SEMI International Standards
Standards Locale: Japan
Committee: Gases and Facilities
Place of Meeting: SEMI Japan/ OVTCCM (Hybrid)
Date of Meeting: 05/29/2026
Meeting End Date: 05/29/2026
Recording SEMI Standards Staff: Akiko Yoshida
CER Posted to Web: 06/05/2026
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| 7297A | Revision to SEMI E137-0705 (Reapproved 0118)E, GUIDE FOR FINAL ASSEMBLY, PACKAGING, TRANSPORTATION, UNPACKING, AND RELOCATION OF SEMICONDUCTOR MANUFACTURING EQUIPMENT | Passed with one Editorial Change |  7297A_Ballot Review.pdf |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| 7297A | Ballot Authorization for Cycle 3 or 4 | E137 Revision Task Force | Revision to E137-0705 (Reapproved 0118), Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment
- Approved by the GCS on January 30, 2026 |
Authorized Activities
# | Type | SC/TF/WG | Details |
 | SNARF | 5-Year-Review Task Force | Line Item Revision to SEMI F44-0325, Specification for Machined Stainless Steel Weld Fittings |
Authorized Ballots
# | When | TF | Details |
| Cycle 6 | F1 Revision Task Force | Reapproval of SEMI F1-0521, Specification for Leak Integrity of High Purity Gas Piping Systems and Components |
| Cycle 6 or 7 | 5-Year-Review Task Force | Line Item Revision to SEMI F44-0325, Specification for Machined Stainless Steel Weld Fittings |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is scheduled for the week of December 9-11, 2026, in conjunction with SEMICON Japan 2026. Schedule details TBD.
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