SEMI International Standards Committee Express Report

Standards Region: Korea
Committee: Facilities
Place of Meeting: Seoul, Korea
Date of Meeting: 02/09/2012
Recording SEMI Standards Staff: Natalie Shim
CER Posted to Web: 02/16/2012


Leadership Changes in the Committee
None.

Technical Ballot Actions
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
4771ANew Standard: Test Method for Equipment Fan Filter Unit (EFFU) Particle RemovalFailed and returned to the task force for re-work
4922ANew Standard: Guide for Equipment Fan Filter Unit (EFFU) PerformanceFailed and returned to the task force for re-work
New Committee or Task Force Activities
None.

Technical Ballots Expected for Review at the Next Committee Meeting
Listing of documents approved by the committee for letter ballot.
#
When
SC/TF/WG
Details
4771BCycle 3Equipment Cleanness TFNew Standard: Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal
4922BCycle 3Equipment Cleanness TFNew Standard: Guide for Equipment Fan Filter Unit (EFFU) Performance


Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
Wed Jun 20, 2012 15:00-17:00 at SEMI Korea office