Model4041.0TrackSys2014-06-12Example equipment based on the one included with the EDA SEMI E125 standard that was later enhanced and included with SEMI E1642000Control:OffLineE30-0307:ControlOff-LineEquipment control status is now OffLineTrackSys404E30-03072001Control:LocalE30-0307:ControlLocalEquipment is in Local Control modeTrackSys404E30-03072002Control:RemoteE30-0307:ControlRemoteEquipment is in Remote Control modeTrackSys404E30-03077001Processing:1:Init-IdleE30-0307:Processing1InitIdleEquipment is now idleTrackSys404E30-03077002Processing:2:Idle-SetupE30-0307:Processing2IdleSetupSetup for processing has begunTrackSys404E30-03077003Processing:3:Setup-ReadyE30-0307:Processing3SetupReadyReady for ProcessingTrackSys404E30-03077004Processing:4:Ready-ExecutingE30-0307:Processing4ReadyExecutingExecuting processTrackSys404E30-03077005Processing:5:Executing-IdleE30-0307:Processing5ExecutingIdleProcessing has completedTrackSys404E30-03077006Processing:6:ProcessingActive-IdleE30-0307:Processing6ProcessingActiveIdleProcessing stopped by operator or hostTrackSys404E30-03077007Processing:7:ProcessingActive-IdleE30-0307:Processing7ProcessingActiveIdleProcessing Aborted by operator or hostTrackSys404E30-03077008Processing:8:Process-PauseE30-0307:Processing8ProcessPauseProcessing Paused by operator or hostTrackSys404E30-03077009Processing:9:Process-PauseE30-0307:Processing9ProcessPauseProcessing Paused by equipmentTrackSys404E30-03077010Processing:10:Pause-VariousE30-0307:Processing10PauseSetup|Ready|ExecutingProcessing resumed to previous state (Setup, Ready, or Executing)TrackSys404E30-03072003ProcessingStateChangeSimpleEvent reported for any change in Processing stateTrackSys404E30-03072004ProcessProgramChange70047005SimpleEvent; Creation, modification, or deletion of a process program by the operatorTrackSys404E30-03072005ProcessRecipeSelectedSimpleEvent; Process recipe selected for execution on the equipmentTrackSys404E30-03072006OperatorCommandIssued7009SimpleEvent; Operator issued a command while in remote control modeTrackSys404E30-03072007OperatorEquipmentConstantChange7010SimpleEvent; Operator changed an equipment constant while in remote modeTrackSys404E30-03072008MaterialReceivedSimpleEvent; Material received via any port (load port or other) at the equipmentTrackSys404E30-03072009MaterialRemovedSimpleEvent; Material removed via any port (load port or other) from the equipmentTrackSys404E30-03072010MessageRecognitionSimpleEvent; Operator recognized an operator message from the hostTrackSys404E30-03076000PRJobProcessing500050015002500350045005500650075008Simple event, JobID specified by variableTrackSys404E40-07096001PRJobWaitingForMaterial500050015002500350045005500650075008Simple event, JobID specified by variableTrackSys404E40-07096002PRJobStateChange500050015002500350045005500650075008Simple event, JobID specified by variableTrackSys404E40-07096003ProcessJob:1:NoState-QueuedPooled500050015002500350045005500650075008E40-0709:ProcessJobNoState1QueuedPooledJobID specified by variable; the processing resource accepts a ProcessJob create requestTrackSys404E40-07096004ProcessJob:2:QueuedPooled-SettingUp500050015002500350045005500650075008E40-0709:ProcessJob2QueuedPooledSettingUpJobID specified by variable; the processing resource has been allocated to the ProcessJobTrackSys404E40-07096005ProcessJob:3:SettingUp-WaitingForStart500050015002500350045005500650075008E40-0709:ProcessJob3SettingUpWaitingForStartJobID specified by variable; Job material is present and processing resource is ready to start the ProcessJob and PRProcessStart attribute is not setTrackSys404E40-07096006ProcessJob:4:SettingUp-Processing500050015002500350045005500650075008E40-0709:ProcessJob4SettingUpProcessingJobID specified by variable; Material is present and ready for processing. PRProcessStart attribute is setTrackSys404E40-07096007ProcessJob:5:WaitingForStart-Processing500050015002500350045005500650075008E40-0709:ProcessJob5WaitingForStartProcessingJobID specified by variable; Job start directiveTrackSys404E40-07096008ProcessJob:6:Processing-ProcessComplete500050015002500350045005500650075008E40-0709:ProcessJob6ProcessingProcessCompleteJobID specified by variable; Material processing completeTrackSys404E40-07096009ProcessJob:7:PostActive-NoState500050015002500350045005500650075008E40-0709:ProcessJob7PostActiveNoStateJobID specified by variable; Job material departs from the equipment or the ProcessJob becomes extinct because the ProcessJob is replaced by another ProcessJob that specifies the same material when no control job is usedTrackSys404E40-07096010ProcessJob:8:Executing-Pausing500050015002500350045005500650075008E40-0709:ProcessJob8ExecutingPausingJobID specified by variable; the processing resource initiated a process pause actionTrackSys404E40-07096011ProcessJob:9:Pausing-Paused500050015002500350045005500650075008E40-0709:ProcessJob9PausingPausedJobID specified by variable; the job is pausedTrackSys404E40-07096012ProcessJob:10:Pause-Various500050015002500350045005500650075008E40-0709:ProcessJob10PauseSettingUp|WaitingForStart|ProcessingJobID specified by variable; new state is the state prior to pausingTrackSys404E40-07096015ProcessJob:11:Executing-Stopping500050015002500350045005500650075008E40-0709:ProcessJob11ExecutingStoppingJobID specified by variable; the processing resource initiated a process stop actionTrackSys404E40-07096016ProcessJob:12:Pause-Stopping500050015002500350045005500650075008E40-0709:ProcessJob12PauseStoppingJobID specified by variable; the processing resource initiated a process stop actionTrackSys404E40-07096017ProcessJob:13:Executing-Aborting500050015002500350045005500650075008E40-0709:ProcessJob13ExecutingAbortingJobID specified by variable; the processing resource initiated a process abort actionTrackSys404E40-07096018ProcessJob:14:Stopping-Aborting500050015002500350045005500650075008E40-0709:ProcessJob14StoppingAbortingJobID specified by variable; the processing resource initiated a process abort actionTrackSys404E40-07096019ProcessJob:15:Pause-Aborting500050015002500350045005500650075008E40-0709:ProcessJob15PauseAbortingJobID specified by variable; the processing resource initiated a process abort actionTrackSys404E40-07096020ProcessJob:16:Aborting-Aborted500050015002500350045005500650075008E40-0709:ProcessJob16AbortingAbortedJobID specified by variable; the abort procedure is completedTrackSys404E40-07096021ProcessJob:17:Stopping-Stopped500050015002500350045005500650075008E40-0709:ProcessJob17StoppingStoppedJobID specified by variable; the stop procedure is completedTrackSys404E40-07096022ProcessJob:18:QueuedPooled-NoState500050015002500350045005500650075008E40-0709:ProcessJob18QueuedPooledNoStateJobID specified by variable; Cancel, Abort, or Stop command receivedTrackSys404E40-07092084LoadPortTransfer:1:NoState-Various714279217135E87-0709:LoadPortTransfer1NoStateOutOfService|InServiceNew state reported by variable; new state reported by variable; system initializedSpecifiedByVariableE87-07092086LoadPortTransfer:2:OutOfService-InService714279217135E87-0709:LoadPortTransfer2OutOfServiceInServiceNew state reported by variable; host or operator has invoked the ChangeServiceState service for this load port with a value of InServiceSpecifiedByVariableE87-07092087LoadPortTransfer:3:InService-OutOfService714279217135E87-0709:LoadPortTransfer3InServiceOutOfServiceNew state reported by variable; host or operator has invoked the ChangeServiceState service for this load port with a value of OutOfServiceSpecifiedByVariableE87-07092088LoadPortTransfer:4:InService-TransferReady714279217135E87-0709:LoadPortTransfer4InServiceTransferReady|TransferBlockedNew state reported by variable; host or operator has invoked the ChangeServiceStatus for this load port with a value of InService or system was resetSpecifiedByVariableE87-07092090LoadPortTransfer:5:TransferReady-Various7142792171357144E87-0709:LoadPortTransfer5TransferReadyReadyToLoad|ReadyToUnloadNew state reported by variable; host or operator has invoked the ChangeServiceStatus service for this load port with a value of InService or system was reset or a transfer failed, and a carrier is present on the Load PortSpecifiedByVariableE87-07092092LoadPortTransfer:6:ReadyToLoad-TransferBlocked714279217135E87-0709:LoadPortTransfer6ReadyToLoadTransferBlockedNew state reported by variable; equipment recognizes the logical indication of the start of a manual load transfer, an automated PIO load transfer is beginning and the PIO Ready signal is active, or a CarrierOut service is started for this load portSpecifiedByVariableE87-07092093LoadPortTransfer:7:ReadyToUnload-TransferBlocked714279217135E87-0709:LoadPortTransfer7ReadyToUnloadTransferBlockedNew state reported by variable; equipment recognizes the logical indication of the start of a manual unload transfer, an automated PIO unload transfer is beginning and the PIO Ready signal is active, a CarrierIn service is started for this load port, or a CarrierReCreate service has been issued by the host or operatorSpecifiedByVariableE87-07092094LoadPortTransfer:8:TransferBlocked-ReadyToLoad714279217135E87-0709:LoadPortTransfer8TransferBlockedReadyToLoadNew state reported by variable; manual carrier unload transfer has completed and the Load Port is now empty and ready for load transfer, an automated PIO unload transfer ends with the PIO COMPT signal, or the carrier has finished its move from the load port into the internal buffer and no CarrierOut services are queued for this load portSpecifiedByVariableE87-07092095LoadPortTransfer:9:TransferBlocked-ReadyToUnload7142792171357144E87-0709:LoadPortTransfer9TransferBlockedReadyToUnloadNew state reported by variable; processing for substrates contained within the carrier has completed, or a CancelCarrier/CancelCarrierAtPort service has been issued, and the carrier has returned to the load/unload position on the load port while in Manual; Processing for the substrates belonging to the carrier has completed, or a CancelCarrier/CancelCarrierAtPort service has been received, and the carrier has returned to the load/unload position while in AutomaticSpecifiedByVariableE87-07092096LoadPortTransfer:10:TransferBlocked-TransferReady714279217135E87-0709:LoadPortTransfer10TransferBlockedTransferReadyNew state reported by variable; transfer was unsuccessful and the carrier has not loaded or unloadedSpecifiedByVariableE87-07092098LoadPortReservation:2:NotReserved-Reserved714271377144E87-0709:LoadPortReservation2NotReservedReservedHost or operator sends a ReserveAtPort or Bind to the equipment, or a CarrierOut occurs on the equipmentSpecifiedByVariableE87-07092099LoadPortReservation:3:Reserved-NotReserved71427137E87-0709:LoadPortReservation3ReservedNotReservedHost or operator sends a CancelBind or a CancelReservationAtPort, or a carrier arrives at the reserved portSpecifiedByVariableE87-07091101LoadPortCarrierAssociation:2:NotAssociated-Associated714271447139E87-0709:LoadPortCarrierAssociation2NotAssociatedAssociatedHost sends a Bind when the port is unoccupied, carrier created because the host sends either a ProceedWithCarrier or CancelCarrier, Carrier ID not currently existing at the equipment successfully read, or a known carrier to the equipment is being moved onto the load port from an internal locationSpecifiedByVariableE87-07091102LoadPortCarrierAssociation:3:Associated-NotAssociated71427139E87-0709:LoadPortCarrierAssociation3AssociatedNotAssociatedHost sends a CancelBind to the equipment before the carrier arrives or before a transfer sequence has started, or carrier is removed from the load port externally or to an internal buffer positionSpecifiedByVariableE87-07091103LoadPortCarrierAssociation:4:Associated-Associated714271447139E87-0709:LoadPortCarrierAssociation4AssociatedAssociatedEquipment based verification fails and the carrier assumes the ID value from the carrier that is on the load port, or a carrier is unloaded and a queued CarrierOut service starts. The existing carrier that was associated by a Bind service is unassociated and the new carrier is now associated to the Load PortSpecifiedByVariableE87-07091104AccessMode:1:NoState-Manual71427920E87-0709:AccessMode1NoStateManual|AutoNew state reported in variable; system initializedSpecifiedByVariableE87-07091106AccessMode:2:Manual-Auto71427920E87-0709:AccessMode2ManualAutoNew state reported in variable; host or operator has executed a Change Access service with the value of AutoSpecifiedByVariableE87-07091107AccessMode:3:Auto-Manual71427920E87-0709:AccessMode3AutoManualNew state reported in variable; host or operator has executed a Change Access service with the value of ManualSpecifiedByVariableE87-07096027Carrier:2:NoState-IDNotRead5014500950105011501250135015501679247930E87-0709:CarrierIDStatus2NoStateIDNotReadCarrierID specified by variable; Bind or Carrier Notification service receivedTrackSys404E87-07096028Carrier:3:NoState-WaitingForHost50145009501050115012501350155016792479305017E87-0709:CarrierIDStatus3NoStateWaitForHostCarrierID specified by variable; a carrier ID not currently existing at the equipment is successfully read or a carrier ID read is successful but an equipment based verification failedTrackSys404E87-07096029Carrier:4:NoState-IDVerificationOk5014500950105011501250135015501679247930E87-0709:CarrierIDStatus4NoStateIDVerificationOkCarrierID specified by variable; ProceedWithCarrier service is received after an ID read fail or unknown carrier. Carrier is created from the ProceedWithCarrierTrackSys404E87-07096030Carrier:5:NoState-IDVerificationFailed5014500950105011501250135015501679247930E87-0709:CarrierIDStatus5NoStateIDVerificationFailedCarrierID specified by variable; CancelCarrier service is received after an ID read fail or unknown carrier. Carrier is created from the CancelCarrierTrackSys404E87-07096031Carrier:6:IDNotRead-IDVerificationOk50145009501050115012501350155016792479305017E87-0709:CarrierIDStatus6IDNotReadIDVerificationOkCarrierID specified by variable; Carrier ID is read successfully and the equipment has verified the carrier ID successfully; or carrier was instantiated via a CarrierNotification service and upon carrier placement the equipment sent a Carrier ID Read Fail Event or UnknownCarrierID, and the host issued a ProceedWithCarrierTrackSys404E87-07096032Carrier:7:IDNotRead-WaitingForHost50145009501050115012501350155016792479305017E87-0709:CarrierIDStatus7IDNotReadWaitingForHostCarrierID specified by variable; Carrier ID was read unsuccessfullyTrackSys404E87-07096033Carrier:8:WaitingForHost-IDVerificationOk50145009501050115012501350155016792479305017E87-0709:CarrierIDStatus8WaitingForHostIDVerificationOkCarrierID specified by variable; a ProceedWithCarrier service is receivedTrackSys404E87-07096034Carrier:9:WaitingForHost-IDVerificationFailed50145009501050115012501350155016792479305017E87-0709:CarrierIDStatus9WaitingForHostIDVerificationFailedCarrierID specified by variable; CancelCarrier service is receivedTrackSys404E87-07096035Carrier:10:IDNotRead-WaitingForHost50145009501050115012501350155016792479305017E87-0709:CarrierIDStatus10IDNotReadWaitingForHostCarrierID specified by variable; BypassReadID variable is set to False, and a carrier is received when the carrier ID reader is not in service or not installedTrackSys404E87-07096036Carrier:11:IDNotRead-IDVerificationOk50145009501050115012501350155016792479305017E87-0709:CarrierIDStatus11IDNotReadIDVerificationOkCarrierID specified by variable; BypassReadID variable is set to True, and a carrier is received when the carrier ID reader is not in service or not installedTrackSys404E87-07096038Carrier:13:SlotMapNotRead-SlotMapVerificationOk50145009501050115012501350155016792479305017E87-0709:CarrierSlotMapStatus13SlotMapNotReadSlotMapVerificationOkCarrierID specified by variable; Slot map is read and verified by the equipmentTrackSys404E87-07096039Carrier:14:SlotMapNotRead-WaitingForHost501450095010501150125013501550167924793050175018E87-0709:CarrierSlotMapStatus14SlotMapNotReadWaitingForHostCarrierID specified by variable; Slot map read successfully and the equipment is waiting for host verification, or slot map is read successfully but equipment based verification has failed, slot map cannot be read, or slot map read has indicated an abnormal substrate position. Slot Map attribute updated with read slot mapTrackSys404E87-07096040Carrier:15:WaitingForHost-SlotMapVerificationOk50145009501050115012501350155016792479305017E87-0709:CarrierSlotMapStatus15WaitingForHostSlotMapVerificationOkCarrierID