Supplemental Materials

The following documents were created by the International Standards program during development work of its Standards. While the material contained within is not a standard, it was thought by the members that these documents had significance to the semiconductor industry and should be made available.

 


NOTICE WHERE APPLICABLE:
 

Please note that these documents are not to be construed as standards, and SEMI does not guarantee the completeness or accuracy of these item. SEMI hereby grants permission to reproduce and use the following material, subject to the following reservations and conditions: These digital forms are supplied for the users’ convenience. They must be used with the standard or safety guideline from which they were excerpted. All notices and disclaimers which pertain to the original standards or safety guidelines are in effect for these forms except where otherwise noted. SEMI retains all other rights.


Item

Committee / Applicable Standard

Complementary File for SEMI E120.1-0414

Standards - Information & Control / SEMI E120.1-0414

Download ZIP 1.5K

 

Complementary File for SEMI E125.1-0414

Standards - Information & Control / SEMI E125.1-0414

Download ZIP 1.0K

 

Complementary File for SEMI E128-0414

Standards - Information & Control / SEMI E128-0414

Download ZIP 1.0K

 

Complementary File for SEMI E132.1-0414

Standards - Information & Control / SEMI E132.1-0414

Download ZIP 1.0K

 

Complementary File for SEMI E133.1-0318

Standards - Information & Control / SEMI E133.1-0318

Download E133-1-V0318-PCSAE-SCHEMA.XSD 1.0K

 

Complementary File for SEMI E134.1-0414

Standards - Information & Control / SEMI E134.1-0414

Download ZIP 1.0K

 

Complementary File for SEMI E138-0516

Standards - Information & Control / SEMI E138-0516

Download ZIP 1.0K

 

Complementary File for SEMI E139.1-0310

Standards - Information & Control / SEMI E139.1-0310

Download E139-01-0310-XML.ZIP 1.7K

 

Complementary File for SEMI E139.3-0310

Standards - Information & Control / SEMI E139.3-0310

Download E139-03-0310-XML.ZIP 3.6K

 

Complementary File for SEMI E142-0211

Standards - Information & Control / SEMI E142-0211

Download E142-V0211-SCHEMA.ZIP 7.6K

 

Complementary File for SEMI E145-0414

Standards - Information & Control / SEMI E145-0414

Download E145-00-0414-CF.ZIP 1.0K

 

Complementary File for SEMI E164-0414

Standards - Information & Control / SEMI E164-0414

Download ZIP 1.0K

 

Complementary File for SEMI E172-0115

Standards - Information & Control / SEMI E172-0115

Download ZIP 33.4K

 

Complementary File for SEMI E172-0320

Standards - Information & Control / SEMI E172-0320

Download E172-0320.ZIP 13.6K

 

Complementary File for SEMI E172-1015

Standards - Information & Control / SEMI E172-1015

Download E172-00-1015-CF.ZIP 33.5K

 

Complementary File for SEMI E173-0415E

Standards - Information & Control / SEMI E173-0415E

Download E173-00-0415-CF.ZIP 4.3K

 

Complementary File for SEMI P10-1112

Standards - Micropatterning / SEMI P10-1112

Download XML_SCHEMA_FOR_SEMI_P10-1112.ZIP 17.4K

 

Complementary File for SEMI T20.3-0710

Standards - Traceability / SEMI T20.3-0710

Download T020-03-V0710.ZIP 3.2K

 

Complete Schema and WSDL Files for EDA Standards Suite (Release 0710)

Standards - Information & Control / Complete Schema and WSDL Files for EDA Standards Suite (Release 0710), Updated January 2011 to add missing discovery interface files.

Download ZIP 34.6K

 

Complete Schema and WSDL Files for EDA Standards Suite (Release 1105)

Standards - Information & Control / Complete Schema and WSDL Files for EDA Standards Suite (Release 1105)

Download ZIP 27.3K

 

Material Characterization Form

Standards - EHS / SEMI S30-0719

Download MATERIAL_CHARACTERIZATION_FORM.DOCX 30.0K

 

SEMI E172-0320 Complementary File

Standards - Information & Control / SEMI E172-0320

Download E172-0320.ZIP 1.0K

 

Various Material for SEMI E172-0118

Standards - Information & Control / SEMI E172-0118

Download E172-00-0118-CF.ZIP 1.0K

 

XML Files for SEMI E164-0313

Standards - Information & Control / SEMI E164-0313

Download ZIP 213.6K

 

XML Files for SEMI E164-0712

Standards - Information & Control / SEMI E164-0712

Download ZIP 213.1K

 

XML Schema for SEMI E120.1-0310

Standards - Information & Control / SEMI E120.1-0310

Download ZIP 1.5K

 

XML Schema for SEMI E120.1-0705

Standards - Information & Control / SEMI E120.1-0705

Download XSD 10.9K

 

XML Schema for SEMI E120.1-0706

Standards - Information & Control / SEMI E120.1-0706

Download ZIP 1.5K

 

XML Schema for SEMI E120.1-1104

Standards - Information & Control / SEMI E120.1-1104

Download XSD 10.9K

 

