SEMI International Standards Committee Express Report
Leadership Changes in the Committee
Technical Ballot Actions
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
|Standards Region: Korea|
|Place of Meeting: Seoul, Korea|
|Date of Meeting: 02/09/2012|
|Recording SEMI Standards Staff: Natalie Shim|
|CER Posted to Web: 02/16/2012|
New Committee or Task Force Activities
Technical Ballots Expected for Review at the Next Committee Meeting
Listing of documents approved by the committee for letter ballot.
A&R Forms for Approved Ballots
|4771A||New Standard: Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal||Failed and returned to the task force for re-work|
|4922A||New Standard: Guide for Equipment Fan Filter Unit (EFFU) Performance||Failed and returned to the task force for re-work|
Special Announcements of the Committee (Workshops, Programs, etc.)
Wed Jun 20, 2012 15:00-17:00 at SEMI Korea office
|4771B||Cycle 3||Equipment Cleanness TF||New Standard: Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal|
|4922B||Cycle 3||Equipment Cleanness TF||New Standard: Guide for Equipment Fan Filter Unit (EFFU) Performance|
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