Document #	Document Title	TC Chapter Action#1,2	A&R Forms for Approved Ballots
6315C	Revision to SEMI C30-0218, Specification for Hydrogen Peroxide, with title change to: Specification and Guide for Hydrogen Peroxide	Passed, with technical changes and with or without editorial changes; Ratification Ballot to be issued.	6315C_ProceduralReview.pdf
6388B	Revision to SEMI C44-0618, Specification and Guide for Sulfuric Acid	Passed, with technical changes and with or without editorial changes; Ratification Ballot to be issued.	6388B_ProceduralReview.pdf
6715A	New Standard: Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water	Passed, with editorial changes.	6715A_ProceduralReview.pdf
6917	Revision to SEMI F39-0621, Guide for Chemical Blending Systems	Passed, with technical changes and with or without editorial changes; Ratification Ballot to be issued.	6917_ProceduralReview.pdf
6993	Line-Item Revision to SEMI F98-0521, Guide for Water Reuse in Semiconductor Industry	Passed, with editorial changes.	6993_ProceduralReview.pdf
7091	Revision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems, with title change to: Test Method and Specification for Testing of Perfluoroalkoxy (PFA) and Other Fluorinated Materials Used in Liquid Chemical Distribution Systems	Failed
SEMI C93	Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System (PCR)	Passed, submitted to ISC A&R SC for Procedural Review.	C93_ProceduralReview-PCR.pdf

#1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
#2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.

Ratification Ballot Results

Document #	Document Title	ISC A&R Action#1,2	A&R Forms
R6715	New Standard: Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water	Failed

#1: Passed Ratification ballots will be submitted to SEMI publication for final processing.
#2: Failed Ratification ballots were returned to the originating task forces for re-work and re-balloting or abandoning.

Activities Approved by the GCS between meetings of TC Chapter meeting

#	Type	SC/TF/WG	Details
7091	SNARF/ Ballot Authorization	High Purity Polymer Materials & Components TF	Revision to SEMI C90-1015, Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems, with title change to: Test Method and Specification for Testing of Perfluoroalkoxy (PFA) and Other Fluorinated Materials Used in Liquid Chemical Distribution Systems – Approved by GCS on 05/30/2023
6715A	SNARF/ Ballot Authorization	Ultra Pure Water TF	New Standard: Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water – Approved by GCS on 05/30/2023

Authorized Activities
Listing of all revised or new SNARF(s) and TFOF(s) approved by the Originating TC Chapter.

#	Type#1	SC/TF/WG	Details
7141	SNARF	Chemical Analytical Methods TF	Revision to SEMI C21-0618, Specification and Guide for Ammonium Hydroxide
7142	SNARF	Chemical Analytical Methods TF	Revision to SEMI C28-0618, Specification and Guide for Hydrofluoric Acid
7143	SNARF	Chemical Analytical Methods TF	Revision to SEMI C29-0618, Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v)
7144	SNARF	Chemical Analytical Methods TF	Revision to SEMI C35-0118, Specification and Guide for Nitric Acid
7145	SNARF	Chemical Analytical Methods TF	Revision to SEMI C40-1110 (Reapproved 0618), Specification for Potassium Hydroxide, 45% Solution
7146	SNARF	Chemical Analytical Methods TF	Revision to SEMI C41-0618, Specification and Guide for 2-Propanol
7147	SNARF	Chemical Analytical Methods TF	Revision to SEMI C45-0518, Specification and Guide for Tetraethylorthosilicate (TEOS)
7148	SNARF	Chemical Analytical Methods TF	Revision to SEMI C62-0309 (Reapproved 0618), Specification for Porogen Precursors Used in Low K CVD Processes
7149	SNARF	Chemical Analytical Methods TF	Revision to SEMI C63-1108 (Reapproved 0618), Specification for Organosilicate Precursors Used in Low K CVD Processes

#1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.

#	When	TF	Details
R6315C	Cycle 6-2023	Chemical Analytical Methods TF	Revision to SEMI C30-0218, Specification for Hydrogen Peroxide, with title change to: Specification and Guide for Hydrogen Peroxide
R6388B	Cycle 6-2023	Chemical Analytical Methods TF	Revision to SEMI C44-0618, Specification and Guide for Sulfuric Acid
R6917	Cycle 6-2023	High Purity Liquid Assemblies & Systems TF	Revision to SEMI F39-0621, Guide for Chemical Blending Systems
6828D	Cycle 6 or 7-2023	High Purity Liquid Assemblies & Systems TF	Revision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next meeting is tentatively scheduled for the week of November 6-9, in conjunction with SEMI Standards NA Fall Meetings 2023. Schedule details TBD. Please check www.semi.org/standards for updates.

Tentative Schedule:

o UPW TF (will not meet during the meeting set)

o Water Management TF (will not meet during the meeting set)

o High Purity Polymer Material & Components TF (will not meet during the meeting set)

· Monday

· Tuesday

o TBD, High Purity Liquid Assemblies & System TF

o TBD, Chemical Analytical Methods TF

o TBD, Chemical Mechanical Planarization Consumables TF

o TBD, Statistical Methods TF

o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting, Day 1

· Wednesday
o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting, Day 2