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SEMI International Standards
Standards Locale: Japan
Committee: Facilities & Gases
Place of Meeting: SEMI Japan, Tokyo, Japan
Date of Meeting: 09/29/2011
Meeting End Date: 09/29/2011
Recording SEMI Standards Staff: Akiko Yamamoto
CER Posted to Web: 10/13/2011
Leadership Changes
None.

TC Chapter Structure Changes
None.

Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5026BRevision to SEMI F1-96, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components including Revision to Add a New Subordinate Standard, Specification for Leak Integrity of Ultra-High Purity Gas Piping Systems and Components to SEMI F1FailedBallot Review for 5026B.pdf
5277Revision to SEMI F82-0304, Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution SystemsFailedBallot Review for 5277.pdf
5278Revision to SEMI F83-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailedBallot Review for 5278.pdf
5279Revision to SEMI F84-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailedBallot Review for 5279.pdf
5280Revision to SEMI F85-0304, Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailedBallot Review for 5280.pdf
5281Revision to SEMI F86-0304, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailedBallot Review for 5281.pdf
5282Revision to SEMI F87-0304, Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailedBallot Review for 5282.pdf
5283Revision to SEMI F88-0304E, Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution SystemsFailedBallot Review for 5283.pdf
5284Revision to SEMI F89-0304E, Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution SystemsFailedBallot Review for 5284.pdf
5285Revision to SEMI F90-0304E, Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailedBallot Review for 5285.pdf
5286Revision to SEMI F91-0304E, Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailedBallot Review for 5286.pdf
5287Revision to SEMI F92-0304E, Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution SystemsFailedBallot Review for 5287.pdf
5288Revision to SEMI F93-0304E, Specification for Dimension of One Port Components for 1.5 Inch Type Four Fastener Configuration Surface Mount Gas Distribution SystemsFailedBallot Review for 5288.pdf
5289Revision to SEMI F94-0304E, Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution SystemsFailedBallot Review for 5289.pdf
5290Revision to SEMI F95-0304E, Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution SystemsFailedBallot Review for 5290.pdf


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
SEMICON Japan 2011
Wednesday, December 7, 2010 15:00-17:00
Makuhari Messe, Chiba, Japan









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