Complementary Files

The following documents were created by the International Standards program during development of the Standards referenced below. Complementary Files are official content required for using a Standard or Safety Guideline that is part of that Document, but is published separately and in a different file format. Please reference the text of the Standards to understand the role of the various XML files (e.g., requirements, examples, related information, etc.).

The XML files are provided here for direct use by software developers as part of the implementation process of the related Standards.

 


NOTICE WHERE APPLICABLE:
 

SEMI hereby grants permission to reproduce and use the following material, subject to the following reservations and conditions: These digital files are supplied for the users' convenience. They must be used with the Standard or Safety Guideline from which they were excerpted. All notices and disclaimers which pertain to the original Standards or Safety Guidelines are in effect for these files except where otherwise noted. SEMI retains all other rights.


Item

Committee / Applicable Standard

Complementary File for SEMI E120.1-0414

Standards - Information & Control / SEMI E120.1-0414

Download ZIP 1.5K

 

Complementary File for SEMI E120.2-0823

Standards - Information & Control / SEMI E120.2-0823

Download SEMIE120-02-0823.PROTO 1.0K

 

Complementary File for SEMI E120.2-0922

Standards - Information & Control / SEMI E120.2-0922

Download SEMIE120-02-0922.PROTO 9.9K

 

Complementary File for SEMI E125.1-0414

Standards - Information & Control / SEMI E125.1-0414

Download ZIP 1.0K

 

Complementary File for SEMI E125.2-0923

Standards - Information & Control / SEMI E125.2-0923

Download SEMIE125-02-0923.PROTO 1.0K

 

Complementary File for SEMI E125.2-1022

Standards - Information & Control / SEMI E125.2-1022

Download SEMIE125-02-1022.PROTO 21.3K

 

Complementary File for SEMI E128-0414

Standards - Information & Control / SEMI E128-0414

Download ZIP 1.0K

 

Complementary File for SEMI E132.1-0414

Standards - Information & Control / SEMI E132.1-0414

Download ZIP 1.0K

 

Complementary File for SEMI E132.2-0422

Standards - Information & Control / SEMI E132.2-0422

Download SEMIE132-02-0422.PROTO 27.6K

 

Complementary File for SEMI E132.2-0923

Standards - Information & Control / SEMI E132.2-0923

Download SEMIE132-02-0923.PROTO 1.0K

 

Complementary File for SEMI E133.1-0318

Standards - Information & Control / SEMI E133.1-0318

Download E133-1-V0318-PCSAE-SCHEMA.XSD 1.0K

 

Complementary File for SEMI E134.1-0414

Standards - Information & Control / SEMI E134.1-0414

Download ZIP 1.0K

 

Complementary File for SEMI E134.2-0923

Standards - Information & Control / SEMI E134.2-0923

Download SEMIE134-02-0923.PROTO 1.0K

 

Complementary File for SEMI E134.2-1022

Standards - Information & Control / SEMI E134.2-1022

Download SEMIE134-02-1022.PROTO 33.9K

 

Complementary File for SEMI E138-0319

Standards - Information & Control / SEMI E138-0319

Download E138-1-V0319-SCHEMA.XSD 8.6K

 

Complementary File for SEMI E138-0516

Standards - Information & Control / SEMI E138-0516

Download E138-00-0516-CF.ZIP 1.8K

 

Complementary File for SEMI E139.1-0310

Standards - Information & Control / SEMI E139.1-0310

Download E139-01-0310-XML.ZIP 1.7K

 

Complementary File for SEMI E139.3-0310

Standards - Information & Control / SEMI E139.3-0310

Download E139-03-0310-XML.ZIP 3.6K

 

Complementary File for SEMI E142-0211

Standards - Information & Control / SEMI E142-0211

Download E142-V0211-SCHEMA.ZIP 7.6K

 

Complementary File for SEMI E142-0921

Standards - Information & Control / SEMI E142-0921

Download E142-1-V0921-SCHEMA.XSD 1.0K

 

Complementary File for SEMI E145-0414

Standards - Information & Control / SEMI E145-0414

Download E145-00-0414-CF.ZIP 1.0K

 

Complementary File for SEMI E164-0414

Standards - Information & Control / SEMI E164-0414

Download ZIP 1.0K

 

Complementary File for SEMI E172-0115

Standards - Information & Control / SEMI E172-0115

Download E172-0115-CF.ZIP 33.4K

 

Complementary File for SEMI E172-0320

Standards - Information & Control / SEMI E172-0320

Download E172-0320.ZIP 13.6K

 

Complementary File for SEMI E172-1015

Standards - Information & Control / SEMI E172-1015

Download E172-00-1015-CF.ZIP 33.5K

 

Complementary File for SEMI E172-1023

Standards - Information & Control / SEMI E172-1023

Download E172-1023-SEDD-SCHEMA.XSD 1.0K

 

Complementary File for SEMI E173-0415E

Standards - Information & Control / SEMI E173-0415E

Download E173-00-0415-CF.ZIP 4.3K

 

Complementary File for SEMI E179-0320

Standards - Information & Control / SEMI E179-0320

Download SEMIE179-0320.PROTO 16.8K

 

Complementary File for SEMI E179-0623

Standards - Information & Control / SEMI E179-0623

Download SEMIE179-0623.PROTO 17.4K

 

Complementary File for SEMI E179-0822

Standards - Information & Control / SEMI E179-0822

Download SEMIE179-0822.PROTO 16.5K

 

Complementary File for SEMI E183-1121

Standards - Automated Test Equipment / SEMI E183-1121

Download SEMIE183-00-SPEC.RITDB 1,996.0K

 

Complementary File for SEMI P10-1112

Standards - Micropatterning / SEMI P10-1112

Download XML_SCHEMA_FOR_SEMI_P10-1112.ZIP 17.4K

 

Complementary File for SEMI S1-0923

Standards - EHS / SEMI S1-0923

Download SEMI_S1_SYMBOLS.DOCX 372.6K

 

Complementary File for SEMI S30-0719

Standards - EHS / SEMI S30-0719

Download MATERIAL_CHARACTERIZATION_FORM.DOCX 30.0K

 

Complementary File for SEMI T20.3-0710

Standards - Traceability / SEMI T20.3-0710

Download T020-03-V0710.ZIP 3.2K

 

Complete Schema and WSDL Files for EDA Standards Suite (Release 0710)

Standards - Information & Control / Complete Schema and WSDL Files for EDA Standards Suite (Release 0710), Updated January 2011 to add missing discovery interface files.

Download ZIP 34.6K

 

Complete Schema and WSDL Files for EDA Standards Suite (Release 1105)

Standards - Information & Control / Complete Schema and WSDL Files for EDA Standards Suite (Release 1105)

Download ZIP 27.3K

 


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