Supplementary Materials: Various Materials

The following Documents were created by the International Standards program during development of the Standards referenced below. These files are published separately from and are a part of, but not official content of, a Standard or Safety Guideline.



SEMI hereby grants permission to reproduce and use the following material, subject to the following reservations and conditions: These digital forms are supplied for the users' convenience. They must be used with the Standard or Safety Guideline from which they were excerpted. All notices and disclaimers which pertain to the original Standards or Safety Guidelines are in effect for these forms except where otherwise noted. SEMI retains all other rights. .


Committee / Applicable Standard

Example COO of Gas Delivery Systems Spreadsheet from SEMI E140-0312

Standards - Metrics / SEMI E140-0312

Download LSX 70.0K


SEMI E160-0211 Communication Template

Standards - Information & Control / SEMI E160-0211

Download XLS 1.0K