Supplementary Materials: Various Materials

The following Documents were created by the International Standards program during development of the Standards referenced below. These files are published separately from and are a part of, but not official content of, a Standard or Safety Guideline.



SEMI hereby grants permission to reproduce and use the following material, subject to the following reservations and conditions: These digital forms are supplied for the users' convenience. They are used with the Standard or Safety Guideline from which they were excerpted. All notices and disclaimers which pertain to the original Standards or Safety Guidelines are in effect for these forms except where otherwise noted. SEMI retains all other rights. .


Committee / Applicable Standard

Example COO of Gas Delivery Systems Spreadsheet from SEMI E140-0618

Standards - Metrics / SEMI E140-0618

Download E140-0618_COOGDSMODEL_V0.XLSX 73.8K



Standards - MEMS / NEMS / SEMI MS13-0221

Download 22MMX22MM_RETICLE.GDS 1.0K


SEMI E160-0211 Communication Template

Standards - Information & Control / SEMI E160-0211

Download E160-0211-COMMUNICATION-TEMPLATE-2010_08_26.XLS 99.5K


SEMI E183-00-spec-helper.xlsx

Standards - Automated Test Equipment / SEMI E183-1121

Download SEMI_E183-00-SPEC-HELPER.XLSX 582.6K


SEMI S23 Various Materials

Standards - EHS / SEMI S23-1021

Download S23_EXCEL_FILES.ZIP 1.0K


Supplementary Material for SEMI E132.2-0422

Standards - Information & Control / SEMI E132.2-0422

Download SEMIE132-2-0422-HELPER.PROTO 0.0K


Supplementary Material for SEMI E179-0320

Standards - Information & Control / SEMI E179-0320

Download SEMIE179-0320-HELPER.PROTO 27.9K


Various Material for SEMI E164-0414

Standards - Information & Control / SEMI E164-0414

Download E164-00-1113-VM.ZIP 124.2K


Various Material for SEMI E172-0118

Standards - Information & Control / SEMI E172-0118

Download E172-00-0118-VM.ZIP 36.7K



Standards - 3D Packaging and Integration / SEMI 3D17-1217

Download VOIDMASK010311-4X.GDS 350.0K