CER - North America Facilities & Gases Committee Meeting held on 07/14/2009

SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: San Francisco Marriott, California
Date of Meeting: 07/14/2009
Meeting End Date: 07/14/2009
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web:
Leadership Changes
None.

TC Chapter Structure Changes
None.

Ballot Results

Document#	Document Title	Committee Action	A&R Forms for Approved Ballots
4680A	Revision of SEMI E52-0309 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers	Passed as balloted
4677A	Revision of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers	Failed and reballot
4678A	Revision of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller	Failed and reballot
4722A	Revision to SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System	Failed and reballot
4654	Revision of SEMI C3.12-1102 Specification for Ammonia (NH3) in Cylinders, 99.998% Quality	Passed with editorial changes
4674	Revision of SEMI C3.32-0301 - Specification for Chlorine (Cl2), 99.996% Quality	Passed as balloted
4755	Reapproval of SEMI C3.34-1102 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality	Passed with editorial changes
4756	Revision of SEMI C3.35-1101 - Specification for Hydrogen Chloride (HCl), 99.997% Quality	Passed as balloted
4757	Revision of SEMI C3.37-0701 -Specification for Hexafluoroethane (C₂F₆), 99.97% Quality	Passed with editorial changes

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

Document #	Type	Title	Details
	TFOF	Equipment Cleanness Task Force	This TF was submitted by Korea Facilities Working Group. The objective of this TF is to maintain the cleanness level inside of process and manufacturing equipments.
4771	SNARF	New Standard: Test Method for Equipment Fan Filter Unit (EFFU)	This activity was submitted by Equipment Cleanness Task Force.

The following lists of standards in Facilities and Gases volumes are due for 5 year review. Over due for 5 yrs review standards that are not supported by the committee will be printed as inactive in the watermark. If anyone wishes to review any of these standards, please contact Kevin at [email protected].

Authorized Ballots

*** * * Cycle – 5 or 6* * ***
Document #	Document Title	Task Force	Special Condition
4677B	Reapproval of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers	MFC TF
4678B	Reapproval of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller	MFC TF
4769	Revision of SEMI E52-1109 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers	MFC TF
4722B	Revision to SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System	Filters and Purifiers TF
4679A	Reapproval of SEMI F79-0703 - Guideline for Gas Compatibility with Silicon Used in Gas Distribution Components	Materials of Construction for Gases Delivery System TF

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
The next Facilities and Gases committee meeting will be held some time in the first week of November, 2009 in the Bay Area, California. For the latest schedule, visit www.semi.org/standards

Next Meeting
None.

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