specified by variable; ProceedWithCarrier service is receivedTrackSys404E87-07096041Carrier:16:WaitingForHost-SlotMapVerificationFail50145009501050115012501350155016792479305017E87-0709:CarrierSlotMapStatus16WaitingForHostSlotMapVerificationFailCarrierID specified by variable; CancelCarrier service is received. Prepare carrier for unloadTrackSys404E87-07096043Carrier:18:NotAccessed-InAccess5014500950105011501250135015501679247930E87-0709:CarrierAccessingStatus18NotAccessedInAccessCarrierID specified by variable; equipment starts accessing the carrierTrackSys404E87-07096044Carrier:19:InAccess-CarrierComplete5014500950105011501250135015501679247930E87-0709:CarrierAccessingStatus19InAccessCarrierCompleteCarrierID specified by variable; equipment finishes accessing the carrier normallyTrackSys404E87-07096045Carrier:20:InAccess-CarrierStopped5014500950105011501250135015501679247930E87-0709:CarrierAccessingStatus20InAccessCarrierStoppedCarrierID specified by variable; equipment finishes accessing the carrier abnormallyTrackSys404E87-07096026Carrier:21:Carrier-NoState5014500950105011501250135015501679247930E87-0709:Carrier21CarrierNoStateCarrierID specified by variable; Carrier is unloaded from the equipment, CancelBind or CancelCarrierNotification service is received prior to the carrier load, or an equipment based verification fails and the equipment performs a self-initiated CancelBind service. The carrier object is destroyedTrackSys404E87-07096023CarrierLocationChange70305013Simple event, CarrierID specified by variable; carrier has changed locations within the equipmentTrackSys404E87-07096024CarrierApproachingComplete7030Simple event, CarrierID specified by variable; occurs when the equipment determines access to the carrier is nearing completionTrackSys404E87-07092012DuplicateCarrierIDInProcess70305013SimpleEvent; equipment received a carrier with a CarrierID that is the same as that of another carrier present at the equipment and processing of the first carrier has begunTrackSys404E87-07091108UnknownCarrierID7142SimpleEvent; Carrier arrived at a NotAssociated load port where the Carrier ID Reader is UnavailableTrackSys404E87-07091109CarrierIDReadFail7142SimpleEvent; Carrier ID read failed at a load port in the NotAssociated stateTrackSys404E87-07091110IDReaderAvailable7142SimpleEvent; ID Reader became availableTrackSys404E87-07091111IDReaderUnavailable7142SimpleEvent; ID Reader became unavailableTrackSys404E87-07091112CarrierClosed703071425013SimpleEvent; Carrier access door closedTrackSys404E87-07091113CarrierOpened703071425013SimpleEvent; Carrier access door openedTrackSys404E87-07091114CarrierClamped703071425013SimpleEvent; Carrier is clamped to the load portTrackSys404E87-07091115CarrierUnclamped703071425013SimpleEvent; Carrier unclamped from the load portTrackSys404E87-07091275SubstrateLocation:1:Unoccupied-Occupied704670445052E90-0707:SubstrateLocation1UnoccupiedOccupiedSubstrateLocation is reported in a variable; Substrate moves into the substrate locationSpecifiedByVariableE90-07071276SubstrateLocation:2:Occupied-Unoccupied704670445052E90-0707:SubstrateLocation2OccupiedUnoccupiedSubstrateLocation is reported in a variable; Substrate moves off the locationSpecifiedByVariableE90-07076049SubstrateObject:1:NoState-AtSource50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateTransportSubstrateID specified by variable; Substrate object is registeredTrackSys404E90-07076050SubstrateObject:2:AtSource-AtWork50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateTransport2AtSourceAtWorkSubstrateID specified by variable; Substrate is taken from the source substrate location and placed into the equipmentTrackSys404E90-07076051SubstrateObject:3:AtWork-AtSource50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateTransport3AtWorkAtSourceSubstrateID specified by variable; Substrate has moved to the source substrate locationTrackSys404E90-07076052SubstrateObject:4:AtWork-AtWork50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateTransport4AtWorkAtWorkSubstrateID specified by variable; Substrate has moved out from current equipment substrate location towards a new equipment substrate locationTrackSys404E90-07076053SubstrateObject:5:AtWork-AtDestination50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateTransport5AtWorkAtDestinationSubstrateID specified by variable; Substrate is moved to the destination substrate locationTrackSys404E90-07076054SubstrateObject:6:AtDestination-AtWork50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateTransport6AtDestinationAtWorkSubstrateID specified by variable; Substrate is taken from the destination substrate location and placed into the equipmentTrackSys404E90-07076047SubstrateObject:7:Substrate-NoState50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateObjectSubstrateID specified by variable; Substrate removed from the equipment by a normal transfer sequenceTrackSys404E90-07076055SubstrateObject:8:AtDestination-AtSource50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateTransport8AtDestinationAtSourceSubstrateID specified by variable; user informs or the equipment detects that the substrate is At SourceTrackSys404E90-07076048SubstrateObject:9:Substrate-NoState50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateObjectSubstrateID specified by variable; Equipment detects or is informed by the user that a substrate has been removedTrackSys404E90-07076056SubstrateObject:10:NoState-NeedsProcessing50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateProcessing10NoStateNeedsProcessingSubstrateID specified by variable; Substrate object is createdTrackSys404E90-07076057SubstrateObject:11:NeedsProcessing-InProcess50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateProcessing11NeedsProcessingInProcessSubstrateID specified by variable; Substrate starts actual processingTrackSys404E90-07076058SubstrateObject:12:InProcess-Various50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateProcessing12InProcessProcessed|Rejected|Stopped|Aborted|Lost|SkippedNew state and SubstrateID specified by variables; processing endsTrackSys404E90-07076064SubstrateObject:13:InProcess-NeedsProcessing50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateProcessing13InProcessNeedsProcessingSubstrateID specified by variable; the process associated with the processing instructions was completed and the substrate is to be processed againTrackSys404E90-07076065SubstrateObject:14:NeedsProcessing-Lost50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateProcessing14NeedsProcessingLostNew state and SubstrateID specified by variables; SubstrateID specified by variable; the substrate has been removed from the equipment by an external agent or it is physically missing (LOST) or the substrate has not been not processed (SKIPPED).TrackSys404E90-07076067SubstrateObject:16:NoState-NotConfirmed50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateReadingStatus16NoStateNotConfirmedSubstrateID specified by variable; Substrate object is createdTrackSys404E90-07076068SubstrateObject:17:NotConfirmed-Confirmed5019502650245025502750215022503050315032503350345037503850395040504250465047504850355041504350445049505050235019E90-0707:SubstrateReadingStatus17NotConfirmedConfirmedSubstrateID specified by variable; Substrate was successfully read and SubstID provided in the ContentMap matched the AcquiredID read by the equipmentTrackSys404E90-07076069SubstrateObject:18:NotConfirmed-WaitingForHost501950265024502550275021502250305031503250335034503750385039504050425046504750485035504150435044504950505023E90-0707:SubstrateReadingStatus18NotConfirmedWaitingForHostSubstrateID specified by variable; Substrate ID reading has failed after all retriesTrackSys404E90-07076070SubstrateObject:19:NotConfirmed-WaitingForHost5019502650245025502750215022503050315032503350345037503850395040504250465047504850355041504350445049505050235019E90-0707:SubstrateReadingStatus19NotConfirmedWaitingForHostSubstrateID specified by variable; Substrate ID was successfully read but the acquired ID is different from the one the equipment used to instantiate the substrate objectTrackSys404E90-07076071SubstrateObject:20:WaitingForHost-Confirmed5019502650245025502750215022503050315032503350345037503850395040504250465047504850355041504350445049505050235019E90-0707:SubstrateReadingStatus20WaitingForHostConfirmedSubstrateID specified by variable; Equipment has received a ProceedWithSubstrateTrackSys404E90-07076072SubstrateObject:21:WaitingForHost-ConfirmationFailed50195026502450255027502150225030503150325033503450375038503950405042504650475048503550415043504450495050E90-0707:SubstrateReadingStatus21WaitingForHostConformationFailedSubstrateID specified by variable; Equipment has received a CancelSubstrateTrackSys404E90-07071150SubstrateIDReaderAvailableSimpleEvent; Substrate reader availableTrackSys404E90-07071151SubstrateIDReaderUnavailableSimpleEvent; Substrate reader unavailableTrackSys404E90-07076077ControlJob:1:NoState-Queued505450555056505750585059506050615062506350645065E94-0309:ControlJob1NoStateQueuedControlJobID specified by variable; receive Create command from host or operator through operator consoleTrackSys404E94-03096078ControlJob:2:Queued-NoState505450555056505750585059506050615062506350645065E94-0309:ControlJob2QueuedNoStateControlJobID specified by variable; receive Cancel, Abort, or Stop command from host or operator through operator consoleTrackSys404E94-03096079ControlJob:3:Queued-Selected505450555056505750585059506050615062506350645065E94-0309:ControlJob3QueuedSelectedControlJobID specified by variable; processing resource has capacity to begin work on the next ControlJobTrackSys404E94-03096080ControlJob:4:Selected-Queued505450555056505750585059506050615062506350645065E94-0309:ControlJob4SelectedQueuedControlJobID specified by variable; receive De-select command from host or operator through operator console and materials for the ControlJob have not arrived yetTrackSys404E94-03096081ControlJob:5:Selected-Executing505450555056505750585059506050615062506350645065E94-0309:ControlJob5SelectedExecutingControlJobID specified by variable; material for the first ProcessJob arrives or in the case where the first ProcessJob does not require material, this transition is taken as soon as the processing resource for that ProcessJob becomes available, and StartMethod is set for AutoTrackSys404E94-03096082ControlJob:6:Selected-WaitingForStart505450555056505750585059506050615062506350645065E94-0309:ControlJob6SelectedWaitingForStartControlJobID specified by variable; material for the first ProcessJob arrives or in the case where the first ProcessJob does not require material, this transition is taken as soon as the processing resource for that ProcessJob becomes available, and StartMethod is set for user startTrackSys404E94-03096083ControlJob:7:WaitingForStart-Executing505450555056505750585059506050615062506350645065E94-0309:ControlJob7WaitingForStartExecutingControlJobID specified by variable; user Start command receivedTrackSys404E94-03096084ControlJob:8:Executing-Paused505450555056505750585059506050615062506350645065E94-0309:ControlJob8ExecutingPausedControlJobID specified by variable; received Pause command from host or operator through operator console or a ControlJob PauseEvent has occurredTrackSys404E94-03096085ControlJob:9:Paused-Executing505450555056505750585059506050615062506350645065E94-0309:ControlJob9PausedExecutingControlJobID specified by variable; received Resume command from host or operator through operator consoleTrackSys404E94-03096086ControlJob:10:Executing-Completed505450555056505750585059506050615062506350645065E94-0309:ControlJob10ExecutingCompletedControlJobID specified by variable; all the ProcessJobs specified for the ControlJob have completedTrackSys404E94-03096087ControlJob:11:Active-Completed505450555056505750585059506050615062506350645065E94-0309:ControlJob11ActiveCompletedControlJobID specified by variable; equipment received a CJStop command from the host or operator or generated a CJStop internally, and all ProcessJobs under the ControlJob that were Active when the CJStop command was received have entered the PostActive stateTrackSys404E94-03096088ControlJob:12:Active-Completed505450555056505750585059506050615062506350645065E94-0309:ControlJob12ActiveCompletedControlJobID specified by variable; equipment received a CJAbort command from the host or operator or generated a CJAbort internally, and all ProcessJobs under the ControlJob that were Active when the CJAbort command was received have entered the PostActive stateTrackSys404E94-03096089ControlJob:13:Completed-NoState505450555056505750585059506050615062506350645065E94-0309:ControlJob13CompletedNoStateControlJobID specified by variable; ControlJob is deletedTrackSys404E94-03092011EPTEquipment:EPTStateChange701870207019702370247021702270167017E116-0707:EPTEquipmentAllAllAllTriggered by a EPT State change at the EPT Equipment levelTrackSys404/EPTTracker1E116-07071116EPTModule:EPTStateChange701870207019702370247021702270167017E116-0707:EPTModuleAllAllAllEPT Module is reported in a variable; triggered by a EPT State change at the EPT Module levelTrackSys404/EFEM/LoadPort1/EPTTracker2E116-07071149EPTModule:EPTStateChange701870207019702370247021702270167017E116-0707:EPTModuleAllAllAllEPT Module is reported in a variable; triggered by a EPT State change at the EPT Module levelTrackSys404/HotPlate/EPTTracker3E116-07072041EPTModule:EPTStateChange701870207019702370247021702270167017E116-0707:EPTModuleAllAllAllEPT Module is reported in a variable; triggered by a EPT State change at the EPT Module levelTrackSys404/HotPlate/EPTTracker4E116-07072062EPTModule:EPTStateChange701870207019702370247021702270167017E116-0707:EPTModuleAllAllAllEPT Module is reported in a variable; triggered by a EPT State change at the EPT Module levelTrackSys404/HotPlate/EPTTracker5E116-07072023ModuleProcess:1:NoState-NotExecuting705670577058705970607061E157-0710:ModuleProcess1NoStateNotExecutingEquipment initializationTrackSys404/HotPlateE157-07102024ModuleProcess:2:NotExecuting-GeneralExecution705670577058705970607061E157-0710:ModuleProcess2NotExecutingGeneralExecutionProcess execution affecting this process module has started. This corresponds to the E157 ExecutionStarted eventTrackSys404/HotPlateE157-07102025ModuleProcess:3:GeneralExecution-NotExecuting705670577058705970607061E157-0710:ModuleProcess3GeneralExecutionNotExecutingProcess execution affecting this process module has completed normally. This corresponds to the E157 ExecutionCompleted eventTrackSys404/HotPlateE157-07102026ModuleProcess:4:GeneralExecution-NotExecuting705670577058705970607061E157-0710:ModuleProcess4GeneralExecutionNotExecutingProcess execution has failed to complete normally. This corresponds to the E157 ExecutionFailed eventTrackSys404/HotPlateE157-07102027ModuleProcess:5:GeneralExecution-StepActive70567057705870597060706170627063E157-0710:ModuleProcess5GeneralExecutionStepActiveStep execution affecting the process module has started. This corresponds to the E157 StepStarted eventTrackSys404/HotPlateE157-07102028ModuleProcess:6:StepActive-GeneralExecution70567057705870597060706170627063E157-0710:ModuleProcess6StepActiveGeneralExecutionStep execution has completed normally. This corresponds to the E157 StepCompleted eventTrackSys404/HotPlateE157-07102029ModuleProcess:7:StepActive-GeneralExecution70567057705870597060706170627063E157-0710:ModuleProcess7StepActiveGeneralExecutionStep execution has failed to complete normally. This corresponds to the E157 StepFailed eventTrackSys404/HotPlateE157-07102055ModuleProcess:1:NoState-NotExecuting705670577058705970607061E157-0710:ModuleProcess1NoStateNotExecutingEquipment initializationTrackSys404/CoaterE157-07102056ModuleProcess:2:NotExecuting-GeneralExecution705670577058705970607061E157-0710:ModuleProcess2NotExecutingGeneralExecutionProcess execution affecting this process module has started. This corresponds to the E157 ExecutionStarted eventTrackSys404/CoaterE157-07102057ModuleProcess:3:GeneralExecution-NotExecuting705670577058705970607061E157-0710:ModuleProcess3GeneralExecutionNotExecutingProcess execution affecting this process module has completed normally. This corresponds to the E157 ExecutionCompleted eventTrackSys404/CoaterE157-07102058ModuleProcess:4:GeneralExecution-NotExecuting705670577058705970607061E157-0710:ModuleProcess4GeneralExecutionNotExecutingProcess execution has failed to complete normally. This