SEMI International Standards
Standards Locale: North America
Committee: Metrics
Place of Meeting: Hilton Albany, Albany, NY
Date of Meeting: 05/14/2026
Meeting End Date: 05/14/2026
Recording SEMI Standards Staff: Michelle Sun
CER Posted to Web: 05/20/2026
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| TBD | SNARF | CCC TF | Revision of SEMI E180-1220: Test Method for Measuring Surface Metal Contamination Through ICP-MS of Critical Chamber Components Used in Semiconductor Wafer Processing |
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
| 7167 | CCC TF | New Standard: Test Method for Measuring and Characterizing Surface Particle Contamination on Critical Chamber Components with Airborne Particle Counter and Dry Aerosolizing Chamber | 5/14/2027 |
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
The next meeting is tentatively scheduled for October 15, 2026, from 1:00-3:00 PM Pacific Time. See http://www.semi.org/standards-events for the current list of events.
Next Meeting
None.
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