XML Schema for SEMI E120.1-1108 Revised

Standards - Information & Control / SEMI E120.1-1108

Download XSD 10.9K

 

XML Schema for SEMI E120.1-1108

Standards - Information & Control / SEMI E120.1-1108

Download ZIP 1.4K

 

XML Schema for SEMI E125.1-0305

Standards - Information & Control / SEMI E125.1-0305

Download ZIP 13.2K

 

XML Schema for SEMI E125.1-0307

Standards - Information & Control / SEMI E125.1-0307

Download ZIP 13.2K

 

XML Schema for SEMI E125.1-0308

Standards - Information & Control / SEMI E125.1-0308

Download ZIP 8.3K

 

XML Schema for SEMI E125.1-0310

Standards - Information & Control / SEMI E125.1-0310

Download ZIP 7.7K

 

XML Schema for SEMI E125.1-0709

Standards - Information & Control / SEMI E125.1-0709

Download ZIP 7.9K

 

XML Schema for SEMI E125.1-0710

Standards - Information & Control / SEMI E125.1-0710

Download ZIP 7.8K

 

XML Schema for SEMI E128-0706

Standards - Information & Control / SEMI E128-0706

Download XSD 3.2K

 

XML Schema for SEMI E128-0706

Standards - Information & Control / SEMI E128-0706

Download ZIP 1.1K

 

XML Schema for SEMI E132.1-0305

Standards - Information & Control / SEMI E132.1-0305

Download ZIP 9.3K

 

XML Schema for SEMI E132.1-0310E2

Standards - Information & Control / SEMI E132.1-0310E2, Updated January 2011 to add missing discovery interface files.

Download ZIP 13.9K

 

XML Schema for SEMI E132.1-0310E

Standards - Information & Control / SEMI E132.1-0310E

Download ZIP 11.1K

 

XML Schema for SEMI E132.1-0310

Standards - Information & Control / SEMI E132.1-0310

Download ZIP 13.9K

 

XML Schema for SEMI E132.1-1107

Standards - Information & Control / SEMI E132.1-1107

Download ZIP 11.8K

 

XML Schema for SEMI E132.1-1107

Standards - Information & Control / SEMI E132.1-1107

Download ZIP 8.2K

 

XML Schema for SEMI E132.1-1108

Standards - Information & Control / SEMI E132.1-1108

Download ZIP 2.8K

 

XML Schema for SEMI E134.1-0305

Standards - Information & Control / SEMI E134.1-0305

Download ZIP 13.8K

 

XML Schema for SEMI E134.1-0308

Standards - Information & Control / SEMI E134.1-0308

Download ZIP 8.6K

 

XML Schema for SEMI E134.1-0310

Standards - Information & Control / SEMI E134.1-0310

Download ZIP 8.5K

 

XML Schema for SEMI E134.1-0709

Standards - Information & Control / SEMI E134.1-0709

Download ZIP 8.8K

 

XML Schema for SEMI E134.1-0710

Standards - Information & Control / SEMI E134.1-0710

Download ZIP 8.7K

 

XML Schema for SEMI E134.1-1105

Standards - Information & Control / SEMI E134.1-1105

Download ZIP 13.0K

 

XML Schema for SEMI E138-0305

Standards - Information & Control / SEMI E138-0305

Download XSD 1.8K

 

XML Schema for SEMI E138-0309

Standards - Information & Control / SEMI E138-0309

Download XSD 7.8K

 

XML Schema for SEMI E138-0709

Standards - Information & Control / SEMI E138-0709

Download ZIP 1.8K

 

XML Schema for SEMI E139.1-0308

Standards - Information & Control / SEMI E139.1-0308

Download ZIP 1.1K

 

XML Schema for SEMI E139.1-0705

Standards - Information & Control / SEMI E139.1-0705

Download ZIP 1.5K

 

XML Schema for SEMI E139.1-1107

Standards - Information & Control / SEMI E139.1-1107

Download ZIP 1.6K

 

XML Schema for SEMI E139.3-0709

Standards - Information & Control / SEMI E139.3-0709

Download XSD 14.2K

 

XML Schema for SEMI E139.3-1108

Standards - Information & Control / SEMI E139.3-1108

Download ZIP 3.6K

 

XML Schema for SEMI E142.1-0705

Standards - Information & Control / SEMI E142.1-0705

Download ZIP 3.1K

 

XML Schema for SEMI E142.1-0706

Standards - Information & Control / SEMI E142.1-0706

Download ZIP 2.1K

 

XML Schema for SEMI E142.1-1105

Standards - Information & Control / SEMI E142.1-1105

Download ZIP 3.7K

 

XML Schema for SEMI E142.3-0706

Standards - Information & Control / SEMI E142.3-0706

Download ZIP 1.4K

 

XML Schema for SEMI E142.3-1105

Standards - Information & Control / SEMI E142.3-1105

Download SDL 6.8K

 

XML Schema for SEMI E145-0306

Standards - Information & Control / SEMI E145-0306

Download ZIP 4.1K