corresponds to the E157 ExecutionFailed eventTrackSys404/CoaterE157-07102059ModuleProcess:5:GeneralExecution-StepActive70567057705870597060706170627063E157-0710:ModuleProcess5GeneralExecutionStepActiveStep execution affecting the process module has started. This corresponds to the E157 StepStarted eventTrackSys404/CoaterE157-07102060ModuleProcess:6:StepActive-GeneralExecution70567057705870597060706170627063E157-0710:ModuleProcess6StepActiveGeneralExecutionStep execution has completed normally. This corresponds to the E157 StepCompleted eventTrackSys404/CoaterE157-07102061ModuleProcess:7:StepActive-GeneralExecution70567057705870597060706170627063E157-0710:ModuleProcess7StepActiveGeneralExecutionStep execution has failed to complete normally. This corresponds to the E157 StepFailed eventTrackSys404/CoaterE157-07102013TransferRobot:NoState-TransferRobotAtRest0TransferRobotNoStateTransferRobotAtRestThe specific transfer robot is identified in a variable; transfer robot is initializedTrackSys404/TransArm3002014TransferRobot:TransferRobotAtRest-TransferRobotInTransit0TransferRobotTransferRobotAtRestTransferRobotInTransitThe specific transfer robot is identified in a variable; transfer robot is in-transitTrackSys404/TransArm3002015TransferRobot:TransferRobotInTransit-TransferRobotAtRest0TransferRobotTransferRobotInTransitTransferRobotAtRestThe specific transfer robot is identified in a variable; transfer robot is at-restTrackSys404/TransArm3002016TransferArm:NoState-TransferArmAtRest0TransferArmTransferArm:NoStateTransferArmAtRestThe specific transfer is identified in a variable; transfer arm is initializedTrackSys404/TransArm3002017TransferArm:TransferArmAtRest-TransferArmInTransit0TransferArmTransferArmAtRestTransferArmInTransitThe specific transfer arm is identified in a variable; transfer arm is in-transitTrackSys404/TransArm3002018TransferArm:TransferArmInTransit-TransferArmAtRest0TransferArmTransferArmInTransitTransferArmAtRestThe specific transfer arm is identified in a variable; transfer arm is at-restTrackSys404/TransArm3002030Hood:NoState-HoodOpen0HoodNoStateHoodOpenHood is initialized openTrackSys404/HotPlate2031Hood:NoState-HoodClosed0HoodNoStateHoodClosedHood is initialized closedTrackSys404/HotPlate2032Hood:HoodClosed-HoodOpen0HoodHoodClosedHoodOpenHood is openedTrackSys404/HotPlate2033Hood:HoodOpen-HoodClosed0HoodHoodOpenHoodClosedHood is closedTrackSys404/HotPlate2034PinPosition:NoState-PinsDown0PinPositionNoStatePinsDownPins are initialized downTrackSys404/HotPlate2035PinPosition:NoState-PinsUp0PinPositionNoStatePinsUpPins are initialized upTrackSys404/HotPlate2036PinPosition:PinsDown-PinsUp0PinPositionPinsDownPinsUpPins are upTrackSys404/HotPlate2037PinPosition:PinsUp-PinsDown0PinPositionPinsUpPinsDownPins are downTrackSys404/HotPlate2038TemperatureCondition:NoState-TemperatureStable0TemperatureConditionNoStateTemperatureStableTemperature system is initializedTrackSys404/HotPlate2039TemperatureCondition:TemperatureStable-TemperatureAdjusting0TemperatureConditionTemperatureAdjustingTemperatureStableTemperature is adjustingTrackSys404/HotPlate2040TemperatureCondition:TemperatureAdjusting-TemperatureStable0TemperatureConditionTemperatureAdjustingTemperatureStableTemperature is stableTrackSys404/HotPlate2046MFC:NoState-MFCOff0MFCNoStateMFCOffMFC is initializedTrackSys404/HotPlate/MFC3002047MFC:MFCOff-MFCOn0MFCMFCOffMFCOnMFC is onTrackSys404/HotPlate/MFC3002048MFC:MFCOn-MFCOff0MFCMFCOnMFCOffMFC is offTrackSys404/HotPlate/MFC3002049Valve:NoState-ValveClosed0ValveNoStateValveClosedThe specific valve is identified in a variable; valve is initializedTrackSys404/HotPlate/UpstreamValve2050Valve:ValveClosed-ValveOpen0ValveValveClosedValveOpenThe specific valve is identified in a variable; valve is openTrackSys404/HotPlate/UpstreamValve2051Valve:ValveOpen-ValveClosed0ValveValveOpenValveClosedThe specific valve is identified in a variable; valve is closedTrackSys404/HotPlate/UpstreamValve2063DispenseArm:NoState-DispenseArmAtRest0DispenseArmNoStateDispenseArmAtRestDispense arm is initializedTrackSys404/Coater/NuDispense2064DispenseArm:DispenseArmInTransit-DispenseArmAtRest0DispenseArmDispenseArmInTransitDispenseArmAtRestDispense arm is at-restTrackSys404/Coater/NuDispense2065DispenseArm:DispenseArmAtRest-DispenseArmInTransit0DispenseArmDispenseArmAtRestDispenseArmInTransitDispense arm is in-transitTrackSys404/Coater/NuDispense2066PhotoresistPump:NoState-PumpIdle0PhotoresistPumpNoStatePumpIdlePhotoresist pump is initializedTrackSys404/Coater/Photopump3002067PhotoresistPump:PumpIdle-PumpActivated0PhotoresistPumpPumpIdlePumpActivatedPhotoresist pump is activatedTrackSys404/Coater/Photopump3002068PhotoresistPump:PumpActivated-PumpIdle0PhotoresistPumpPumpActivatedPumpIdlePhotoresist pump is idleTrackSys404/Coater/Photopump3002069SpinChuckSpin:NoState-SpinChuckStopped0SpinChuckSpinNoStateSpinChuckStoppedSpin chuck is initializedTrackSys404/Coater/NuSpin2070SpinChuckSpin:SpinChuckStopped-SpinChuckAccelerating0SpinChuckSpinSpinChuckStoppedSpinChuckAcceleratingSpin chuck is acceleratingTrackSys404/Coater/NuSpin2071SpinChuckSpin:SpinChuckAccelerating-SpinChuckAtSpeed0SpinChuckSpinSpinChuckAcceleratingSpinChuckAtSpeedSpin chuck is at speedTrackSys404/Coater/NuSpin2072SpinChuckSpin:SpinChuckAccelerating-SpinChuckStopped0SpinChuckSpinSpinChuckAcceleratingSpinChuckStoppedSpin chuck has stoppedTrackSys404/Coater/NuSpin2073SpinChuckSpin:SpinChuckAtSpeed-SpinChuckAccelerating0SpinChuckSpinSpinChuckAtSpeedSpinChuckAcceleratingSpin chuck is acceleratingTrackSys404/Coater/NuSpin2074SpinChuckPosition:NoState-SpinChuckAtRest0SpinChuckPositionNoStateSpinChuckAtRestSpin chuck is initializedTrackSys404/Coater/NuSpin2075SpinChuckPosition:SpinChuckAtRest-SpinChuckInTransit0SpinChuckPositionSpinChuckAtRestSpinChuckInTransitSpin chuck is in-transitTrackSys404/Coater/NuSpin2076SpinChuckPosition:SpinChuckInTransit-SpinChuckAtRest0SpinChuckPositionSpinChuckInTransitSpinChuckAtRestSpin chuck is at-restTrackSys404/Coater/NuSpin2081VacuumPump:NoState-PumpOff0VacuumPumpNoStatePumpOffVacuum pump initializedTrackSys404/VacuSys80002082VacuumPump:PumpOff-PumpOn0VacuumPumpPumpOffPumpOnVacuum pump is onTrackSys404/VacuSys80002083VacuumPump:PumpOn-PumpOff0VacuumPumpPumpOnPumpOffVacuum pump is offTrackSys404/VacuSys80007004PPChangeNameString120PPID of the process program that was changed. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 120 characters. This parameter corresponds to the SEMI E30 PPChangeName DVTrackSys404E30-03077005PPChangeStatusPPChangeStatusEnumDescribes the action taken on the process program named in PPChangeName. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified in SEMI E5 Table 4 for the PPChangeStatus DVVAL.TrackSys404E30-03077009OperatorCommandString255A command issued by the operator while in remote control mode. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 255 characters. It corresponds to the SEMI E30 OperatorCommand DVTrackSys404E30-03077010EquipmentConstantString80SECS Identifier (ECID) of the Equipment Constant that was changed while in remote control. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404E30-03075000PRJobIDString80The unique identifier for a ProcessJob. It can also be accessed as the ObjID attribute of the ProcessJob object. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.ProcessJob - specified by variableE40-07095001PauseEventUnsignedInteger54ListList of event identifiers that cause the equipment to automatically transition to the Pausing/Paused states when one of the listed events is triggered. This variable is formatted as a list of four-byte unsigned integers (SECS-II code 54) containing CEID values.ProcessJob - specified by variableE40-07095002PRJobStatePRJobStateEnumA unique state of the ProcessJob according to the ProcessJob state model. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified in SEMI E40.1-0709 Table 4 for the PRJob object PRJobState attribute.ProcessJob - specified by variableE40-07095003PRMtlNameListString80ListList of identifiers of the material being processed by the ProcessJob. PRMtlNameList is formatted as a list of ASCII strings (SECS-II code 20), each with a maximum of 80 characters.ProcessJob - specified by variableE40-07095004PRMtlTypePRMtlTypeEnumIdentifies the type of material being processed by the ProcessJob. This variable is an enumerated value formatted as a one-byte binary value (SECS-II code 10). The enumeration values correspond to those specified in SEMI E40.1-0709 Table 4 for the PRJob object PRMtlType attribute.ProcessJob - specified by variableE40-07095005PRProcessStartBooleanFor the ProcessJob, PRProcessStart indicates if the processing resource starts processing immediately when ready (true) or must be started manually (false). This variable is formatted as a Boolean (SECS-II code 11).ProcessJob - specified by variableE40-07095006PRRecipeMethodString9For a ProcessJob, PRRecipeMethod indicates the recipe specification type, whether tuning is applied, and which method is used. This variable is formatted as an ASCII string (SECS-II code 20), but can take only the values "STANDARD" or "USETUNING" per PRRecipeMethod definition in SEMI E5-0307 Table 17.ProcessJob - specified by variableE40-07095007RecIDString255Identifier of the recipe applied to the ProcessJob. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 255 characters.ProcessJob - specified by variableE40-07095008RecVariableListRecVariableListFormatFor a ProcessJob, RecVariableList is a list of variables supporting a recipe method. RecVariableList is formatted as a list of RecipeVariables. Each RecipeVariable is a list of RecipeVarName (string, maximum 256 characters) and RecipeVarValue (format varies for each recipe variable - see also RVP definitions).ProcessJob - specified by variableE40-07097030CarrierIDString80Identifier of the carrier. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404E87-07097135PortTransferStatePortTransferStateEnumCurrent transfer state of this load port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for PortTransferState in SEMI E87.1-0709 Table 4.Load Port - specified by variable.E87-07097137LoadPortReservationStateLoadPortReservationStateEnumReservation state of the Load Port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for LoadPortReservationState in SEMI E87.1-0709 Table 4.Load Port - specified by variableE87-07097139PortAssociationStatePortAssociationStateEnumThe association state of the load port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for PortAssociationState in SEMI E87.1-0709 Table 4.Load Port - specified by variableE87-07097920AccessModeAccessModeEnumAccess mode of the Load Port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for AccessMode in SEMI E87.1-0709 Table 4.Load Port - specified by variableE87-07097921PortStateInfoPortStateInfoFormatPortAssociationState combined with the PortTransferState of this Load Port. PortState is formatted as a list of two items: the PortAssociationState and the PortTransferState. The enumerations for these two items correspond to those specified in E87.1-0709 Table 4.Load Port - specified by variableE87-07097142PortIDUnsignedInteger51Load port identifier as defined in E87. The PortID uniquely corresponds to a Load Port Subsystem instance. This variable is formatted as an unsigned 1-byte integer.Load Port - specified by variableE87-07097144CarrierIDString80Identifier of the current carrier location. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.Load Port - specified by variableE87-07095009CapacityUnsignedInteger51Maximum number of substrates a carrier can hold. This variable is formatted as an unsigned 1-byte integer.Carrier object - specified by variableE87-07095010CarrierIDStatusCarrierIDStatusEnumCurrent state of the Carrier ID verification. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for CarrierIDStatus in SEMI E87.1-0709 Table 4.Carrier object - specified by variableE87-07095011CarrierAccessingStatusCarrierAccessingStatusEnumCurrent accessing state of the carrier by the equipment. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for CarrierAccessingStatus in SEMI E87.1-0709 Table 4.Carrier object - specified by variableE87-07095012ContentMapContentMapFormatOrdered list of lot and substrate identifiers corresponding to slot 1,2,3,...n. ContentMap is formatted as a list of data pairs consisting of lot identifier (string) and substrate identifier (string).Carrier object - specified by variableE87-07095013LocationIDString80Identifier of the current carrier location. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.Carrier object - specified by variableE87-07095014CarrierIDString80Object identifier of the Carrier object. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.Carrier object - specified by variableE87-07095015SlotMapSlotStatusListFormatOrdered list of slot status corresponding to slot 1,2,3,...n. SlotMap is formatted as a list of enumerations corresponding to the definition for SlotMap in E87.1-0709 Table 4.Carrier object - specified by variableE87-07095016SlotMapStatusSlotMapStatusEnumCurrent state of slot map verification. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for SlotMapStatus in SEMI E87.1-0709 Table 4.Carrier object - specified by variableE87-07097924SubstrateCountUnsignedInteger51Number of substrates currently in the carrier. This variable is formatted as an unsigned 1-byte integer.Carrier object - specified by variableE87-07097930UsageString80The type of material contained in the carrier. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.Carrier object - specified by variableE87-07095017PortIDUnsignedInteger51Identifier of the load port where the carrier is located. This variable is formatted as an unsigned 1-byte integer.Carrier object - specified by variableE87-07095018ReasonReasonEnumDenotes the reason for transition 14 of the Carrier state model (SlotMapNotRead to WaitingForHost). This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for Reason in SEMI E87.1-0709 Table 4.Carrier object - specified by variableE87-07095019AcquiredIDString80The ID read from the substrate. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters. It is an empty string before the substrate is read.Substrate object - specified by variableE90-07075021SubstLotIDString80Identifier of the lot associated with the substrate. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.Substrate object - specified by variableE90-07075022SubstMtrlStatusMaterialStatusEnumCurrent status of the substrate that represents criteria of the processing quality. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values: 0 - Processed, 1 - Failed.Substrate object - specified by variableE90-07075023SubstIDString80Object identifier of the Substrate object. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.Substrate object - specified by variableE90-07075024SubstDestinationString80Identifier of the substrate location on which the substrate will be finally restored. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.Substrate object - specified by variableE90-07075025SubstHistorySubstHistoryFormatHistory of locations visited. SubstHistory is formatted as a list of SubstHistryEntry items, each of which is a list of the substrate or batch identifier (string), the time in, and the time out (see TimeStamp, E5-0307 Table 3 for format)Substrate object - specified by variableE90-07075026SubstIDStatusSubstIDStatusEnumStatus of the substrate ID read. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the Substrate object SubstIDStatus attribute specified in SEMI E40.1-0707 Table 4.Substrate object - specified by variableE90-07075027SubstSubstLocIDString80Identifier for the current equipment substrate location or carrier substrate location that the substrate occupies. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.Substrate object - specified by variableE90-07075030SubstProcStateSubstProcStateEnumProcessing state of the substrate. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the Substrate object SubstProcState attribute specified in SEMI E40.1-0707 Table 4.Substrate object - specified by variableE90-07075031SubstSourceString80Identifier of the substrate location on which the substrate has been initially registered. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.Substrate object - specified by variableE90-07075032SubstStateSubstStateEnumTransport state of the substrate. