SEMI International Standards
Standards Locale: North America |
Committee: Facilities & Gases |
Place of Meeting: San Francisco Marriott, California |
Date of Meeting: 07/14/2009 |
Meeting End Date: 07/14/2009 |
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Recording SEMI Standards Staff: Kevin Nguyen |
CER Posted to Web: |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document# | Document Title | Committee Action | A&R Forms for Approved Ballots |
4680A | Revision of SEMI E52-0309 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers | Passed as balloted | |
4677A | Revision of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers | Failed and reballot | |
4678A | Revision of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller | Failed and reballot | |
4722A | Revision to SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System | Failed and reballot | |
4654 | Revision of SEMI C3.12-1102 Specification for Ammonia (NH3) in Cylinders, 99.998% Quality | Passed with editorial changes | |
4674 | Revision of SEMI C3.32-0301 - Specification for Chlorine (Cl2), 99.996% Quality | Passed as balloted | |
4755 | Reapproval of SEMI C3.34-1102 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality | Passed with editorial changes | |
4756 | Revision of SEMI C3.35-1101 - Specification for Hydrogen Chloride (HCl), 99.997% Quality | Passed as balloted | |
4757 | Revision of SEMI C3.37-0701 -Specification for Hexafluoroethane (C2F6), 99.97% Quality | Passed with editorial changes | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Document # | Type | Title | Details |
| TFOF | Equipment Cleanness Task Force | This TF was submitted by Korea Facilities Working Group. The objective of this TF is to maintain the cleanness level inside of process and manufacturing equipments. |
4771 | SNARF | New Standard: Test Method for Equipment Fan Filter Unit (EFFU) | This activity was submitted by Equipment Cleanness Task Force. |
The following lists of standards in Facilities and Gases volumes are due for 5 year review. Over due for 5 yrs review standards that are not supported by the committee will be printed as inactive in the watermark. If anyone wishes to review any of these standards, please contact Kevin at knguyen@semi.org.
Authorized Ballots
* * * Cycle – 5 or 6* * * |
Document # | Document Title | Task Force | Special Condition |
4677B | Reapproval of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers | MFC TF | |
4678B | Reapproval of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller | MFC TF | |
4769 | Revision of SEMI E52-1109 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers | MFC TF | |
4722B | Revision to SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System | Filters and Purifiers TF | |
4679A | Reapproval of SEMI F79-0703 - Guideline for Gas Compatibility with Silicon Used in Gas Distribution Components | Materials of Construction for Gases Delivery System TF | |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
The next Facilities and Gases committee meeting will be held some time in the first week of November, 2009 in the Bay Area, California. For the latest schedule, visit www.semi.org/standards
Next Meeting
None.
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