SEMI International Standards
Standards Locale: North America
Committee: Information & Control
Place of Meeting: Hilton Albany, Albany, NY
Date of Meeting: 05/13/2026
Meeting End Date: 05/13/2026
Recording SEMI Standards Staff: Michelle Sun
CER Posted to Web: 05/27/2026
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| 7345B | Line Item Revision to SEMI E90-0624 - Specification for Substrate Tracking and SEMI E90.1-0624 - Specification for SECS-II Protocol Substrate Tracking |  | |
| LI-1 | Report Batch Loading and Unloading | Failed | |
| 7380A | Line Item Revision to SEMI E142-0225 - Specification for Substrate Mapping,
SEMI E142.1-0225 — Specification for XML Schema for Substrate Mapping,
SEMI E142.2-1016 (0225) — Specification for SECS II Protocol for Substrate Mapping,
SEMI E142.3-1016 (0225) — Specification for Web Services for Substrate Mapping,
SEMI E142.4-1022 (0225) — Specification for SECS II Protocol for Substrate Mapping Using Item Transfer | |  Ballot Report - 7380A.pdf |
| LI-1 | Add Well-Known Names and clarify SEMI E142.4’s E142SubstrateMapDataReady collection event | Failed | |
| LI-2 | Address issues raised by TF members | Passed | |
| 7419A | Line-Item Revision to
SEMI E120-1225 Specification for the Common Equipment Model (CEM),
SEMI E120.2-1225 Specification for Protocol Buffers for Common Equipment Model (CEM),
SEMI E125-1225 Specification for Equipment Self Description (EqSD),
SEMI E125.2-1225 Specification for Protocol Buffers for Equipment Self Description (EqSD),
SEMI E132-1225 Specification for Equipment Client Authentication and Authorization,
SEMI E132.2-1225 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA),
SEMI E134-1225 Specification for Data Collection Management,
SEMI E134.2-1225 Specification for Protocol Buffers of Data Collection Management, and
SEMI E179-1225 Specification for Protocol Buffers Common Components | |  Ballot Report - 7419A.pdf |
| LI-1 | Clarify StateMachineInstance usage | Passed | |
| LI-2 | Update issues raised by TF members | Passed, Ratification Ballot to Be Issued | |
| 7420A | Line-Item Revision to SEMI E190.1-1124 – Specification for Common Data for Etch Components | |  Ballot Report - 7420A.pdf |
| LI-1 | Add Level 2 and 3 categories of etch information; and expand Definitions section to cover any new terms introduced in these categories | Passed | |
| LI-2 | Add Related Information section to explain etch processing theory of operation | Passed | |
| 7427 | Line-Item Revision to SEMI E172-0725 Specification for SECS Equipment Data Dictionary (SEDD) | |  Ballot Report - 7427.pdf |
| LI-1 | Restrict WellKnownName field usage and add new CustomDescriptor field | Passed, Ratification Ballot to Be Issued | |
| LI-2 | Update issues raised by TF members | Passed | |
| 7447 | Line-Item Revision to SEMI E40-0324 Specification for Processing Management | |  Ballot Report - 7447.pdf |
| LI-1 | Address issues with Well-Known Names | Passed | |
| 7422A | Revision to
SEMI E164-1224 Specification for EDA Common Metadata
And To Add New Subordinate Standards
Specification for GEM Common EDA Metadata,
Specification for Process Job Management GEM Common EDA Metadata, and
Specification for Carrier Management Services Common EDA Metadata
to SEMI E164-1224 Specification for EDA Common Metadata | Failed | |
| 7428A | Revision to Add a New Subordinate Standard:
Specification for Secure High-Speed SECS Message Service (Secure-HSMS) to
SEMI E37-0222 Specification for High-Speed SECS Message Services (HSMS) Generic Services | Failed | |
| 7451 | Reapproval of SEMI E54.11-0316 (Reapproved 0721) Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices | Failed, to be discontinued | |
| 7452 | Reapproval of SEMI E54.3-0698 (Reapproved 0721) Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device | Failed, to be discontinued | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| 7465 | SNARF | Digital Twins TF | New Standard: Specification for Digital Twins in Manufacturing |
| 7456 | SNARF | EDP TF | Revision to Add a New Subordinate Standard: Specification for Common Data for Deposition Components to Specification for Equipment Data Publication |
| 7457 | SNARF | EDP TF | Revision to Add a New Subordinate Standard: Specification for Common Data for Ion Implant Components to Specification for Equipment Data Publication |
Authorized Activities
None.