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the Substrate object SubstState attribute specified in SEMI E40.1-0707 Table 4.Substrate object - specified by variableE90-07075033SubstTypeSubstTypeEnumThe type of the substrate. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the Substrate object SubstType attribute specified in SEMI E40.1-0707 Table 4.Substrate object - specified by variableE90-07075034SubstUsageSubstUsageEnumDesignation of how the substrate is used. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the Substrate object SubstUsage attribute specified in SEMI E40.1-0707 Table 4.Substrate object - specified by variableE90-07075035AcquiredIDListString80ListA list of AcquiredIDs related by the same Substrate Object State Model state transition that triggered a collection event. This variable is formatted as a list of ASCII strings (SECS-II code 20), each with a maximum of 80 characters.Substrate object - specified by variableE90-07075037SubstDestinationListString80ListA list of SubstDestinations related by the same Substrate object State Model transition that triggered a collection event. This variable is formatted as a list of ASCII strings (SECS-II code 20), each with a maximum of 80 characters.Substrate object - specified by variableE90-07075038SubstHistoryListSubstHistoryListFormatA list of SubstHistorys related by the same Substrate Object State Model state transition that triggered a collection event. SubstHistoryList is formatted is a list of SubstHistory items (see SubstHistory definition in this file)Substrate object - specified by variableE90-07075039SubstIDString80Identifier of the substrate associated with the last event. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters. It has the same value as ObjID if the event notification is for a single substrate. It will be empty in the case of a group of substrates and SubstIDList will be set insteadSubstrate object - specified by variableE90-07075040SubstIDListString80ListA list of substrate identifiers related by the same Substrate Object State Model state transition that triggered a collection event with which this variable was associated. This variable is formatted as a list of ASCII strings (SECS-II code 20), each with a maximum of 80 characters. SubstIDList will be empty when the event reports a single substrate and SubstID will be set instead.Substrate object - specified by variableE90-07075041SubstIDStatusListSubstIDStatusListFormatA list of SubstIDStatuses related by the same Substrate Object State Model state transition that triggered a collection event. SubstIDStatusList is a list of SubstIDStatus items (see SubstIDStatus definition in this file).Substrate object - specified by variableE90-07075042SubstLocIDListString80ListA list of substrate location identifiers related by the same Substrate Object State Model state transition that triggered a collection event. This variable is formatted as a list of ASCII strings (SECS-II code 20), each with a maximum of 80 characters.Substrate object - specified by variableE90-07075043SubstLotIDListString80ListA list of substrate LotIDs related by the same Substrate Object Model state transition that triggered a collection event. This variable is formatted as a list of ASCII strings (SECS-II code 20), each with a maximum of 80 characters.Substrate object - specified by variableE90-07075044SubstMtrlStatusListMaterialStatusListFormatA list of MtrlStatus related by the same Substrate Object Model state transition that triggered a collection event. SubstMtrlStatusList is formatted as a list of SubstMtrlStatus items (see the SubstMtrlStatus definition in this file).Substrate object - specified by variableE90-07075046SubstProcStateListSubstProcStateListFormatA list of substrate process states related by the same Substrate Object Model state transition that triggered a collection event with which this variable was associated. SubstProcStateList is formatted as a list of SubstProcState items (see the SubstProcState definition in this file).Substrate object - specified by variableE90-07075047SubstSourceListString80ListA list of SubstSources related by the same Substrate Object Model state transition that triggered a collection event. This variable is formatted as a list of ASCII strings (SECS-II code 20), each with a maximum of 80 characters.Substrate object - specified by variableE90-07075048SubstStateListSubstStateListFormatA list of substrate states related by the same Substrate Object Model state transition that triggered a collection event with which this variable was associated. SubstStateList is formatted as a list of SubstState items (see the SubstState definition in this file).Substrate object - specified by variableE90-07075049SubstTypeListSubstTypeListFormatA list of SubstTypes related by the same Substrate Object Model state transition that triggered a collection event. SubstTypeList is formatted as a list of SubstType items (see the SubstType definition in this file).Substrate object - specified by variableE90-07075050SubstUsageListSubstUsageListFormatA list of SubstUsages related by the same Substrate Object Model state transition that triggered a collection event. SubstUsageList is formatted as a list of SubstUsage items (see the SubstUsage definition in this file).Substrate object - specified by variableE90-07075052SubstLocSubstIDString80Substrate identifier relevant to the location. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.SubstLoc object - specified by variableE90-07077042SubstLocSubstIDString80Substrate identifier relevant to the location. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.SubstrateLocation - specified by variableE90-07077044SubstLocStateLocationStateEnumSubstrate location state for the location. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the Substrate object SubstLocState attribute specified in SEMI E40.1-0707 Table 4.SubstrateLocation - specified by variableE90-07077046SubstLocIDString80Identifier of the substrate location. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.SubstrateLocation - specified by variableE90-07075054CtrlJobIDString80Host defined identifier of the ControlJob. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.ControlJob object - specified by variableE94-03095055CurrentPRJobListString80ListHolds the identifiers of any ProcessJobs in the active state. This variable is formatted as a list of ASCII strings (SECS-II code 20), each with a maximum of 80 characters.ControlJob object - specified by variableE94-03095056DataCollectionPlanString80Identifier for the data collection plan to be used during the execution of the ControlJob. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.ControlJob object - specified by variableE94-03095057CarrierInputSpecString80ListA list of CarrierID for material that will be used by the ControlJob. This variable is formatted as a list of ASCII strings (SECS-II code 20), each with a maximum of 80 characters.ControlJob object - specified by variableE94-03095058MtrlOutSpecMtrlOutSpecFormatMaps material from source to destination after processing. In slot integrity mode the list will be empty. MtrlOutSpec is formatted as a list items which are each a list two items: carrier identifier and a list of slot identifiers within that carrier.ControlJob object - specified by variableE94-03095059MtrlOutByStatusMtrlOutByStatusFormatList structure which maps locations or Carriers where processed material will be placed based on material status. MtrlOutByStatus is formatted as a list of items, each of which is a list of two: MaterialStatus and a list two items: carrier identifier and a list of slot identifiers within that carrier. The formats of these internal items are the same as similarly named items defined elsewhere in this file.ControlJob object - specified by variableE94-03095060PauseEventUnsignedInteger54ListIdentifier of a list of events on which the ControlJob will Pause. PauseEvent is formatted as a list of four-byte unsigned integers.ControlJob object - specified by variableE94-03095061PRJobStatusListPRJobStatusFormatA list of all ProcessJobs managed by the ControlJob and their associated status. The PRJobStatusList is formatted as a list of items with the format PRJobStateEnum (defined elsewhere in this file).ControlJob object - specified by variableE94-03095062ProcessingCtrlSpecProcessingCtrlSpecFormatA list of structures that defines the ProcessJobs and rules for running each that will be run within this ControlJob. The ProcessingCtrlSpec format is defined in E94.1-0309 Table 6.ControlJob object - specified by variableE94-03095063ProcessOrderMgmtProcessOrderMgmtEnumDesignation of the method used to determine the order in which ProcessJobs are initiated. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the ControlJob object ProcessOrderMgmt attribute specified in SEMI E94.1-0309 Table 6.ControlJob object - specified by variableE94-03095064StartMethodBooleanA logical flag that determines if the ControlJob can start automatically (true) or must be started by the user (false). This variable is formatted as a Boolean (SECS-II code 11).ControlJob object - specified by variableE94-03095065StateControlJobStateEnumCurrent state of the ControlJob. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the ControlJob object State attribute specified in SEMI E94.1-0309 Table 6.ControlJob object - specified by variableE94-03097016BlockedReasonBlockedReasonEnumA numeric code that identifies the most recent blocked condition of the related EPT module. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the EPTTracker object BlockedReason attribute specified in SEMI E116-0707 Table 3.EPTTracker object - SpecifiedByVariableE116-07077017BlockedReasonTextString80A description of the most recent blocked condition of the Equipment or EPT module. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.EPTTracker object - SpecifiedByVariableE116-07077018EPTStateEPTStateEnumThe current EPT state of this equipment or EPT module. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the EPTTracker object EPTState attribute specified in SEMI E116-0707 Table 3.EPTTracker object - SpecifiedByVariableE116-07077019EPTStateTimesUnsignedInteger54Time spent in the previous EPT State, prior to entering the current EPTState. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).EPTTracker object - SpecifiedByVariableE116-07077020PreviousEPTStateEPTStateEnumThe previous EPT state of this equipment or EPT module, prior to entering the current state. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the EPTTracker object PreviousEPTState attribute specified in SEMI E116-0707 Table 3.EPTTracker object - SpecifiedByVariableE116-07077021PreviousTaskNameString80Name of the EPT Task previously running on the EPT module, prior to starting the current EPT Task. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.EPTTracker object - SpecifiedByVariableE116-07077022PreviousTaskTypeTaskTypeEnumType of the EPT Task previously running on this EPT module, prior to starting the current EPT Task. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the EPTTracker object PreviousTaskType attribute specified in SEMI E116-0707 Table 3.EPTTracker object - SpecifiedByVariableE116-07077023TaskNameString80The name of the EPT Task currently running on this EPT module. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.EPTTracker object - SpecifiedByVariableE116-07077024TaskTypeTaskTypeEnumThe type of EPT Task currently running on this EPT module. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those of the EPTTracker object TaskType attribute specified in SEMI E116-0707 Table 3.EPTTracker object - SpecifiedByVariableE116-07077056RCIDString255Recipe Component Identifier - The identifier of the recipe component specifying the instructions for the activity in the associated process module. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 255 characters.ProcessModule - specified by variableE157-07107057RecIDString255Recipe Identifier - The identifier of the master recipe executing on the equipment. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 255 characters.ProcessModule - specified by variableE157-07107058ModuleIDString80Module Identifier - The identifier of the equipment module in which the recipe execution is taking place. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.ProcessModule - specified by variableE157-07107059RecipeParametersRecVariableListFormatThe recipe parameter settings applied to the module recipe to alter this instance of execution. The RecipeParameters format is specified in SEMI E157-0710 Table 3.ProcessModule - specified by variableE157-07107060SubstrateIDString80Substrate Identifier - This data parameter will report the ID of the substrate processed by this recipe execution. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.ProcessModule - specified by variableE157-07107061ProcessJobIDString80The identifier of the SEMI E40 Process Job responsible for the recipe execution in the module. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.ProcessModule - specified by variableE157-07107062StepIDString80Identifier of the recipe step definition within the recipe. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.ProcessModule - specified by variableE157-07107063StepCountUnsignedInteger51A value that represents the number of recipe steps executed. This variable is formatted as an unsigned 1-byte integer. This counter has a value of 1 for the first step executed for the module process and is incremented for each successive step as it begins executionProcessModule - specified by variableE157-07107000ProcessStateProcessStateEnumProcessing state of the equipment. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values: 0 - Idle, 1 - Setup, 2 - Ready, 3 - Executing, 4 - Pause.TrackSys404E30-03077001PreviousProcessStateProcessStateEnumPrevious process state of the equipment. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values: 0 - Idle, 1 - Setup, 2 - Ready, 3 - Executing, 4 - Pause.TrackSys404E30-03077002ControlStateControlStateEnumEquipment GEM control state. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those defined for ControlState in SEMI E5-0307 Table 4.TrackSys404E30-03077003ClockString32Current value of time at the equipment. This variable is reported in the standard E5 TimeFormat, which is formatted as an ASCII string (SECS-II code 20), and is limited to 32 characters. It corresponds to the SEMI E30 Clock SVTrackSys404E30-03077006PPExecNameString120PPID of the currently selected process program. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 120 characters. It corresponds to the SEMI E30 PPExecName SV.TrackSys404E30-03077007PPFormatPPFormatEnumIndicates the type of process programs and recipes that are supported. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those defined for PPFormat in SEMI E5-0307 Table 4.TrackSys404E30-03077902AlarmsEnabledUnsignedInteger54Liststatus variable consisting of a list of the alarm ID's currently enabled for reporting to the host. AlarmsEnabled is formatted as a list of ALIDs (unsigned 4-byte integers).TrackSys404E30-03077903AlarmsSetUnsignedInteger54ListStatus variable consisting of a list of the alarm ID's currently in the ALARM SET (or unsafe) state. AlarmsSet is formatted as a list of ALIDs (unsigned 4-byte integers).TrackSys404E30-03077904EventsEnabledUnsignedInteger54ListA variable data item that consists of a list of currently enabled collection events (CEIDs). EventsEnabled is formatted as a list of CEIDs (unsigned 4-byte integers).TrackSys404E30-03077916PortStateInfoListPortStateInfoListFormatList of PortStateInfo for all load ports. PortStateInfoList is format as a list of PortStateInfo items. PortStateInfo is defined elsewhere in this file.TrackSys404/EFEME87-07097131PortTransferStateListPortTransferStateListFormatCurrent transfer state for all load ports. PortTransferStateList is formatted as a list of PortTransferStates. PortTransferState is defined elsewhere in this file.TrackSys404/EFEME87-07097132LoadPortReservationStateListLoadPortResStateListFormatCurrent reservation state for all load ports. LoadPortReservationStateList is formatted as a list of LoadPortReservationStates. LoadPortReservationState is defined elsewhere in this file.TrackSys404/EFEME87-07097133PortAssociationStateListPortAssocStateListFormatCurrent association state for all load ports. PortAssociationStateList is formatted as a list of PortAssociationStates. PortAssociationState is defined elsewhere in this file.TrackSys404/EFEME87-07097134PortTransferState1PortTransferStateEnumCurrent transfer state of this load port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for PortTransferState in E87.1-0709 Table 4.TrackSys404/EFEM/LoadPort1E87-07097136LoadPortReservationState1LoadPortReservationStateEnumReservation state of the Load Port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for LoadPortReservationState in E87.1-0709 Table 4.TrackSys404/EFEM/LoadPort1E87-07097138PortAssociationState1PortAssociationStateEnumThe association state of the load port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for PortAssociationState in E87.1-0709 Table 4.TrackSys404/EFEM/LoadPort1E87-07097917AccessMode1AccessModeEnumAccess mode of the Load Port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for AccessMode in E87.1-0709 Table 4.TrackSys404/EFEM/LoadPort1E87-07097918PortStateInfo1PortStateInfoFormatPortAssociationState combined with the PortTransferState of this Load Port. PortStateInfo1 is formatted as a list of two items: the PortAssociationState and the PortTransferState. The enumerations for these two items correspond to those specified in E87.1-0709 Table 4.TrackSys404/EFEM/LoadPort1E87-07097141PortID1UnsignedInteger51Load port identifier as defined in E87. This variable is formatted as an unsigned 1-byte integer.TrackSys404/EFEM/LoadPort1E87-07097919CarrierID1String80Identifier of the current carrier location. