SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: Hilton Albany, Albany, New York
Date of Meeting: 05/12/2026
Meeting End Date: 05/12/2026
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 05/26/2026
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all revised or new SNARF(s) and TFOF(s) approved by the Originating TC Chapter.
# | Type | SC/TF/WG | Details |
| Facilities |
| XXXX | SNARF | Manufacturing Equipment Installation (MEI) TF | Line-Item Revision to SEMI F122-0225, Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling |
| Gases |
| None |  | | |
#1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| Facilities |
| None | | | |
| Gases |
| 7308 | Cycle 7, 2026 | Heater Jacket TF | Revision to SEMI F109-0212, Guide for Heater Systems Requirements, with title change to: Guide for Design of Heater Jackets for Fluid Delivery and Exhaust |
| 7325 | Cycle 7, 2026 | Filters and Purifiers TF | Revision to SEMI F28-1103 (Reapproved 0815), Test Method for Measuring Particle Generation from Process Panels |
| 7326 | Cycle 7, 2026 | Filters and Purifiers TF | Revision to SEMI F43-0308 (Reapproved 0613), Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters |
| 7423 | Cycle 7, 2026 | Mass Flow Controllers TF | Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers |
| 7424 | Cycle 7, 2026 | Mass Flow Controllers TF | Revision to SEMI E66-0611 (Reapproved 0517), Test Method for Determining Particle Contribution by Mass Flow Controllers |
| 7459 | Cycle 7, 2026 | Gases Specification TF | Revision to SEMI F113-1116, Test Method for Pressure Transducers Used in Gas Delivery Systems |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next SEMI Standards NA Meetings are scheduled for the week of October 12-15, 2026, in conjunction with SEMICON West in San Francisco, CA. Schedule details TBD. https://www.semi.org/en/products-services/standards.
Task Forces typically meet on Monday, and the TC Chapter meets on Tuesday.
Tentative Schedule (Pacific)
· Monday, October 12
Gases
o 09:00-10:00, Materials of Construction of Gas Delivery Systems TF
o 10:00-11:00, Filters & Purifiers TF
o 11:00-12:00, Mass Flow Controller TF
o 13:00-14:00, Gases Specification TF
o 14:00-15:00, Heater Jacket TF
Facilities
o TBD SEMI F51 Revision TF
o 13:00-14:00, Voltage Sag Immunity TF
o 15:00-16:00, Manufacturing Equipment Installation TF
· Tuesday, October 13
9:00-12:00 Noon, Facilities & Gases NA TC Chapter
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