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SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: OVTCCM
Date of Meeting: 02/12/2026
Meeting End Date: 02/12/2026
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 02/18/2026
Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
EHS NA TC Chapter
  • Lucian Girlea (Nikon Precision) Vice-Chair, Co-Chair (pending RSC confirmation)
  • Eric Sklar (Safety Guru) Vice-Chair, Co-Chair (pending RSC confirmation)


TC Chapter Structure Changes
None.

Ballot Results

Document #
Document Title
TC Chapter Action
A&R Forms for Approved Ballots
7134CRevision to SEMI S8-0218, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment Failed and returned to TF for rework and reballot
7371ALine Item Revisions to SEMI S1-0824, Safety Guideline for Equipment Safety Labels7371A_LI_A+Rform_es26feb12b.pdf7371A_LI_A+Rform_es26feb12b.pdf
Line Item 1 - Addition, to EXCEPTION 2 to ¶7.1Passed as balloted
Line Item 2 - Addition to §10.2 of a minimum size criterion for symbols.Failed and returned to TF for rework and reballot
Line Item 3 - Addition, to Table A1-1, of a finger pinch symbol and an entrapment symbol. Symbols will be renumbered, serially, during publication Passed as balloted
Line Item 4 - Addition, to Table A1-1, of a shear symbolPassed as balloted
7411Line Item Revision of SEMI S30-0824 Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes
Line Item 1 - Revision of §15Failed and returned to TF for rework and reballot


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
7445SNARFFire Protection TFLine Item Revision to SEMI S2-0724 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Revisions of Fire Protection Portion (§14)
7446SNARFFire Protection TFLine Item Revision to SEMI S14-0521 - Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment (Fire Protection)
7444SNARFEHS CommitteeReapproval of SEMI S5-1121 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases


Authorized Ballots

#
When
TF
Details
7134DCycle 3 or 4 of 2026Ergonomics TFRevision to SEMI S8-0218, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
7371BCycle 3 or 4 of 2026S1 Revision TFLine-Item Revisions to SEMI S1-0824, Safety Guideline for Equipment Safety Labels
7372Cycle 3 or 4 of 2026S23 Global TFLine-Item Revision to SEMI S23-1021E2, Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment
7445Cycle 3 or 4 of 2026Fire Protection TFLine Item Revision to SEMI S2-0724 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Revisions of Fire Protection Portion (§14)
7446Cycle 3 or 4 of 2026Fire Protection TFLine Item Revision to SEMI S14-0521 - Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment (Fire Protection)
7444Cycle 3 or 4 of 2026EHS CommitteeReapproval of SEMI S5-1121 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases


SNARF(s) Granted a One-Year Extension

#
TF
Title
Expiration Date
7021S2/S22 Task ForceLine Items Revisions of S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment April 2027


SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
May 14, 2026 8 AM - 5:00 PM Eastern Time, Albany Hilton New York in conjunction with the ASMC event. For the latest update information, please refer to www.semi.org/standards








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