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/EFEM/LoadPort1E87-07097155LocationID1String80Identifier of the carrier location This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/EFEM/LoadPort1/LoadPort1LoadE87-07097157LocationID2String80Identifier of the carrier location. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/EFEM/LoadPort1/LoadPort1FIMSE87-07097158PortTransferState2PortTransferStateEnumCurrent transfer state of this load port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for PortTransferState in E87.1-0709 Table 4.TrackSys404/EFEM/LoadPort2E87-07097160LoadPortReservationState2LoadPortReservationStateEnumReservation state of the Load Port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for LoadPortReservationState in E87.1-0709 Table 4.TrackSys404/EFEM/LoadPort2E87-07097162PortAssociationState2PortAssociationStateEnumThe association state of the load port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for PortAssociationState in E87.1-0709 Table 4.TrackSys404/EFEM/LoadPort2E87-07097164AccessMode2AccessModeEnumAccess mode of the Load Port. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for AccessMode in E87.1-0709 Table 4.TrackSys404/EFEM/LoadPort2E87-07097166PortStateInfo2PortStateInfoFormatPortAssociationState combined with the PortTransferState of this Load Port. PortStateInfo2 is formatted as a list of two items: the PortAssociationState and the PortTransferState. The enumerations for these two items correspond to those specified in E87.1-0709 Table 4.TrackSys404/EFEM/LoadPort2E87-07097168PortID2UnsignedInteger51Load port identifier as defined in E87. This variable is formatted as an unsigned 1-byte integer.TrackSys404/EFEM/LoadPort2E87-07097182LocationID3String80Identifier of the carrier location. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/EFEM/LoadPort2/LoadPort2LoadE87-07097184LocationID4String80Identifier of the carrier location. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/EFEM/LoadPort2/LoadPort2FIMSE87-07097031CarrierLocationMatrixCarrierLocationMatrixFormatA list of all carriers at/in the equipment. CarrierLocationMatrix is formatted as a list of two-item lists, each consisting of a location identifier (string, maximum 80 characters) and carrier identifier (string, maximum 80 characters).TrackSys404E87-07097041SubstrLocSubstrID1String80Substrate identifier relevant to the location 1 - TransArm300VacuumChuck. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/TransArm300/TransArm300VacuumChuckE90-07077043SubstLocState1LocationStateEnumSubstrate location state for location 1 - TransArm300VacuumChuck. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for SubstLocState in E90.1-0707 Table 5.TrackSys404/TransArm300/TransArm300VacuumChuckE90-07077045SubstLocID1String80Identifier of substrate location 1 - TransArm300VacuumChuck. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/TransArm300/TransArm300VacuumChuckE90-07077075SubstrLocSubstrID2String80Substrate identifier relevant to the location 2 - TrackSys404/HotPlate/HotChuck. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/HotPlate/HotChuckE90-07077077SubstLocState2LocationStateEnumSubstrate location state for location 2 - TrackSys404/HotPlate/HotChuck. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for SubstLocState in E90.1-0707 Table 5.TrackSys404/HotPlate/HotChuckE90-07077079SubstLocID2String80Identifier of substrate location 2 - TrackSys404/HotPlate/HotChuck. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/HotPlate/HotChuckE90-07077121SubstrLocSubstrID3String80Substrate identifier relevant to the location 3 - TrackSys404/Coater/NuSpin/NuSpinVacuumChuck. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/Coater/NuSpin/NuSpinVacuumChuckE90-07077123SubstLocState3LocationStateEnumSubstrate location state for location 3 - TrackSys404/Coater/NuSpin/NuSpinVacuumChuck. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for SubstLocState in E90.1-0707 Table 5.TrackSys404/Coater/NuSpin/NuSpinVacuumChuckE90-07077125SubstLocID3String80Identifier of substrate location 3 - TrackSys404/Coater/NuSpin/NuSpinVacuumChuck. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/Coater/NuSpin/NuSpinVacuumChuckE90-07077187SubstrLocSubstrID4String80Substrate identifier relevant to the location 4 - TrackSys404/EFEM/SubstrateReader/SubstrateReaderChuck. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/EFEM/SubstrateReader/SubstrateReaderChuckE90-07077189SubstLocState4LocationStateEnumSubstrate location state for location 4 - TrackSys404/EFEM/SubstrateReader/SubstrateReaderChuck. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for SubstLocState in E90.1-0707 Table 5.TrackSys404/EFEM/SubstrateReader/SubstrateReaderChuckE90-07077191SubstLocID4String80Identifier of substrate location 4 - TrackSys404/EFEM/SubstrateReader/SubstrateReaderChuck. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters.TrackSys404/EFEM/SubstrateReader/SubstrateReaderChuckE90-07077028QueuedCJobsString80ListIndicates the number of jobs which the queue can accept. This variable applies to the E94 QueueAvailableSpace SV. QueuedCJobs is formatted as a list of ControlJob identifiers (string, maximum 80 characters).TrackSys404E94-03097029QueueAvailableSpaceUnsignedInteger5103Used to query the number of control job openings within the queue. This variable is formatted as an unsigned 1-byte integer.TrackSys404E94-03097911Tracker1EventIDUnsignedInteger54Identifier for the event that triggered for a change in the state model for this tracker. This variable is a four-byte unsigned integer (SECS-II code 54).TrackSys404/EPTTracker1E116-07077909Tracker1TransitionTimestampString32The timestamp when the most recent transition occurred and collection event was triggered that set the tracker to its current state. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 32 characters.TrackSys404/EPTTracker1E116-07077910Tracker1TransitionTrackerTransitionEnumThe most recent transition that updated the tracker. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for Transition in E116-0707 Table 3.TrackSys404/EPTTracker1E116-07077931Tracker2EventIDUnsignedInteger54Identifier for the event that triggered for a change in the state model for this tracker. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/EFEM/LoadPort1/EPTTracker2E116-07077932Tracker2TransitionTimestampString32The timestamp when the most recent transition occurred and collection event was triggered that set the tracker to its current state. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 32 characters.TrackSys404/EFEM/LoadPort1/EPTTracker2E116-07077933Tracker2TransitionTrackerTransitionEnumThe most recent transition that updated the tracker. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for Transition in E116-0707 Table 3.TrackSys404/EFEM/LoadPort1/EPTTracker2E116-07077934Tracker3EventIDUnsignedInteger54Identifier for the event that triggered for a change in the state model for this tracker. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/HotPlate/EPTTracker3E116-07077935Tracker3TransitionTimestampString32The timestamp when the most recent transition occurred and collection event was triggered that set the tracker to its current state. This variable is formatted as an ASCII string (SECS-II code 20), and is limited to 32 characters.TrackSys404/HotPlate/EPTTracker3E116-07077936Tracker3TransitionTrackerTransitionEnumThe most recent transition that updated the tracker. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for Transition in E116-0707 Table 3.TrackSys404/HotPlate/EPTTracker3E116-07077937Tracker4EventIDUnsignedInteger54Identifier for the event that triggered for a change in the state model for this tracker. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/HotPlate/EPTTracker4E116-07077938Tracker4TransitionTimestampString32The timestamp when the most recent transition occurred and collection event was triggered that set the tracker to its current state. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 32 characters.TrackSys404/HotPlate/EPTTracker4E116-07077939Tracker4TransitionTrackerTransitionEnumThe most recent transition that updated the tracker. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for Transition in E116-0707 Table 3.TrackSys404/HotPlate/EPTTracker4E116-07077940Tracker5EventIDUnsignedInteger54Identifier for the event that triggered for a change in the state model for this tracker. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/HotPlate/EPTTracker5E116-07077941Tracker5TransitionTimestampString32The timestamp when the most recent transition occurred and collection event was triggered that set the tracker to its current state. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 32 characters.TrackSys404/HotPlate/EPTTracker5E116-07077942Tracker5TransitionTrackerTransitionEnumThe most recent transition that updated the tracker. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for Transition in E116-0707 Table 3.TrackSys404/HotPlate/EPTTracker5E116-07077200SubstrateLocationBitFieldSubstLocBitFieldFormatThis status variable identifies which fixed substrate locations (i.e., excluding carrier slots) are currently occupied.TrackSys404/TransArm3007032ArmHomeCylindricalCoordinateFormatThe arm home position in cylindrical coordinates. ArmHome is formatted with cylindrical coordinates consisting of a list of three items representing the radius, theta, and z coordinates. Each is an 8-byte floating point number.TrackSys404/TransArm3007033ArmPositionCylindricalCoordinateFormatThe arm position in cylindrical coordinates. ArmPosition is formatted with cylindrical coordinates consisting of a list of three items representing the radius, theta, and z coordinates. Each is an 8-byte floating point number.TrackSys404/TransArm3007034RobotPositionCartesianPointFormatThe robot position in Cartesian coordinates. RobotPosition is formatted as a Cartesian point consisting of a list of two items representing the x and y coordinates. Each is an 8-byte floating point number.TrackSys404/TransArm3007035RobotHomeCartesianPointFormatThe robot home position in Cartesian coordinates. RobotHome is formatted as a Cartesian point consisting of a list of two items representing the x and y coordinates. Each is an 8-byte floating point number.TrackSys404/TransArm3007036TransferRobotCurrStateString128The current state of the transfer robot. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/TransArm3007037TransferArmCurrStateString128The current state of the transfer arm. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/TransArm3007047Axis1EncoderUnsignedInteger54Axis 1 encoder count for current position. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/TransArm300/TransMC3007048Axis2EncoderUnsignedInteger54Axis 2 encoder count for current position. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/TransArm300/TransMC3007049Axis3EncoderUnsignedInteger54Axis 3 encoder count for current position. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/TransArm300/TransMC3007050Axis4EncoderUnsignedInteger54Axis 4 encoder count for current position. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/TransArm300/TransMC3007051Axis5EncoderUnsignedInteger54Axis 5 encoder count for current position. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/TransArm300/TransMC3007913BakeTimemsUnsignedInteger54Bake time on hot plate in milliseconds. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/HotPlate7052PinVoltageVFloatingPoint400.05.0Current voltage reading at the wafer pin actuator. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/HotPlate7053HoodCurrStateString128The current state of the Hood. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/HotPlate7054PinPositionCurrStateString128The current pin position state. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/HotPlate7055TemperatureConditionCurrStateString128The current state of the temperature on the hot plate. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/HotPlate7081MFCFlowRatesccmFloatingPoint40Mass flow controller flow rate. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/HotPlate/MFC3007082MFCCurrStateString128The current state of the MFC. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/HotPlate/MFC3007083RampRatedegC.s^-1FloatingPoint40Temperature ramp rate on hot plate. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/HotPlate/TC3007084TemperaturedegCFloatingPoint40Current temperature on the hot plate. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/HotPlate/TC3007085TempSetpointdegCFloatingPoint40Target hot plate temperature. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/HotPlate/TC3007086ValveVoltageVFloatingPoint40Current valve control voltage. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/HotPlate/UpstreamValve7087ValveCurrStateString128The current state of the valve. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/HotPlate/UpstreamValve7088ValveVoltageVFloatingPoint40Current valve control voltage. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/HotPlate/DownstreamValve7089ValveCurrStateString128The current state of the valve. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/HotPlate/DownstreamValve7925ArmPositionCartesianPointFormatThe arm position in Cartesian coordinates measured in centimeters. ArmPosition is formatted as a Cartesian point consisting of a list of two items representing the x and y coordinates. Each is an 8-byte floating point number.TrackSys404/Coater/NuDispense7926DispTimeUnsignedInteger54Coat dispense time in milliseconds. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/Coater/NuDispense7927DispVolumemsFloatingPoint40Volume of fluid dispensed on the wafer. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/Coater/NuDispense7928DispenseArmCurrStatecm^3String128The current state of the dispense arm. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/Coater/NuDispense7914DispenseTemperaturedegCFloatingPoint40The current temperature of the dispense fluid. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/Coater/NuDispense/NuTemperature7915TemperatureSetpointdegCFloatingPoint40Defines the temperature set point for the dispense fluid. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/Coater/NuDispense/NuTemperature7111ZAxisEncoderUnsignedInteger54Z Axis encoder count for current position. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/Coater/NuDispense/NuMC3007112XAxisEncoderUnsignedInteger54X Axis encoder count for current position. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/Coater/NuDispense/NuMC3007113PhotoresistPumpCurrStateString128The current state of the photoresist pump. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/Coater/Photopump3007114ChuckPositioncmCartesianPointFormatThe position of the chuck in Cartesian coordinates measured in centimeters. ChuckPosition is formatted as a Cartesian point consisting of a list of two items representing the x and y coordinates. Each is an 8-byte floating point number.TrackSys404/Coater/NuSpin7115SpinSpeedrpmFloatingPoint40078Current speed of the spin chuck. