SEMI International Standards
Standards Locale: North America
Committee: Liquid Chemicals
Place of Meeting: SEMI Headquarters in San Jose, California
Date of Meeting: 10/25/2011
Meeting End Date: 10/25/2011
Recording SEMI Standards Staff: Paul Trio
CER Posted to Web: 11/08/2011
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
4555A | Revision to SEMI F57-0301 With Title Change To: Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems | Passed as balloted. |  |
5189 | Revision to SEMI F104-1107 With Title Change To: Particle Test Method Guide for Evaluation of Components Used In Ultrapure Water and Liquid Chemical Distribution Systems | Passed as balloted. |  |
5190A | Revision to SEMI C22-0306 With Title Change To: Guide for Boron Tribromide | Passed as balloted. |  |
5192A | Revision to SEMI C38-0306, With Title Change To: Guide for Phosphorus Oxychloride | Passed as balloted. Superclean |  |
5298 | Revision of SEMI C25-0306, Specification for Dichloromethane (Methylene Chloride) | Passed as balloted. |  |
5299 | Revision of SEMI C26 With Title Change To: Specification and Guide for Hexamethyldisilazane (HMDS) | Failed and reballoted |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
--- | TFOF | SEMI F39 & F41 Re-Write Task Force | New task force. |
5354 | SNARF | Analytical Methods TF | Revision to SEMI C47-0706, Guideline for Trans 1, 2 Dichloroethylene |
5355 | SNARF | Analytical Methods TF | Revision to SEMI C48-0706, Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade |
5356 | SNARF | Analytical Methods TF | Revision to SEMI C51-0706, Specifications and Guidelines for Xylenes |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
4543A | C1-12 | Analytical Methods TF | SEMI C20-1101, Specification and Guidelines for Ammonium Fluoride 40% |
4544C | C1-12 | Analytical Methods TF | SEMI C24-0301, Specification for n-Butyl Acetate |
5299A | C1-12 | Analytical Methods TF | SEMI C26-0306, Specification and Guideline for Hexamethyldisilazane (HMDS) |
4547C | C1-12 | Analytical Methods TF | SEMI C33-0301, Specifications for n-Methyl 2-Pyrrolidone |
4957A | C1-12 | Analytical Methods TF | SEMI C41-0705, Specifications and Guidelines for 2-Propanol |
5193 | C1-12 | Analytical Methods TF | SEMI C46-0306, Guideline for 25% Tetramethylammonium Hydroxide |
5354 | C1-12 | Analytical Methods TF | SEMI C47-0706, Guideline for Trans 1, 2 Dichloroethylene |
5355 | C1-12 | Analytical Methods TF | SEMI C48-0706, Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade |
5356 | C1-12 | Analytical Methods TF | SEMI C51-0706, Specifications and Guidelines for Xylenes |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
SEMI F34 to Inactive Status
The NA Liquid Chemicals Committee agreed to move SEMI F34 (Guide for Liquid Chemical Pipe Labeling) to Inactive status.
Next Meeting
North America Standards Spring 2012 Meetings
April 2-5, 2012
SEMI Headquarters
3081 Zanker Road
San Jose, California 95134
Monday, April 2
- F104 Rewrite TF (1:00 PM to 2:00 PM)
- F39 & F41 Rewrite TF (2:00 PM to 3:00 PM)
- Polymer Surface Roughness TF (3:00 PM to 4:00 PM)
- UPW Filtration TF (4:00 PM to 5:00 PM)
Tuesday, April 3
- Statistical Methods TF (8:00 AM to 10:00 AM)
- Analytical Methods TF (10:00 AM to 12 Noon)
- Liquid Chemicals Committee (1:00 PM to 4:00 PM)
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