SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: SEMI HQ, San Jose, CA
Date of Meeting: 10/25/2011
Meeting End Date: 10/25/2011
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 11/02/2011
Leadership Changes
Group | Previous Leader | New Leader |
| Pressure Measurement TF |  | David Colquhoun (BriskHeat & Measurement Specialties Representative) is the new co-leader. |
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
4737D | New Standard: Guide For Guide For Heater Systems Requirements | Passed as balloted |  |
4785A | Revision of SEMI F22-1102, Guide for Gas Distribution Systems | Failed and to be reballoted | |
5243 | Reapproval of SEMI F53-0307, Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers | Passed as balloted | |
5245 | Reapproval of SEMI F55-0600 (Reapproved 0307), Test Method for Determining the Corrosion Resistance of Mass Flow Controllers | Passed as balloted |  |
5246 | Reapproval of SEMI F56-0600 (Reapproved 0307), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers | Passed as balloted |  |
5217A | Revision of SEMI C9.1-93 (Reapproved 1102), Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures | Passed as balloted |  |
5218A | Revision of SEMI C15-95 (Reapproved 1102), Test Method for ppm and ppb Humidity Standards | Passed as balloted |  |
5247 | Withdrawal of SEMI C3.26-0301, Specification for Tungsten Hexafluoride (WF6) In Cylinders, 99.8% Quality | Passed as balloted |  |
5248 | Withdrawal of SEMI C3.33-92 (Reapproved 0303), Standard for Boron Trichloride (BCl3) (Provisional) | Passed as balloted |  |
5249 | Withdrawal of SEMI C3.51-1101, Specification for Boron Trichloride (BCl3), 99.98% Quality | Passed as balloted |  |
5250 | Withdrawal of SEMI C3.52-0200, Standard for Tungsten Hexafluoride, 99.996% Quality | Passed as balloted |  |
5244 | Reapproval of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean Environments | Passed with editorial changes |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
In conjunction with NA Spring Meeting, April 2-6, 2012 at SEMI HQ, San Jose, CA. Check www.semi.org/standards for the latest schedule update.
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