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/Coater/NuSpin7116SpinChuckSpinCurrStateString128The current state of the spin chuck spinner. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/Coater/NuSpin7117SpinChuckSpinPrevStateString128The previous state of the spin chuck spinner. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/Coater/NuSpin7118SpinChuckPositionCurrStateString128The current state of the spin chuck position. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/Coater/NuSpin7127ZAxisEncoderUnsignedInteger54Z Axis encoder count for current position. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/Coater/NuSpin/NuMC3037128ThetaEncoderSpeedUnsignedInteger54Encoder counts per second on Theta motor. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/Coater/NuSpin/NuMC3037129ManifoldPressurePatorrFloatingPoint400.00010000.000Pressure reading from the output manifold on the vacuum pump. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/VacuSys80007130VacuumPumpCurrStateString128The current state of the vacuum pump. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 128 characters.TrackSys404/VacuSys80007012EstablishCommunicationsTimeout530015sUnsignedInteger52Equipment Constant used to initialize the interval between attempts to resend a SECS Establish Communications Request. This value specifies the number of seconds for the interval. This variable is formatted as a two-byte unsigned integer (SECS-II code 52).TrackSys404E30-03077013TimeFormat1TimeFormatEnumThe setting of this ECV controls whether the equipment will use the SECS variable item CLOCK and the SECS data items STIME, TIMESTAMP, and TIME in 12-byte, 16-byte, or Extended format. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values correspond to those specified for TimeFormat in SEMI E5-0307 Table 4.TrackSys404E30-03077014BypassReadIDtrueBooleanEnables (true) or Disables (false) automatic ID acceptance when the carrier ID reader is unavailable. This variable is formatted as a Boolean (SECS-II code 11).TrackSys404E87-07097905CarrierHoldTrigger0CarrierHoldTriggerEnumAllows the user to select a trigger to release the carrier when reading/writing is complete. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values: 0 - Host Release, 1 - Equipment Release.TrackSys404E87-07097906UnclampControlTrigger0UnclampControlTriggerEnumAllows the user to select a trigger to unclamp the carrier based on AMHS arrival at the equipment. This variable is an enumerated value formatted as a one-byte unsigned integer (SECS-II code 51). The enumeration values: 0 - CarrierComplete/CarrierStopped Triggered Unclamp, 1 - AMHS Triggered Unclamp.TrackSys404E87-07097015SubstrateReaderEnabledfalseBooleanEnables or disables reading of substrate IDs by the equipment. This variable is formatted as a Boolean (SECS-II code 11).TrackSys404E90-07077929SetUpNameUnknownString80Host sets this to define the operational condition of the equipment. This variable is formatted as an ASCII string (SECS-II code 20) and is limited to 80 characters. It corresponds to the E94 SetUpName ECTrackSys404E94-030903007Carrier Verification FailureCarrierVerificationFailure40144015Equipment verification of Carrier Id failedTrackSys404E87-070903008Slot Map Read FailedSlotMapReadFailed40164017Failed to read slot mapTrackSys404E87-070903009Slot Map Verification FailedSlotMapVerificationFailed40184019Equipment verification of Carrier Slot Map failedTrackSys404E87-070903010Duplicate Carrier IDDuplicateCarrierID40204021A duplicate Carrier ID exists on the equipmentTrackSys404E87-070903030PIO FailurePIOFailureLP140604061I/O signal error occurredTrackSys404/EFEM/LoadPort1E87-070903031Attempt To Use Out Of Service Load PortAttemptToUseOutOfServiceLoadPortLP140624063An attempt was made to use a load port that is in the OutOfService stateTrackSys404/EFEM/LoadPort1E87-070903032Carrier Presence ErrorCarrierPresenceErrorLP140644065Carrier sensor indicates a carrier is present when none should beTrackSys404/EFEM/LoadPort1E87-070903033Carrier Placement ErrorCarrierPlacementErrorLP40664067Carrier placement on port is incorrectTrackSys404/EFEM/LoadPort1E87-070903034Carrier Dock / Undock FailureCarrierDockUndockFailureLP140684069Failed to dock or undock carrierTrackSys404/EFEM/LoadPort1E87-070903035Carrier Removal ErrorCarrierRemovalErrorLP140704071Carrier was removed in an invalid stateTrackSys404/EFEM/LoadPort1E87-070903036Access Mode ViolationAccessModeViolationLP140724073A carrier was manually placed on the load port while in Auto, or the AMHS placed a carrier while in ManualTrackSys404/EFEM/LoadPort1E87-070903037Carrier Open Close FailureCarrierOpenCloseFailureLP140744075Failed to open or close the Load Port / Carrier doorTrackSys404/EFEM/LoadPort1E87-070903038PIO FailurePIOFailureLP240764077I/O signal error occurredTrackSys404/EFEM/LoadPort2E87-070903039Attempt To Use Out Of Service Load PortAttemptToUseOutOfServiceLoadPortLP240784079An attempt was made to use a load port that is in the OutOfService stateTrackSys404/EFEM/LoadPort2E87-070903040Carrier Presence ErrorCarrierPresenceErrorLP240804081Carrier sensor indicates a carrier is present when none should beTrackSys404/EFEM/LoadPort2E87-070903041Carrier Placement ErrorCarrierPlacementErrorLP240824083Carrier placement on port is incorrectTrackSys404/EFEM/LoadPort2E87-070903042Carrier Dock / Undock FailureCarrierDockUndockFailureLP240844085Failed to dock or undock carrierTrackSys404/EFEM/LoadPort2E87-070903043Carrier Removal ErrorCarrierRemovalErrorLP240864087Carrier was removed in an invalid stateTrackSys404/EFEM/LoadPort2E87-070903044Access Mode ViolationAccessModeViolationLP240884089A carrier was manually placed on the load port while in Auto, or the AMHS placed a carrier while in ManualTrackSys404/EFEM/LoadPort2E87-070903045Carrier Open Close FailureCarrierOpenCloseFailureLP240904091Failed to open or close the Load Port / Carrier doorTrackSys404/EFEM/LoadPort2E87-070903005Substrate Destination Not AccessibleSubstrateDestinationNotAccessible40104011The substrate destination in the MtrlOutSpec is either not accessible or is already occupiedTrackSys404E94-030903006Substrate Destination UnknownSubstrateDestinationUnknown40124013The substrate destination is not specified in the MtrlOutSpecTrackSys404E94-030903000Memory LowMemoryLow40004001Control system memory is lowTrackSys40403001Program Execution TimeoutProgramExecutionTimeout40024003Program execution has timed outTrackSys40403002Initialization Hardware ErrorInitializationHardwareError40044005Initialization identified hardware errorTrackSys40403003Recipe Storage Space LowRecipeStorageSpaceLow40064007Recipe storage area low disk spaceTrackSys40403004SECS Message Timeout FrequencySECSMessageTimeoutFrequency40084009SECS message timeout frequency exceeded (too many timeouts)TrackSys40403011Vacuum LossVacuumLossTransArm30040224023Vacuum lostTrackSys404/TransArm30003012Over TemperatureOvenTemperature40244025Temperature above maximumTrackSys404/HotPlate03013Device Not RespondingDeviceNotRespondingHotPlate40264027Communication with device lostTrackSys404/HotPlate03014Wafer Sensor MalfunctionWaferSensorMalfunctionHotPlate40284029MaterialLocation wafer sensor not responding or responding intermittentlyTrackSys404/HotPlate03015Wafer Lost During ProcessWaferLostDuringProcessingHotPlate40304031Wafer unexpectedly disappeared from MaterialLocation during processingTrackSys404/HotPlate03016Initialization FailedInitializationFailedHotPlate40324033Equipment component failed to initialize properlyTrackSys404/HotPlate03017Device Not RespondingDeviceNotRespondingMFC30040344035Communication with device lostTrackSys404/HotPlate/MFC30003018Pressure LossPressureLoss40364037Pressure failureTrackSys404/HotPlate/MFC30003019Device Not RespondingDeviceNotRespondingTC30040384039Communication with device lostTrackSys404/HotPlate/TC30003020Device Not RespondingDeviceNotRespondingCoater40404041Communication with device lostTrackSys404/Coater03021Spin Speed Out Of LimitsSpinSpeedOutOfLimits40424043Spin speed beyond normal limitsTrackSys404/Coater03022Wafer Sensor MalfunctionWaferSensorMalfunctionCoater40444045MaterialLocation wafer sensor not responding or responding intermittentlyTrackSys404/Coater03023Wafer Lost During ProcessWaferLostDuringProcessingCoater40464047Wafer unexpectedly disappeared from MaterialLocation during processingTrackSys404/Coater03024Initialization FailedInitializationFailedCoater40484049Equipment component failed to initialize properlyTrackSys404/Coater03025Device Not RespondingDeviceNotRespondingNuDispense40504051Communication with device lostTrackSys404/Coater/NuDispense03026Device Not RespondingDeviceNotRespondingPhotopump30040524053Communication with device lostTrackSys404/Coater/Photopump30003027Low Photo LevelLowPhotoLevel40544055Photo resist level lowTrackSys404/Coater/Photopump30003028Vacuum LossVacuumLossNuSpin40564057Vacuum lostTrackSys404/Coater/NuSpin03029Device Not RespondingDeviceNotRespondingNuSpin40584059Communication with device lostTrackSys404/Coater/NuSpinDispTime1005000Coat dispense time in milliseconds. This variable is an enumerated value formatted as a four-byte unsigned integer (SECS-II code 54).TrackSys404/Coater/NuDispenseUnsignedInteger54msDispVolume0.1010.00Volume of fluid dispensed on the wafer. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/Coater/NuDispenseFloatingPoint40cm^3SpinSpeed0.0078.00Speed of the spin chuck. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/Coater/NuSpinFloatingPoint40rpmMFCFlowRate10500Mass flow controller flow rate. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/HotPlate/MFC300FloatingPoint40sccmRampRate0.1007.500Temperature ramp rate on hot plate; Min/Max given in degC.s^-1. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/HotPlate/TC300FloatingPoint40degC.s^-1degF.s^-1TempSetpoint100500Target hot plate temperature; Min/Max given in degC. This variable is formatted as an 8-byte floating point number (SECS-II code 40).TrackSys404/HotPlate/TC300FloatingPoint40degCdegFBooleanFloatingPoint40String9String32String80String120String128String255UnsignedInteger51UnsignedInteger52UnsignedInteger54AccessModeEnumUI10Manual - Only manual (non-AMHS) carrier transfers are allowed (corresponds to SECS value 0)1Auto - Only automated (AMHS) carrier transfers are allowed (corresponds to SECS value 1)BlockedReasonEnumUI10Not Blocked - EPT Module is not blocked (corresponds to SECS value 0)1Unknown - The blocked reason is unknown (corresponds to SECS value 1)2SafetyThreshold - A safety threshold value has been crossed (corresponds to SECS value 2)3Error Condition - An error condition has occurred within the EPT Module (corresponds to SECS value 3)4ParametricException - A parametric error was detected (corresponds to SECS value 4)5Abort - Process is Aborting or has Aborted (corresponds to SECS value 5)6Pause - Process is Pausing or has Paused (corresponds to SECS value 6)CarrierAccessingStatusEnumUI10NotAccessed - Access by the equipment has not been started (corresponds to SECS value 0)1InAccess - Access by the equipment to the carrier has been started but has not been finished (corresponds to SECS value 1)2CarrierComplete - Access by the equipment to the carrier has been finished (corresponds to SECS value 2)3CarrierStopped - Access by the equipment to the carrier has been stopped abnormally (corresponds to SECS value 3)CarrierHoldTriggerEnumUI10Host Release - both fixed buffer and internal buffer equipment hold the carrier at the write position until the CarrierRelease service is received1Equipment Release - the equipment will release the carrier based on the Carrier Object state model transition of CarrierComplete to CarrierStopped.CarrierIDStatusEnumUI10IDNotRead - CarrierID has not been read by the equipment (corresponds to SECS value 0)1WaitingForHost - CarrierID has been read by the equipment successfully or unsuccessfully and has not yet been verified by the host (corresponds to SECS value 1)2IDVerificationOk - CarrierID has been accepted either by successful verification by the equipment or the host, or by bypassing ID read because a carrier ID reader is not available and the BypassReadID variable is set to true (corresponds to SECS value 2)3IDVerificationFailed - CarrierID has failed verification by the host (corresponds to SECS value 3)ControlJobStateEnumUI10Queued - ControlJob is queued (corresponds to SECS value 0)1Selected - ControlJob does not initiate ProcessJobs specific in it, the processing resource is reserved to the ControlJob (corresponds to SECS value 1)2WaitingForStart - ControlJob is waiting to receive a Start command manually or remotely from the host (corresponds to SECS value 2)3Executing - Each ProcessJob in the ProcessingCtrlSpec is initiated in order, based on the value of the ControlJob's ProcessOrderMgmt attribute as resources become available and materials arrive (corresponds to SECS value 3)4Paused - ControlJob will not commence the initiation of any more ProcessJobs (corresponds to SECS value 4)5Completed - All ProcessJobs have been completed, stopped, or aborted (corresponds to SECS value 5)ControlStateEnumUI11EquipmentOffLine - System maintains the OffLine state and requires operator instructions to attempt to go OnLine (corresponds to SECS value 1)2AttemptOnLine - Equipment attempting to change state to OnLine (corresponds to SECS value 2)3HostOffLine - Equipment is intent on being Online, however, the Host has not agreed (corresponds to SECS value 3)4Local - Operation of the equipment is implemented by direct action of an operator (corresponds to SECS value 4)5 Remote - Operation of the equipment is implemented by host automation (corresponds to SECS value 5)EPTStateEnumUI10Idle - Equipment or Module is Idle (corresponds to SECS value 0)1Busy - Equipment or Module is Busy (corresponds to SECS value 1)2Blocked - Equipment or Module is Blocked (corresponds to SECS value 2)3NoState - No previous state exists for Equipment or Module (corresponds to SECS value 3)LoadPortReservationStateEnumUI10NotReserved - No reservation exists for the load port (corresponds to SECS value 0)1Reserved - A reservation for future activity at the load port exists (corresponds to SECS value 1)PortAssociationStateEnumUI10NotAssociated - No carrier association present for the Load Port (corresponds to SECS value 0)1Associated - Carrier has been associated with the Load Port (corresponds to SECS value 1)PortTransferStateEnumUI10OutOfService - Transfer to/from this load port is disabled (corresponds to SECS value 0)1TransferBlocked - Load port related activity being performed, transfer is not available to/from this load port at this time (corresponds to SECS value 1)2ReadyToLoad - Load port is available to be loaded with an external carrier, or with a carrier that is currently located inside the equipment (corresponds to SECS value 2)3ReadyToUnload - Load port is available for unloading of a carrier from the Load Port to material handling equipment (corresponds to SECS value 3)PPChangeStatusEnumUI11Created - Process program created (corresponds to SECS value 1)2Edited - Process program edited or modified (corresponds to SECS value 2)3Deleted - Process program deleted (corresponds to SECS value 3)PPFormatEnumUI11Unformatted process programs2Formatted process programs3Both unformatted and formatted process programs4Execution Recipes5Large unformatted process programs6Large formatted process programs7Both large unformatted and large formatted process programs8Large execution recipes9Both execution recipes and large execution recipes10Both unformatted and large unformatted process programs11Both formatted and large formatted process programs12Both unformatted and large formatted process programs13Both formatted and large unformatted process programs14Unformatted, large unformatted, and large formatted process programs15Formatted, large unformatted, and large formatted process programs16Formatted, unformatted, large unformatted, and large formatted process programsPRJobStateEnumUI10QueuedPooled - The ProcessJob has been accepted by the processing resource through a PR Job Create/Acknowledge transaction and is awaiting execution (corresponds to SECS value 0)1SettingUp - The processing resource performs pre-conditioning, waits material arrival, and prepares for material processing (corresponds to SECS value 1)2WaitingForStart - Setup is complete and a PR Job Start Process has not yet been received by the processing resource (corresponds to SECS value 2)3Processing - The processing resource is doing the actual material processing using the equipment recipe(s) specified by the PR Job (corresponds to SECS value 3)4ProcessComplete - The processing resource has completed processing all material specified by the PR Job (corresponds to SECS value 4)6Pausing - The processing resource continues to the first safe, continuable place and then ceases activity (corresponds to SECS value 6)7Paused - All processing resource activity has ceased (corresponds to SECS value 7)8Stopping - The processing resource is performing a stop procedure to terminate processing in an orderly manner (corresponds to SECS value 8)9Aborting - The process resource is performing an abort or an optional recovery procedure (corresponds to SECS value 9)10Stopped - Final state for those jobs that have been in the Stopping State (corresponds to SECS value 10)11Aborted - Final state for those jobs that have been in the Aborting State (corresponds to SECS value 11)PRMtlTypeEnumBIN13Carrier - Material selected by Carrier ID and slots (corresponds to SECS value 13)14Substrate - Material selected by Substrate ID (corresponds to SECS value 14)ProcessOrderMgmtEnumUI11Arrival - ProcessJobs are initiated as the material for the job arrives (corresponds to SECS value 1)2Optimized - ProcessJobs are initialized in an order determined by internal equipment algorithms that optimize the throughput of material in the equipment (corresponds to SECS value 2)3List - ProcessJobs are initiated in the order of the list in ProcessingCtrlSpec (corresponds to SECS value 3)ProcessStateEnumUI10Idle" The equipment is awaiting instructions1"Setup" All external conditions necessary for process execution are satisfied2"Ready" Equipment is ready for process execution and is awaiting a Start command from the operator or host3"Executing" Equipment is executing a process program automatically and can continue to do so without external intervention4"Pause" Processing is suspended and the equipment is awaiting a commandReasonEnumUI10VerificationNeeded - Equipment needs host to verify carrier ID (corresponds to SECS value 0)1VerificationByEquipmentUnsuccessful - Equipment failed to verify the carrier ID (corresponds to SECS value 1)2ReadFail - Failed to read carrier ID (corresponds to SECS value 2)3ImproperSubstratePosition - Improper Substrate Position (corresponds to SECS value 3)SlotMapStatusEnumUI10SlotMapNotRead - Carrier has been loaded but the slot map has not been read by the equipment (corresponds to SECS value 0)1WaitingForHost - Equipment is waiting for input from the host (corresponds to SECS value 1)2SlotMapVerificationOk - Slot map has been verified (corresponds to SECS value 2)3SlotMapVerificationFailed - Slot map has been read by the equipment and has failed verification by the host (corresponds to SECS value 3)SubstIDStatusEnumUI10NotConfirmed - The substrate identifier has not been confirmed (corresponds to SECS value 0)1WaitingForHost - Substrate ID could not be identified by the reader, was discovered to be at a wrong source location, or no matching ID in the source set (corresponds to SECS value 1)2Confirmed - Substrate ID has been confirmed by the equipment or the host after it was read (corresponds to SECS value 2)3ConfirmationFailed - Host decides to cancel the substrate (corresponds to SECS value 3)LocationStateEnumUI10Unoccupied - Material location does not hold or have any material1Occupied - Material location holds materialMaterialStatusEnumUI10Processed - Processing Completed Successfully1Failed - Processing FailedSubstProcStateEnumUI10NeedsProcessing - Processing in the equipment is required and has not started (corresponds to SECS value 0)1InProcess - Processing has started (corresponds to SECS value 1)2Processed - Processing has completed normally (corresponds to SECS value 2)3Aborted - Processing has terminated abnormally (corresponds to SECS value 3)4Stopped - Processing has terminated at completion of a certain processing step (corresponds to SECS value 4)5Rejected - Substrate has been identified as needing special treatment (corresponds to SECS value 5)6Lost - Substrate has been removed from the equipment by an external agent or it is physically missing (corresponds to SECS value 6)7Skipped - Substrate was not processed (corresponds to SECS value 7)SubstStateEnumUI10AtSource - Substrate is at the original location it was received (corresponds to SECS value 0)1AtWork - Substrate has been taken from the original substrate location, and is traveling on intermediate equipment substrate locations (corresponds to SECS value 1)2AtDestination - Substrate has been placed at its designated destination substrate location (corresponds to SECS value 2)SubstTypeEnumUI10Wafer (corresponds to SECS value 0)1Flat Panel (corresponds to SECS value 1)2CD (corresponds to SECS value 2)3Mask (corresponds to SECS value 3)SubstUsageEnumUI10Product - Substrate contains product being created by the facility (corresponds to SECS value 0)1Test - Substrate used for testing processes (corresponds to SECS value 1)2Filler - Substrate used to fill open positions (corresponds to SECS value 2)TaskTypeEnumUI10NoTask - EPT Module is Idle (or NoState for previous value)(corresponds to SECS value 0)1Unspecified - Type of task is not specified (corresponds to SECS value 1)2Process - Normal or desired manufacturing operations that are capable of adding value by physical-chemical change or providing critical process information (corresponds to SECS value 2)Support - Normal or desired manufacturing operations that are incapable of adding value(corresponds to SECS value 3)4Maintenance - Any task that is intended to change the state of the equipment for the purpose of maintaining equipment functionality or performance (corresponds to SECS value 4)5Diagnostics - Any task that obtains information about the status of the equipment for the purpose of determining the equipment's health or identifying an equipment problem(corresponds to SECS value 5)6Waiting - An equipment initiated task that indicates the module is encountering normal waiting periods as part of its normal wafer processing scenario (corresponds to SECS value 6)TimeFormatEnumUI1012-ByteFormat - Date and Time reported in the 12 character form of YYMMDDhhmmss116-ByteFormat - Date and Time reported in the 16 character form of YYYYMMDDhhmmssccc2ExtendedMax32ByteFormat - Date and Time reported in the form of YYYY-MM-DDThh:mm:ss.sTZDTrackerTransitionEnumUI11Transition 1a, 1b, or 1c occurred (See E116:EPTStateModule and E116:EPTStateEquipment state machine definition)2Transition 2 occurred (See E116:EPTStateModule and E116:EPTStateEquipment state machine definition)3Transition 3 occurred (See E116:EPTStateModule and E116:EPTStateEquipment state machine definition)4Transition 4 occurred (See E116:EPTStateModule and E116:EPTStateEquipment state machine definition)5Transition 5 occurred (See E116:EPTStateModule and E116:EPTStateEquipment state machine definition)6Transition 6 occurred (See E116:EPTStateModule and E116:EPTStateEquipment state machine definition)7Transition 7 occurred (See E116:EPTStateModule and E116:EPTStateEquipment state machine definition)8Transition 8 occurred (See E116:EPTStateModule and E116:EPTStateEquipment state machine definition)9Transition 9 occurred (See E116:EPTStateModule and E116:EPTStateEquipment state machine definition)UnclampControlTriggerEnumUI10CarrierComplete/CarrierStopped Triggered Unclamp - The equipment automatically unclamps the carrier when the Carrier Status transitions to CarrierComplete or CarrierStopped.1AMHS Triggered Unclamp - The equipment behavior depends upon the LoadPortAccess state.SubstLocBitFieldFormatUI10Robot Arm is Occupied (TransArm300VacuumChuck)1SubstrateReader is Occupied (SubstrateReaderChuck)2HotPlate is Occupied (HotChuck)3Coater is Occupied (NuSpinVacuumChuck)CarrierLocationMatrixFormatCartesianPointFormatContentMapFormatCylindricalCoordinateFormatMtrlOutByStatusFormatUI10Processed - Processing Completed Successfully1Failed - Processing FailedMtrlOutSpecFormatLoadPortResStateListFormatUI10NotReserved - No reservation exists for the load port (corresponds to SECS value 0)1Reserved - A reservation for future activity at the load port exists (corresponds to SECS value 1)PortAssocStateListFormatUI10NotAssociated - No carrier association present for the Load Port (corresponds to SECS value 0)1Associated - Carrier has been associated with the Load Port (corresponds to SECS value 1)PortStateInfoFormatUI10NotAssociated - No carrier association present for the Load Port (corresponds to SECS value 0)1Associated - Carrier has been associated with the Load Port (corresponds to SECS value 1)UI10OutOfService - Transfer to/from this load port is disabled (corresponds to SECS value 0)1TransferBlocked - Load port related activity being performed, transfer is not available to/from this load port at this time (corresponds to SECS value 1)2ReadyToLoad - Load port is available to be loaded with an external carrier, or with a carrier that is currently located inside the equipment (corresponds to SECS value 2)3ReadyToUnload - Load port is available for unloading of a carrier from the Load Port to material handling equipment (corresponds to SECS value 3PortStateInfoListFormatUI10NotAssociated - No carrier association present for the Load Port (corresponds to SECS value 0)1Associated - Carrier has been associated with the Load Port (corresponds to SECS value 1)UI10OutOfService - Transfer to/from this load port is disabled (corresponds to SECS value 0)1TransferBlocked - Load port related activity being performed, transfer is not available to/from this load port at this time (corresponds to SECS value 12ReadyToLoad - Load port is available to be loaded with an external carrier, or with a carrier that is currently located inside the equipment (corresponds to SECS value 2)3ReadyToUnload - Load port is available for unloading of a carrier from the Load Port to material handling equipment (corresponds to SECS value 3)PortTransferStateListFormatUI10OutOfService - Transfer to/from this load port is disabled (corresponds to SECS value 0)1TransferBlocked - Load port related activity being performed, transfer is not available to/from this load port at this time (corresponds to SECS value 1)2ReadyToLoad - Load port is available to be loaded with an external carrier, or with a carrier that is currently located inside the equipment (corresponds to SECS value 2)3ReadyToUnload - Load port is available for unloading of a carrier from the Load Port to material handling equipment (corresponds to SECS value 3)PRJobStatusFormatUI10QueuedPooled - The ProcessJob has been accepted by the processing resource through a PR Job Create/Acknowledge transaction and is awaiting execution (corresponds to SECS value 0)1SettingUp - The processing resource performs pre-conditioning, waits material arrival, and prepares for material processing (corresponds to SECS value 1)2WaitingForStart - Setup is complete and a PR Job Start Process has not yet been received by the processing resource (corresponds to SECS value 2)3Processing - The processing resource is doing the actual material processing using the equipment recipe(s) specified by the PR Job (corresponds to SECS value 3)4ProcessComplete - The processing resource has completed processing all material specified by the PR Job (corresponds to SECS value 4)6Pausing - The processing resource continues to the first safe, continuable place and then ceases activity (corresponds to SECS value 6)7Paused - All processing resource activity has ceased (corresponds to SECS value 7)8Stopping - The processing resource is performing a stop procedure to terminate processing in an orderly manner (corresponds to SECS value 8)9Aborting - The process resource is performing an abort or an optional recovery procedure (corresponds to SECS value 9)10Stopped - Final state for those jobs that have been in the Stopping State (corresponds to SECS value 10)11Aborted - Final state for those jobs that have been in the Aborting State (corresponds to SECS value 11)ProcessingCtrlSpecFormatUI10Processed - Processing Completed Successfully1Failed - Processing FailedRecVariableListFormatSlotStatusListFormatUI10Undefined - The state of the slot is not known (corresponds to SECS value 0)1Empty - The slot is empty (corresponds to SECS value 1)2NotEmpty - The slot is not empty (may be correctly or incorrectly occupied) (corresponds to SECS value 2)3CorrectlyOccupied - The slot has a properly positioned substrate (corresponds to SECS value 3)4DoubleSlotted - The slot has more than one substrate present (corresponds to SECS value 4)5CrossSlotted - The slot is cross slotted with another slot in the carrier (corresponds to SECS value 5)SubstHistoryFormatSubstHistoryListFormatSubstIDStatusListFormatUI10NotConfirmed - The substrate identifier has not been confirmed (corresponds to SECS value 0)1WaitingForHost - Substrate ID could not be identified by the reader, was discovered to be at a wrong source location, or no matching ID in the source set (corresponds to SECS value 1)2Confirmed - Substrate ID has been confirmed by the equipment or the host after it was read (corresponds to SECS value 2)3ConfirmationFailed - Host decides to cancel the substrate (corresponds to SECS value 3)MaterialStatusListFormatUI10Processed - Processing Completed Successfully1Failed - Processing FailedSubstTypeListFormatUI10Wafer (corresponds to SECS value 0)1Flat Panel (corresponds to SECS value 1)2CD (corresponds to SECS value 2)3Mask (corresponds to SECS value 3)SubstProcStateListFormatUI10NeedsProcessing - Processing in the equipment is required and has not started (corresponds to SECS value 0)1InProcess - Processing has started (corresponds to SECS value 1)2Processed - Processing has completed normally (corresponds to SECS value 2)3Aborted - Processing has terminated abnormally (corresponds to SECS value 3)4Stopped - Processing has terminated at completion of a certain processing step (corresponds to SECS value 4)5Rejected - Substrate has been identified as needing special treatment (corresponds to SECS value 5)6Lost - Substrate has been removed from the equipment by an external agent or it is physically missing (corresponds to SECS value 6)7Skipped - Substrate was not processed (corresponds to SECS value 7)SubstStateListFormatUI10AtSource - Substrate is at the original location it was received (corresponds to SECS value 0)1AtWork - Substrate has been taken from the original substrate location, and is traveling on intermediate equipment substrate locations (corresponds to SECS value 1)2AtDestination - Substrate has been placed at its designated destination substrate location (corresponds to SECS value 2)SubstUsageListFormatUI10Product - Substrate contains product being created by the facility (corresponds to SECS value 0)1Test - Substrate used for testing processes (corresponds to SECS value 1)2Filler - Substrate used to fill open positions (corresponds to SECS value 2)String80ListUnsignedInteger54List
Establishes if the equipment is on line.
Data signifying that the equipment is alive.
A request to the equipment to report selected values of its status.
A zero length list means report all SVIDs
The equipment reports the value of each SVID requested in the order requested. The host remembers the names of value requested.
A zero length list item for SVi means that SVIDi does not exist. A request to the equipment to identify certain status variables.A zero length means report all SVIDs.The equipment reports to the host the name and units of the requested SVs.Zero-length ASCII items for both SVNAMEi and UNITSi indicates that the SVID does not exist.
The purpose of this message is to provide a formal means of initializing communications at a logical application level both on power-up and following a break in communications. It should be the following any period where host and Equipment SECS applications are unable to communicate. An attempt to send an Establish Communications Request (S1,F13) should be repeated at programmable intervals until an Establish Communications Acknowledge (S1,F14) is received within the transaction timeout period with an acknowledgement code accepting the establishment.
BIN0Accepted1Denied, Try Again
The host requests that the equipment transition to the OFF-LINE state.
Acknowledge or error.
BIN0OFF-LINE Acknowledge
The host requests that the equipment transition to the ON-LINE state.
Acknowledge or error.
