels | Failed and returned to task force. |  |
5522 | Reapproval of SEMI S6-0707E, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment | Failed and returned to task force. |  |
| * * * Cycle 2, 2013 Voting Period * * * | | |
4683B | Line Item Revisions to SEMI S2-0712a, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure Criteria | |  |
Line Item 1 | Delayed Revisions Related to Chemical Exposure Criteria | Failed and returned to task force. | |
5000C | Line Item Revisions to SEMI S2-0712a, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment.
Addition of Related Information to S2: Selection of Interlock Reliability (In Delayed Effective Date Format) | |  |
Line Item 1 | Addition of Related Information to S2: Selection of Interlock Reliability (In Delayed Effective Date Format) | Passed with editorial changes. | |
5357A | Line Item Revisions to SEMI S2-0712a, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Optical Radiation | |  |
Line Item 2 | Delayed Revisions Related to Optical Radiation | Passed with editorial changes. | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 5590 | SNARF | NA EHS Committee,
5-Year Review | Reapproval of SEMI S14-0309, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment |
| 5591 | SNARF | International Fire Protection TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment.
Delayed revisions related to fire code criteria |
| TBA | SNARF | S2 Non-ionizing Radiation TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed revisions related to non-ionizing radiation |
TBA – to be announced
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
| 5590 | Cycle 3, 2013 | NA EHS Committee,
5-Year Review | Reapproval of SEMI S14-0309, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment |
| 4316J | Cycle 3, 2013
(or C4-13) | S22 TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
Revisions related to clarifying the FECS criteria of S2 and S22 |
| TBA | Cycle 3, 2013
(or C4-13) | S2 Non-ionizing Radiation TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed revisions related to non-ionizing radiation |
| 4683C | Cycle 4, 2013 | S2 Chemical Exposure TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revisions Related to Chemical Exposure |
| 4449E | Cycle 4, 2013 | S2 Ladders & Steps TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Revisions related to stairs, ladders, platforms, and fall protection |
| 5009B | Cycle 4, 2013 | Ergonomics TF | Delayed Line Items Revisions to SEMI S8, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment |
| 5591 | Cycle 4, 2013 | International Fire Protection TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment.
Delayed revisions related to fire code criteria |
TBA – to be announced
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
North America Standards Meetings at SEMICON West 2013
July 8-11, 2013
San Francisco Marriott Marquis Hotel
55 Fourth Street
San Francisco, California 94103
Monday, July 8
- S22 (Electrical Safety) TF (9:00 AM to 10:30 AM)
- S8 Ergonomics TF (10:30 AM to 12:00 Noon)
- S2 Non-Ionizing Radiation TF (1:00 PM to 2:00 PM)
- S2 Chemical Exposure TF (2:00 PM to 3:30 PM)
- S2 Ladders & Steps TF (3:30 PM to 5:00 PM)
- Seismic Protection Japan TF (5:00 PM to 6:00 PM)
Tuesday, July 9
- [ICRC (8:30 AM to 11:00 AM)]
- S10 Revision Europe TF (11:00 AM to 11:30 AM)
- S1 5-Year Review Discussion (11:30 AM to 12:00 Noon)
- Fail-Safe Fault-Tolerant TF (1:00 PM to 2:00 PM)
Wednesday, July 10
- S2 Machinery Directive Mapping TF (8:00 AM to 9:00 AM)
- MESSC (9:00 AM to 11:00 AM)
- Fire Protection TF (11:00 AM to 12:00 Noon)
- EHS Leadership Meeting (1:00 PM to 2:00 PM)
- S6 Revision TF (2:00 PM to 3:00 PM)
- S23 Revision Japan TF (5:30 PM to 6:30 PM)
Thursday, July 11
- EHS Committee (9:00 AM to 6:00 PM)
For more information about the NA Standards SEMICON West 2013 meetings, please visit: semi.org/standards
|