Document #	Document Title	ISC A&R Action	A&R Forms
R7086A	Revision to SEMI F61–0521, Guide for Design and Operation of a Semiconductor Ultrapure Water System, with title change to: Guide for Design, Construction, Installation, and Operation of a Semiconductor Ultrapure Water System	Passed	R7086A_ProceduralReview.pdf

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
Listing of all revised or new SNARF(s) and TFOF(s) approved by the Originating TC Chapter.

#	Type	SC/TF/WG	Details
XXXX	SNARF	Chemical Analytical Methods (CAM) TF	Revision to SEMI C98-1219, Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting Used in Semiconductor Manufacturing
XXXX	SNARF	Water Management TF	New Auxiliary Document: Evolution of Paths for Waste in Semiconductor Manufacturing

#1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.

#	When	TF	Details
7148	Cycle 6 or 7-2026	CAM TF	Revision to SEMI C62-0309 (Reapproved 0618), Specification for Porogen Precursors Used in Low K CVD Processes

SNARF(s) Granted a One-Year Extension

#	TF	Title	Expiration Date
6904	Chemical Mechanical Planarization Consumables (CMP-C) TF	New Standard: Guide for Reporting Performance Parameters of the Retaining Rings for Chemical Mechanical Planarization (CMP) used in Semiconductor Manufacturing	Spring 2027
6970	CMP-C TF	New Standard: Guide for Reporting Performance Parameters of Pressure Sensitive Adhesives (PSA) for Chemical Mechanical Planarization (CMP) Pads Used in Semiconductor Manufacturing	Spring 2027
7088	Ultra Pure Water (UPW) TF	Revision to SEMI F75-0521, Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing	Spring 2027
7146	CAM TF	Revision to SEMI C41-0618, Specification and Guide for 2-Propanol	Spring 2027
7148	CAM TF	Revision to SEMI C62-0309 (Reapproved 0618), Specification for Porogen Precursors Used in Low K CVD Processes	Spring 2027
7149	CAM TF	Revision to SEMI C63-1108 (Reapproved 0618), Specification for Organosilicate Precursors Used in Low K CVD Processes	Spring 2027

#1: If the Standards Document Development Project is found to be continuing, but cannot be completed within the current project
period, the TC Chapter may grant a one-year extension at a time, as many times as necessary. [Regulations § 8.3]

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
The SEMI Liquid Chemicals North America Technical Committee is putting together another workshop to be held in conjunction with the SEMI Standards meetings during Semicon West 2026 in San Francisco, CA.

If you are interested in participating in the workshop, please email Suhas Ketkar @ [email protected] or Laura Nguyen at [email protected] for more information.

Next Meeting

The next SEMI Standards NA Meetings are scheduled for the week of October 12-15, 2026, in conjunction with SEMICON West in San Francisco, CA. Schedule details TBD. https://www.semiconwest.org/.

Tentative Schedule:

Task Forces will continue to meet on their weekly/bi-weekly cadence. Subject to change.

· Monday, October 12
o (Open for meetings)

o ???, NA LChem Leadership Meeting

· Tuesday, October 13
o 9:00-10:30 HPP

o 13:00-16:00, Liquid Chemicals NA TC Chapter Meeting (Day 1)

· Wednesday, October 14 (tentative)
o 13:00-16:00 Liquid Chemicals NA TC Chapter Meeting (Day 2)
· Thursday, October 15
o 08:00-09:30 UPW Task Force (tentative)