SEMI International Standards
Standards Locale: North America
Committee: Liquid Chemicals
Place of Meeting: OVTCCM
Date of Meeting: 02/10/2026
Meeting End Date: 02/11/2026
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 02/23/2026
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| 7086A | Revision to SEMI F61–0521, Guide for Design and Operation of a Semiconductor Ultrapure Water System, with title change to: Guide for Design, Construction, Installation, and Operation of a Semiconductor Ultrapure Water System | Passed, with technical changes and with or without editorial changes; Ratification Ballot to be issued. |  7086A_ProceduralReview_v2.pdf |
#1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
#2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| 7367 | forwarded to the ISC A&R SC for procedural review | Chemical Mechanical Planarization Consumables (CMP-C) TF | New Auxiliary Document: Using Machine Learning Image Processing Algorithms to Characterize Multimodal Particle Size Distributions of Chemical Mechanical Planarization Slurries
– Approved by GCS on 10/23/2025 |
Authorized Activities
None.
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
Standard Designation | Title |
| SEMI C10-1109 (Reapproved 1114) | Guide for Determination of Method Detection Limits |
#1: Inactive, adj. — Status of a Standard or Safety Guideline that is not currently supported by the GTC. [Regulations ¶ 4.2.19]
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next SEMI Standards NA Meetings are tentatively scheduled for the week of May 11-14, 2026, to be held in-person and virtual in conjunction with ASMC in Albany, New York. Schedule details TBD. https://www.semi.org/en/products-services/standards.
Tentative Schedule:
Task Forces will continue to meet on their weekly/bi-weekly cadence. Subject to change.
· Monday, May 11
· Tuesday, May 12
o 13:00-16:00, Liquid Chemicals NA TC Chapter Meeting (Day 1)
· Wednesday, May 13 (tentative)
o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting (Day 2)
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