Authorized Ballots
# | When | TF | Details |
| R7419A | Cycle 5-2026 | DDA TF | Line-Item Revision to
SEMI E120-1225 Specification for the Common Equipment Model (CEM),
SEMI E120.2-1225 Specification for Protocol Buffers for Common Equipment Model (CEM), SEMI E125-1225 Specification for Equipment Self Description (EqSD),
SEMI E125.2-1225 Specification for Protocol Buffers for Equipment Self Description (EqSD), SEMI E132-1225 Specification for Equipment Client Authentication and Authorization, SEMI E132.2-1225 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA),
SEMI E134-1225 Specification for Data Collection Management,
SEMI E134.2-1225 Specification for Protocol Buffers of Data Collection Management, and SEMI E179-1225 Specification for Protocol Buffers Common Components |
| R7427 | Cycle 5-2026 | GEM300 TF | Line-Item Revision to SEMI E172-0725 Specification for SECS Equipment Data Dictionary (SEDD) |
| 7422B | Cycle 7-2026 | DDA TF | Revision to SEMI E164-1224 Specification for EDA Common Metadata
And To Add New Subordinate Standards
Specification for GEM Common EDA Metadata,
Specification for Process Job Management GEM Common EDA Metadata, and
Specification for Carrier Management Services Common EDA Metadata
to SEMI E164-1224 Specification for EDA Common Metadata |
| 7380B | Cycle 7-2026 | ABFI TF | Line Item Revision to SEMI E142-0225 - Specification for Substrate Mapping,
SEMI E142.1-0225 — Specification for XML Schema for Substrate Mapping,
SEMI E142.2-1016 (0225) — Specification for SECS II Protocol for Substrate Mapping,
SEMI E142.3-1016 (0225) — Specification for Web Services for Substrate Mapping,
SEMI E142.4-1022 (0225) — Specification for SECS II Protocol for Substrate Mapping Using Item Transfer |
| 7381 | Cycle 7-2026 | ABFI TF | Revision to Add a New Subordinate Standard: Specification for Transforming Non-E142 XY Coordinates to SEMI E142-0125: Specification for Substrate Mapping |
| 7345C | Cycle 7-2026 | GEM300 TF | Line-Item Revision to SEMI E90-0624 - Specification for Substrate Tracking and SEMI E90.1-0624 - Specification for SECS-II Protocol Substrate Tracking |
| 7428B | Cycle 7-2026 | GEM300 TF | Revision to Add a New Subordinate Standard:
Specification for Secure High-Speed SECS Message Service (Secure-HSMS) to
SEMI E37-0222 Specification for High-Speed SECS Message Services (HSMS) Generic Services |
| TBD | Cycle 7-2026 | GEM300 TF | Line-Item Revision to
SEMI E40-0226: Specification for Processing Management and
SEMI E40.1-0226: Specification for SECS-II Protocol for Processing Management |
| TBD | Cycle 7-2026 | GEM300 TF | Line-Item Revision to E5-0725, Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
E30-0725, Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) |
| TBD | Cycle 7-2026 | GEM300 TF | Line-Item Revision to
SEMI E87-0225: Specification for Carrier Management (CMS),
SEMI E87.1-0225: Specification for SECS-II Protocol for Carrier Management (CMS) SEMI E172-0725: Specification for SECS Equipment Data Dictionary (SEDD) |
| 7426 | Cycle 7-2026 | CDS TF | Line-Item Revision to SEMI E191-1024 Specification for Computing Device Cybersecurity Status Reporting, and SEMI E191.1-1024 Specification for SECS-II Protocol for Computing Device Cybersecurity Status Reporting |
| TBD | Cycle 7-2026 | GUI TF | Revision to SEMI E95-MMYY, Specification for Human Interface for Semiconductor Manufacturing Equipment |
| 7465 | Cycle 7-2026 | Digital Twins TF | New Standard: Specification for Digital Twins in Manufacturing |
| TBD | Cycle 7-2026 | Sensor Bus | Revision to SEMI E54.3-0698 (Reapproved 0721) - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device |
| TBD | Cycle 7-2026 | Sensor Bus | Revision to SEMI E54.11-0316 (Reapproved 0721) - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices |
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
| 7179 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Generic Model for Communication and Control of Manufacturing Equipment (GEM) to SEMI E164-0414 (Reapproved 0721), Specification for EDA Common Metadata | 5/13/2027 |
| 7180 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Processing Management to SEMI E164-0414 (Reapproved 0721), Specification for EDA Common Metadata | 5/13/2027 |
| 7181 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Carrier Management (CMS) to SEMI E164-0414 (0721), Specification for EDA Common Metadata | 5/13/2027 |
| 7182 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Substrate Tracking to SEMI E164-0414 (0721), Specification for EDA Common Metadata | 5/13/2027 |
| 7183 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Substrate Tracking to SEMI E164-0414 (0721), Specification for EDA Common Metadata | 5/13/2027 |
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for October 14, 2026, from 9:00-12:00, 1:00-4:00 PM Pacific Time. See http://www.semi.org/standards-events for the current list of events.
Monday, October 12, 2026
- 9:00-10:00 – NA I&C Leadership Meeting
- 10:00-11:00 – ABFI Task Force
- 11:00-12:00 – ESEC Task Force
- 13:00-16:00 – GEM300 Task Force
- 16:00-18:00 – Digital Twin (& PCS) Task Force
Tuesday, October 13, 2026
- 8:00-10:00 – GUI Task Force
- 10:00-12:00 – EDP Task Force
- 13:00-16:00 – DDA Task Force
- 16:00-17:30 – CDS Task Force
- 17:30-18:00 – Sensor Bus Task Force
Wednesday, October 14, 2026
- 9:00-12:00 – NA I&C TC Chapter
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