SEMI International Standards
Standards Locale: Japan
Committee: EHS
Place of Meeting: SEMI Japan, Tokyo, Japan
Date of Meeting: 04/18/2013
Meeting End Date: 04/18/2013
Recording SEMI Standards Staff: Naoko Tejima
CER Posted to Web: 04/30/2013
Leadership Changes
Group | Previous Leader | New Leader |
| S13 Revision Task Force was disbanded. | Shigehito Ibuka (Horiba) | None |
| S17 Revision Task Force was disbanded. | Norio Nakashima (Murata Machinery)
Shigehito Ibuka (Horiba) | None |
TC Chapter Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 5513 | Line Item Revision to SEMI S23-0311, Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment |  | 5513_Ballot_Report.pdf |
| Line Item 1 | The expansion of Related Information (RI) 2 | Failed |  |
| Line Item 2 | The addition of text explaining the meaning and limits of the exhaust energy conversion factor. | Passed as balloted |  |
| Line Item 3 | A small editorial change in the sleep mode definitions, and the addition of a criterion related to load port availability during sleep mode. | Passed with editorial changes |  |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 5556 | Revised
SNARF | Seismic Protection Task Force | Line Item Revisions to SEMI S2-0712, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment Revisions Related to Section 19 Seismic Protection |
Authorized Ballots
# | When | SC/TF/WG | Details |
| 5513A | the earliest possible cycle | S23 Revision Task Force | Revision to SEMI S23-0311, Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment |
| 5556 | the earliest possible cycle | Seismic Protection Task Force | Line Item Revisions to SEMI S2-0712, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment Revisions Related to Section 19 Seismic Protection |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
STEP SEMI S2 to be held in the latter part of 2013 at SEMI Japan office.
Next Meeting
SEMI Japan Standards Fall 2013 Meetings
Thursday, September 26, 2013, 10:30-17:00, SEMI Japan, Ichigaya, Tokyo, Japan
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