BIN0ON-LINE Accepted1ON-LINE Not Allowed2Equipment Already ON-LINEA request from the host to the machine to report the name and units of certain data variables, in the order requested. A zero-length list means report all DVIDZero-length ASCII items for both DVVALNAME and UNITS indicates that VID doesn’t exist or is not the identifier of a DVVAL class variable.A request from the host to the machine to report the name and the list of associated data variables for certain collection events, in the order requested.A zero-length list means report all CEIDsWhen both CENAME and the list of associated VIDs are zero-length items, this indicates the CEID does not exist.Constants such as for calibration, servo gain, alarm limits, data collection mode, and other values that are changed infrequently can be obtained using this message.A zero-length list (structure1) or item (structure2) means report all ECVs according to a predefined order.Change one or more equipment constants.Acknowledge or error if EAC contains a non-zero error code, the equipment should not change any of the ECIDs specified in S2F15.BIN0Acknowledge1Denied. At least one constant does not exist2Denied. Busy3Denied. At least one constant out of rangeUseful to check equipment time base or for equipment to synchronize with the host time base.Actual time dataA zero-length item means no time exists.
Status variables exist at all times. This function provides a way to sample a subset of those status variables as a function of time. The trace data is returned on S6,F1 and is related to the original request by the TRID Multiple trace requests may be made to that equipment allowing it. If equipment receives S2,F23 with the same TRID as a trace function that is currently in progress, the equipment should terminate the old trace and then initiate the new trace. A trace function currently in progress may be terminated by S2,F23 with TRID of that trace and TOTSMP = 0.
If S2,F23 is multi-block, it must be preceded by the S2,F39/S2,F40 Inquire/Grant transaction. Some equipment may support only single-Block S6,F1, and may refuse a S2,F23 message which would cause a multi-block S6,F1.
Each equipment shall document its trace performance limits. The Host Computer shall not send an S2,F23 which exceeds the equipment’s performance limits, or the equipment may operate incorrectly.
Acknowledge or errorBIN0Everything correct1Too many SVIDs2No more traces allowed3Invalid period4Unknown SVID specified5Invalid REPGSZThis function allows the host to retrieve basic information about what equipment constants are available in the equipment.A zero-length list means send information for all ECIDs.Data ResponseZero-length ASCII items for ECNAMEi, ECMINi, ECMAXi, ECDEFi, and UNITSi indicates that the ECID does not exist.Useful to synchronize the equipment time with the host time base.Acknowledge the receipt of time and date.BIN0OK1ERROR. not done
The purpose of this message is for the host to define a group of reports for the equipment.
The type of report to be transmitted is designated by a Boolean “Equipment Constant.” An “Equipment Constant Value” of “False” means that an “Event Report” (S6,F11) will be sent, and a value of “True” means that an “Annotated Event Report” (S6,F13) will be sent. If S2,F33 is Multi-block, it must be preceded by the S2,F39/S2,F40 Inquire/Grant transaction.
1. A list of zero-length following <DATAID> deletes all report definitions and associated links. See S2,F35 (Link Event/Report).
2. A list of zero-length following <RPTID> deletes report type RPTID. All CEID links to this RPTID are also deleted.
Acknowledge or error if an error condition is detected the entire message is rejected (i.e., partial changes are not allowed).BIN0Accept1Denied. Insufficient space2Denied. Invalid format3Denied. At least one RPTID already defined4Denied. At least VID does not exist
The purpose of this message is for the host to link n reports to an event (CEID). These linked event reports will default to ‘disabled’ upon linking. That is, the occurrence of an event would not cause the report to be sent until enabled. See S2,F37 for enabling reports.
If S2,F35 is Multi-block, it must be preceded by the S2,F39/S2,F40 Inquire/Grant transaction.
A list of zero length following CEID deletes all report links to that event.Acknowledge or error If an error condition is detected the entire message is rejected (i.e., partial changes are not allowed).BIN0Accept1Denied. Insufficient space2Denied. Invalid format3Denied. At least one CEID link already defined4Denied. At least one CEID does not exist4Denied. At least one RPTID does not existThe purpose of this message is for the host to enable or disable reporting for a group of events (CEIDs).A list of zero length following <CEED> means all CEIDs.Acknowledge or error if an error condition is detected the entire message is rejected, i.e., partial changes are not allowed.BIN0Accept1Denied. At least one CEID does not existIf a S2,F23, S2,F33, S2,F35, S2,F45, or S2,F49 message is more than one block, this transaction must precede the message.Grant permission to send multi-block message.BIN0Permission1Busy. Try Again2No Space Available3Duplicate DATAIDThe Host requests the Equipment perform the specified remote command with the associated parameters.Acknowledge Host command or error. If command is not accepted due to one or more invalid parameters (i.e., HCACK = 3),
then a list of invalid parameters will be returned containing the parameter name and reason for being invalid.BIN0Acknowledge, command has been performed1Command does not exist2Cannot perform now3At least one parameter is invalid4Acknowledge, command will be performed with completion signaled later by an event5Rejected, Already in Desired Condition6No such object existsBIN1Parameter Name (CPNAME) does not exist2Illegal Value specified for CPVAL3Illegal Format specified for CPVALThis message allows the host to select specific streams and functions to be spooled whenever spooling is active.
1. A zero-length list, m = 0, turns off spooling for all streams and functions.
2. A zero-length list, n = 0, turns on spooling for all functions for the associated stream.
Notes:
1. Turning off spooling for all functions for a specific stream is achieved by omitting reference to the stream from this message.
2. Spooling for Stream 1 is not allowed.
3. Equipment must allow host to spool all primary messages for a stream (except Stream 1).
4. A defined list of functions for a stream in this message will replace any previously selected functions.
Acknowledge or errorBIN0Acknowledge, spooling setup accepted1Spooling setup rejected
1. If RSPACK = 0, a zero-length list, m = 0, is given, indicating no streams or functions in error.
2. A zero-length list, n = 0, indicates no functions in error for specified stream.
1. A zero-length list, m = 0, sets all limit values for all monitored VIDs to “undefined.”
2. A zero-length list, n = 0, sets all limits values for that VID to “undefined.”
3. A zero-length list, p = 0, sets that limit to “undefined.”
BIN0Acknowledge, command will be performed1Limit attribute definition error2Cannot perform nowBIN1Variable does not exist2Variable has no limits capability3Variable repeated in message4Limit value error as described in LIMITACKBIN1LIMITID does not exist2UPPERDB > LIMITMAX3LOWERDB < LIMITMIN4UPPERDB < LOWERDB5Illegal format specified for UPPERDB or LOWERDB6ASCII value cannot be translated to numeric7Duplicate limit definition for this variable
1. A zero-length list, m = 0 indicates no invalid variable limit attributes.
2. A zero-length list, n = 0 indicates no invalid limit values for that VID.
This message allows the host to query the equipment for current variable limit attribute definitions.A zero-length list, m = 0, requests a list of all VID values that can have variable limit attributes.Equipment sends values of requested variable limit attribute definitions in the order requested.
1. A zero-length list, p = 0, indicates that limits are not supported for the VID.
2. A zero-length list, n = 0, means no limits are currently defined for the specified variable.
The host requests an object to perform the specified remote command with its associated parameters.
If multi-block, it shall be preceded by the S2,F39/S2,F40 Multi-Block Inquire/Grant transaction.
If a specific value of CPNAME is defined to have a CEPVAL defined as a LIST, it shall always be a LIST.
If the CEPVAL that is associated to that specific value of CPNAME is defined to be anything other than LIST, it will result in a format error.
A zero length list, m = 0, indicates that no parameter groups are sent with the command. OBJSPEC can be a null length item.
Notes:
1. If CEPVAL is a LIST, the items that make up that list shall take on one of the following forms: (1) a list of items with an identical format, (2) a LIST of CPNAME, CEPVAL pairs
BIN0Acknowledge, command has been performed1Command does not exist2Cannot perform now3At least one parameter is invalid4Acknowledge, command will be performed with completion signaled later by an event5Rejected, Already in Desired Condition6No such object existsBIN0No error1Parameter name (CPNAME) does not exist2Illegal value specified for CEPVAL3Illegal format specified for CEPVAL4Parameter name (CPNAME) not valid as usedThis message will change the state of the enable bit in the equipment. The enable bit determines if the alarm will be sent to the host.
Alarms which are not controllable in this way are unaffected by this message.A zero-length item for ALID means all alarms.Acknowledge or errorBIN0AcceptedThis message requests the equipment to send binary and analog alarm information to the host.A zero-length item means send all possible alarms regardless of the state of ALED.This message contains the alarm data known to the equipment. There are “m” alarms in the list.If m = 0, no response can be made. A zero-length item returned for ALCDi or ALTXi means that value does not exist.List alarms which are enabled.This message is similar to S5,F6 except that it lists only alarms which are enabled.The purpose of this message is for the host to request a defined report from the equipment.Equipment sends variable data defined for the given RPTID to the host.The purpose of this message is for the host to request transmission or deletion of the messages currently spooled by the equipment.The purpose of this message is to acknowledge the receipt of the Request Spooled Data (S6,F23) and to respond with an appropriate acknowledge code.BIN0OK1Denied, busy try later2Denied, spooled data does not existThis message is used by the host to request the equipment to delete process programs from equipment storage.If n = 0, then delete all.Acknowledge or errorBIN0Accepted1Permission not granted2Length error3Matrix overflow4PPID not found5Mode unsupported6Command will be performed with completion signaled laterThis message is used to request the transmission of the current equipment process program directory (EPPD).
This is a list of all the PPIDs of the process programs stored in the equipment.This message is used to transmit the current EPPD.Data to be displayed.Acknowledge or errorBIN0Accepted for display1Message will not be displayed2Terminal not availableData to be displayed on the equipment’s terminal.Acknowledge or errorBIN0Accepted for display1Message will not be displayed2Terminal not available
Establishes if the equipment is on line.
Data signifying that the equipment is alive.
The purpose of this message is to provide a formal means of initializing communications at a logical application level both on power-up and following a break in communications. It should be the following any period where host and Equipment SECS applications are unable to communicate. An attempt to send an Establish Communications Request (S1,F13) should be repeated at programmable intervals until an Establish Communications Acknowledge (S1,F14) is received within the transaction timeout period with an acknowledgement code accepting the establishment.
BIN0Accepted1Denied, Try Again
This message reports a change in or presence of an alarm condition. One message will be issued when the alarm is set
and one message will be issued when the alarm is cleared. Irrecoverable errors and attention flags may not have a corresponding
clear message.
Acknowledge or errorBIN0Accepted
This function sends samples to the host according to the trace setup done by S2,F23. Trace is a time-driven form of equipment status.
Even if S6,F1 is multi-block, it is not preceded by an Inquire/Grant transaction, because the Host S2,F23 is an implicit grant.
Some equipment may support only single-block S6,F1, and may refuse an S2,F23 (Trace Initiate Send) message which would cause a multi-block S6,F1.
A zero-length STIME means no value is given and that the time is to be derived from SMPLN along with knowledge of the request.Acknowledge or errorBIN0AcceptedIf the discrete data report S6F3, F9, F11, F13 can involve more than one block, this transaction must precede the transmission.Grant permission to sendBIN0Permission granted1Busy, try again2Not interested
The purpose of this message is for the equipment to send a defined, linked, and enabled group of reports to the host upon the occurrence of an event (CEID).
If S6,F11 is Multi-block, it must be preceded by the S6,F5/S6,F6 Inquire/Grant transaction.
If there are no reports linked to the event a ‘null’ report is assumed. A zero-length list for # of reports
means there are no reports linked to the given CEID.Acknowledge or errorBIN0AcceptedThe device ID in the message block header did not correspond to any known device ID in the node detecting the error.The equipment does not recognize the stream type in the message block header.This message indicates that the function in the message ID is not recognized by the receiver.
This message indicates that the stream and function were recognized, but the message format was incorrect. This message may be used to indicate that a message received by the equipment did not conform to § 10.3.1.3 “Compliance to Message Definitions” or that data within the received message was not an allowed data type.
If the Message Definition allows for multiple formats for items or for multiple data types, this message may be used to indicate that the equipment does not support a format or type that was used in the instance of the message. Equipment suppliers are encouraged to document which data formats and data types are supported when multiple formats or types are allowed for items within a message.
Similarly, if the message for a custom stream and function is not formatted according to the rules in § 10.3.1.3 for the Message Definition provided by the equipment supplier, this message may be used to indicate the message format was incorrect.
This message indicates that a transaction (receive) timer has timed out and that the corresponding transaction
has been aborted. It is up to the host to respond to this error in an appropriate manner to keep the system operational.This message to the host indicates that the equipment has been sent more data than it can handle.Data were expected but none were received within a reasonable length of time. Resources have been cleared.A terminal text message to the host.Acknowledge or errorBIN0Accepted for display1Message will not be displayed2Terminal not availableAn error message from a terminal that cannot handle a multi-block message from S10,F5.This message is used to initiate the transfer of a process program or to select from stored programs. The
message may be used to initiate the transfer of an unformatted process program (S7,F3/S7,F4) or a formatted process
program (S7,F23/S7,F24), (S7,F31/S7,F32).This message gives permission for the process program to be loaded.BIN0OK1Already have2No space3Invalid PPID4Busy, try later5Will not acceptThe program is sent. If S7,F3 is multi-block, it must be preceded by the S7,F1/S7,F2 Inquire/Grant transaction.Acknowledge or errorBIN0Accepted1Permission not granted2Length error3Matrix overflow4PPID not found5Mode unsupported6Command will be performed with completion signaled laterThis message is used to request the transfer of a process program.This message is used to transfer a process program.A zero-length list means request denied.PPSELECTPPIDThe recipe must exist already on the equipment. Select a recipe for execution. STARTInitiate recipe execution. STOPStop recipe execution. PAUSEPause recipe execution. RESUMEResume previously paused recipe execution. ABORTAbort recipe execution. HOMERobot1Robot2Home the specified robot. Generic Module for Communication and Control of Manufacturing EquipmentE30-0611Fundamental RequirementsState ModelstrueYesEquipment Processing StatestrueYesHost-Initiated S1,F13/F14 ScenariotrueYesEvent NotificationtrueYesOn-Line IdentificationtrueYesError MessagestrueYesDocumentationtrueYesControl (Operator Initiated)trueYesAdditional CapabilitiesEstablish CommunicationstrueYesDynamic Event Report ConfigurationtrueYesVariable Data CollectiontrueYesTrace Data CollectiontrueYesStatus Data CollectiontrueYesAlarm ManagementtrueYesRemote ControltrueYesEquipment ConstantstrueYesProcess Recipe Management: Process ProgramstrueYesProcess Recipe Management: E42 RecipesfalseNAProcess Recipe Management: E139 RecipesfalseNAMaterial MovementtrueYesEquipment Terminal ServicestrueYesClocktrueYesLimits MonitoringtrueYesSpoolingtrueYesControl (Host-Initiated)trueYestrue87001PortInformation714279217135true20841011TransArm300VacuumChuck2HotChuck3NuSpinVacuumChuck4SubstrateReaderChuck1TransArm300VacuumChuckEFEMLoadport2LoadPort1EFEMLoadport3HotPlateProduction4Hotplate-ComponentAProduction5Hotplate-ComponentBProduction1HotPlate2Coater3ProcessModule1LoadPort1LoadLoadPort1FIMS2LoadPort2LoadLoadPort2FIMS