SEMI International Standards Committee Express Report

Standards Region: North America

Committee: Liquid Chemicals

Place of Meeting: San Francisco Marriot Marquis in San Francisco, CA

Date of Meeting: 07/10/2012

Recording SEMI Standards Staff: Michael Tran

CER Posted to Web: 07/18/2012

Leadership Changes in the Committee

Group	Previous Leader	New Leader
Statistical Methods TF	(disbanded)

Technical Ballot Actions

Document #	Document Title	Committee Action	A&R Forms for Approved Ballots
4544D	Revision to SEMI C24-0301, Specification for n-Butyl Acetate	Failed and reballoted
4547D	Revision to SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone	Failed and reballoted
5188	New Standard: Guide to Evaluate the Performance of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems	Failed and reballoted
5191B	Revision to SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants	Failed and reballoted
5299B	Revision to SEMI C26-0306 with title change to: Specification and Guide for Hexamethyldisilazane (HMDS)	Passed with editorial changes
5356A	Revision of SEMI C51-0706, Specifications and Guidelines for Xylenes with title change to: Specifications and Guide for Xylenes	Failed and reballoted

New Committee or Task Force Activities

#	Type	SC/TF/WG	Details
---	SNARF	TBD	Revision to SEMI F40-0699E, Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
---	SNARF	Analytical Methods TF	Reapproval of SEMI F18-95, Guide for Determining the Hydrostatic Strength of, and Design Basis for, Thermoplastic Pipe and Tubing
4989	SNARF	Determining Roughness of Polymer Surfaces TF	Revised title of SNARF #4989: New Standard: Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy

Technical Ballots Expected for Review at the Next Committee Meeting

#	When	SC/TF/WG	Details
4544E	Cycle 5 or 6-2012	Analytical Methods TF	Revision to SEMI C24-0301, Specification for n-Butyl Acetate
4547E	Cycle 5 or 6-2012	Analytical Methods TF	Revision to SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone
5188A	Cycle 5 or 6-2012	UPW Filtration Efficiency TF	New Standard: Guide to Evaluate the Performance of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
5415	Cycle 5 or 6-2012	F63 Revision TF	Revision to SEMI F63, Guide for Ultrapure Water Used in Semiconductor Processing
5191C	Cycle 5 or 6-2012	Analytical Methods TF	Revision to SEMI C34-0306, Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants
5356B	Cycle 5 or 6-2012	Analytical Methods TF	Revision to SEMI C51-0706, Specifications and Guidelines for Xylenes with title change to: Specifications and Guide for Xylenes
4989	Cycle 5 or 6-2012	Determining Roughness of Polymer Surfaces TF	New Standard: Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy
---	Cycle 5 or 6-2012	Analytical Methods TF	Reapproval of SEMI F18-95, Guide for Determining the Hydrostatic Strength of, and Design Basis for, Thermoplastic Pipe and Tubing

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

Liquid Chemicals Meeting Schedule for NA Standards Fall 2012 Meetings at SEMI Headquarters, San Jose, CA*

• Monday, October 29

– F104 Rewrite TF (1:00 PM to 2:00 PM)

– Polymer Surface Roughness TF (2:00 PM to 3:00 PM)

– UPW Filtration TF/ F63 TF (3:00 PM to 5:00 PM)

• Tuesday, October 30

– F57 Discussion/ITRS Alignment (8:00 AM to 9:00 AM)

– F39, F31& F41 Rewrite TF (9:00 AM to 10:00 AM)

– Analytical Methods TF (10:00 AM to 12 Noon)

– Liquid Chemicals Committee (1:00 PM to 4:00 PM)

*Times and dates are subject to change

For more information and the latest schedule, please visit http://www.semi.org/en/node/42316