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Supplemental Materials

The following documents were created by the International Standards program during development work of its Standards. While the material contained within is not a standard, it was thought by the members that these documents had significance to the semiconductor industry and should be made available.

 


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   Please note that these documents are not to be construed as standards, and SEMI does not guarantee the completeness or accuracy of these item.

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   supplied for the users’ convenience. They must be used with the standard or safety guideline from which they were excerpted. All notices and disclaimers
   which pertain to the original standards or safety guidelines are in effect for these forms except where otherwise noted. SEMI retains all other rights.
 

Material Title

Committee / Standard

Complete Schema and WSDL Files for EDA Standards Suite (Release 1105) Standards - Information & Control / Complete Schema and WSDL Files for EDA Standards Suite (Release 1105) Download ZIP 27.3K

Example COO of Gas Delivery Systems Spreadsheet from SEMI E140-0305 Standards - Metrics / SEMI E140-0305 Download XLS 70.0K

XML Schema for E139.1-0705 Standards - Information & Control / SEMI E139.1-0705 Download ZIP 1.5K

XML Schema for SEMI E120.1-0705 Standards - Information & Control / SEMI E120.1-0705 Download XSD 10.9K

XML Schema for SEMI E120.1-0706 Standards - Information & Control / SEMI E120.1-0706 Download ZIP 1.0K

XML Schema for SEMI E120.1-1104 Standards - Information & Control / SEMI E120.1-1104 Download XSD 10.9K

XML Schema for SEMI E125.1-0305 Standards - Information & Control / SEMI E125.1-0305 Download ZIP 13.2K

XML Schema for SEMI E125.1-0307 Standards - Information & Control / SEMI E125.1-0307 Download ZIP 13.2K

XML Schema for SEMI E125.1-0308 Standards - Information & Control / SEMI E125.1-0308 Download ZIP 1.0K

XML Schema for SEMI E128-0706 Standards - Information & Control / SEMI E128-0706 Download XSD 3.2K

XML Schema for SEMI E132.1-0305 Standards - Information & Control / SEMI E132.1-0305 Download ZIP 9.3K

XML Schema for SEMI E132.1-1107 Standards - Information & Control / SEMI E132.1-1107 Download ZIP 11.8K

XML Schema for SEMI E132.1-1107 Standards - Information & Control / SEMI E132.1-1107 Download ZIP 1.0K

XML Schema for SEMI E134.1-0305 Standards - Information & Control / SEMI E134.1-0305 Download ZIP 13.8K

XML Schema for SEMI E134.1-0308 Standards - Information & Control / SEMI E134.1-0308 Download ZIP 8.6K

XML Schema for SEMI E134.1-1105 Standards - Information & Control / SEMI E134.1-1105 Download ZIP 13.0K

XML Schema for SEMI E138-0305 Standards - Information & Control / SEMI E138-0305 Download XSD 1.8K

XML Schema for SEMI E139.1-0308 Standards - Information & Control / SEMI E139.1-0308 Download ZIP 1.0K

XML Schema for SEMI E139.1-1107 Standards - Information & Control / SEMI E139.1-1107 Download ZIP 1.6K

XML Schema for SEMI E142.1-0705 Standards - Information & Control / SEMI E142.1-0705 Download ZIP 3.1K

XML Schema for SEMI E142.1-0706 Standards - Information & Control / SEMI E142.1-0706 Download ZIP 2.1K

XML Schema for SEMI E142.1-1105 Standards - Information & Control / SEMI E142.1-1105 Download ZIP 4.8K

XML Schema for SEMI E142.3-0706 Standards - Information & Control / SEMI E142.3-0706 Download ZIP 1.4K

XML Schema for SEMI E142.3-1105 Standards - Information & Control / SEMI E142.3-1105 Download SDL 1.0K

XML Schema for SEMI E145-0306 Standards - Information & Control / SEMI E145-0306 Download ZIP 4.1K

XML Schema for SEMI PR8-0703 Standards - Information & Control / SEMI PR8-0703 Download ZIP 6.5K