SEMI International Standards
Standards Locale: Korea
Committee: Information & Control
Place of Meeting: Seoul, Korea
Date of Meeting: 04/13/2012
Meeting End Date: 04/13/2012
Recording SEMI Standards Staff: Natalie Shim
CER Posted to Web: 04/18/2012
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 5320 | Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking | Failed and rework |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
Listing of documents approved by the committee for letter ballot.
# | When | SC/TF/WG | Details |
| 5320A | Cycle 5 | GEM300 TF | Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
- 4946 ballot in cycle 3 cancelled. The ballot schedule will be determined at the next committee meeting.
- Korea GEM300 TF proposes to NA and JP GEM300 TFs to have regular teleconference for 4946 issue. Detailed proposal will be provided soon by the TF leaders.
Next Meeting
October 19, Seoul, Korea
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