SEMI International Standards Committee Express Report

Standards Region: Japan
Committee: Micropatterning
Place of Meeting: SEMI Japan Office, Tokyo
Date of Meeting: 04/12/2012
Recording SEMI Standards Staff: Hirofumi Kanno
CER Posted to Web: 04/18/2012


Leadership Changes in the Committee
None.

Technical Ballot Actions
None.

New Committee or Task Force Activities
None.

Technical Ballots Expected for Review at the Next Committee Meeting

#
When
SC/TF/WG
Details
5229Cycle 5 or 6Mask Data Format for Mask Tools TFRevision to SEMI P45-0211, SPECIFICATION FOR JOB DECK DATA FORMAT FOR MASK TOOLS


Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
The next Japan Micropatterning Committee meeting is schedule for 28 August, 2012 at SEMI Japan office, Tokyo, Japan.