SEMI International Standards Committee Express Report

Standards Region: North America
Committee: Facilities & Gases
Place of Meeting: San Francisco Marriott, California
Date of Meeting: 07/14/2009
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web:


Leadership Changes in the Committee
None.

Technical Ballot Actions

Document#
Document Title
Committee Action
A&R Forms for Approved Ballots
4680A
Revision of SEMI E52-0309 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow ControllersPassed as balloted
4680A.doc
4677A
Revision of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow ControllersFailed and reballot
4677Afailed.doc
4678A
Revision of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow ControllerFailed and reballot
4678Afailed.doc
4722A
Revision to SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery SystemFailed and reballot
4722Afailed.doc
4654
Revision of SEMI C3.12-1102 Specification for Ammonia (NH3) in Cylinders, 99.998% QualityPassed with editorial changes
4654.doc
4674
Revision of SEMI C3.32-0301 - Specification for Chlorine (Cl2), 99.996% QualityPassed as balloted
4754.doc
4755
Reapproval of SEMI C3.34-1102 - Specification for Disilane (Si2H6) in Cylinders, 97% QualityPassed with editorial changes
4755.doc
4756
Revision of SEMI C3.35-1101 - Specification for Hydrogen Chloride (HCl), 99.997% QualityPassed as balloted
4756.doc
4757
Revision of SEMI C3.37-0701 -Specification for Hexafluoroethane (C2F6), 99.97% QualityPassed with editorial changes
4757.doc


New Committee or Task Force Activities

Document #
Type
Title
Details
TFOF
Equipment Cleanness Task ForceThis TF was submitted by Korea Facilities Working Group. The objective of this TF is to maintain the cleanness level inside of process and manufacturing equipments.
4771
SNARF
New Standard: Test Method for Equipment Fan Filter Unit (EFFU) This activity was submitted by Equipment Cleanness Task Force.



The following lists of standards in Facilities and Gases volumes are due for 5 year review. Over due for 5 yrs review standards that are not supported by the committee will be printed as inactive in the watermark. If anyone wishes to review any of these standards, please contact Kevin at knguyen@semi.org.
5 year_review 7-09 v1.xlsSEMI Docs review 25Apr08 with Andreas c.xls

Technical Ballots Expected for Review at the Next Committee Meeting

* * * Cycle – 5 or 6* * *
Document #
Document Title
Task Force
Special Condition
4677B
Reapproval of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow ControllersMFC TF
4678B
Reapproval of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow ControllerMFC TF
4769
Revision of SEMI E52-1109 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow ControllersMFC TF
4722B
Revision to SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery SystemFilters and Purifiers TF
4679A
Reapproval of SEMI F79-0703 - Guideline for Gas Compatibility with Silicon Used in Gas Distribution ComponentsMaterials of Construction for Gases Delivery System TF
Special Announcements of the Committee (Workshops, Programs, etc.)
The next Facilities and Gases committee meeting will be held some time in the first week of November, 2009 in the Bay Area, California. For the latest schedule, visit www.semi.org/standards


Next Meeting
None.