SEMI International Standards
Standards Locale: North America
Committee: MEMS / NEMS
Place of Meeting: SEMI Headquarters in San Jose, California
Date of Meeting: 10/24/2011
Meeting End Date: 10/24/2011
Recording SEMI Standards Staff: Paul Trio
CER Posted to Web: 11/03/2011
Leadership Changes
Group | Previous Leader | New Leader |
| MEMS Material Characterization TF | Kevin Turner (University of Wisconsin) | Kevin Turner (University of Pennsylvania), change of affiliate |
| MEMS Reliability TF | Ravi Doraiswami (University of Maryland) | Ravi Doraiswami, change of affiliate |
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5117A | Revision of SEMI MS2-1109, Test Method for Step-Height Measurements of Thin Films | Passed as balloted. Superclean |  |
5118 | Revision of SEMI MS4-1109, Test Method for Young’s Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance | Passed as balloted. Superclean |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
TBD | SNARF | NA MEMS/NEMS Committee | Reapproval of SEMI MS1-0307, Guide to Specifying Wafer-Wafer Bonding Alignment Targets |
TBD | SNARF | Microfluidics TF | Revision to SEMI MS7-0708 - Specification for Microfluidic Interfaces to Electronic Device Packages
[SNARF to be submitted at the NA Standards Spring 2012 Meeting (April 2)] |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
| 5266 Info | Nov-Dec 2011 | Packaging TF | New Standard: Guide for Determining Fluid Permeation through MEMS Packaging Materials
[Informational Ballot to be issued before Cycle 1, 2012] |
| 5266 | C1-12 | Packaging TF | New Standard: Guide for Determining Fluid Permeation through MEMS Packaging Materials |
| TBD | C1-12
(or C2-12) | MEMS/NEMS Committee | Reapproval of SEMI MS1-0307, Guide to Specifying Wafer-Wafer Bonding Alignment Targets |
| 4719A | C3-12
(or C4-12) | Terminology TF | Revision to SEMI MS3-0307, Terminology for MEMS Technology |
| TBD | C3-12
(C4-12) | Microfluidics TF | Revision to SEMI MS7-0708 - Specification for Microfluidic Interfaces to Electronic Device Packages |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
North America Standards Spring 2012 Meetings
April 2-5, 2011
SEMI Headquarters
3081 Zanker Road
San Jose, California 95134
U.S.A.
Monday, April 2
- Wafer Bond TF (8:00 AM to 9:00 AM)
- Microfluidics TF/Microtube WG (9:00 AM to 10:00 AM)
- Packaging TF (10:00 AM to 11:00 AM)
- Terminology TF (11:00 AM to 11:30 AM)
- MEMS Reliability WG (11:30 AM to 12:00 Noon)
- Joint Materials Characterization TF and ASTM E08.05.03 Meeting (1:30 PM to 2:30 PM)
- MEMS / NEMS Committee (2:30 PM to 4:30 PM)
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