SEMI International Standards
Standards Locale: North America
Committee: Information & Control
Place of Meeting: Web Conference
Date of Meeting: 02/11/2026
Meeting End Date: 02/11/2026
Recording SEMI Standards Staff: Michelle Sun
CER Posted to Web: 02/23/2026
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| CDS Task Force | Ryan Bond (Intel) | Mike Tanori (Intel) |
TC Chapter Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action |
| 7345A | Line Item Revision to SEMI E90-0624 - Specification for Substrate Tracking and SEMI E90.1-0624 - Specification for SECS-II Protocol Substrate Tracking |  |
| LI-1 | Report Batch Loading and Unloading | Failed |
| LI-2 | Correct Well-Known Names | Passed as balloted |
| 7419 | Line-Item Revision to
SEMI E120-1225 Specification for the Common Equipment Model (CEM),
SEMI E120.2-1225 Specification for Protocol Buffers for Common Equipment Model (CEM),
SEMI E125-1225 Specification for Equipment Self Description (EqSD),
SEMI E125.2-1225 Specification for Protocol Buffers for Equipment Self Description (EqSD),
SEMI E132-1225 Specification for Equipment Client Authentication and Authorization,
SEMI E132.2-1225 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA),
SEMI E134-1225 Specification for Data Collection Management,
SEMI E134.2-1225 Specification for Protocol Buffers of Data Collection Management, and
SEMI E179-1225 Specification for Protocol Buffers Common Components | |
| LI-1 | Rework SEMI E125 metadata to better work with multiple SECS identifiers | Failed |
| LI-2 | Add new SEMI E132 SecurityCertificateChanged notification message | Passed with editorial changes |
| LI-3 | Update issues raised by TF members | Failed |
| 7420 | Line Item Revision to SEMI E190.1-1124 – Specification for Common Data for Etch Components | |
| LI-1 | Add Level 2 and 3 categories of etch information; and expand Definitions section to cover any new terms introduced in these categories. | Failed |
| LI-2 | Add Related Information section to explain etch processing theory of operation | Failed |
| 7422 | Revision to SEMI E164-1224 Specification for EDA Common Metadata and to Add New Subordinate Standards
Specification for GEM Common EDA Metadata,
Specification for Process Job Management GEM Common EDA Metadata, and Specification for Carrier Management Services Common EDA Metadata to SEMI E164-1224 Specification for EDA Common Metadata | Failed |
| 7425 | Line-Item Revision to SEMI E116-0324 Specification for Equipment Performance Tracking | |
| LI-1 | Establish Unique Well-Known Names | Passed as balloted |
| 7428 | Revision to Add a New Subordinate Standard:
Specification for Secure High-Speed SECS Message Service (Secure-HSMS) to
SEMI E37-0222 Specification for High-Speed SECS Message Services (HSMS) Generic Services | Failed |
Ratification Ballot Results
Document # | Document Title | ISC A&R Action |
| R6743C | Revision to SEMI E95-1101, Specification for Human Interface for Semiconductor Manufacturing Equipment | Passed |
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| 7422 | SNARF | DDA | Revision to SEMI E164-1224 Specification for EDA Common Metadata and to Add New Subordinate Standards
Specification for GEM Common EDA Metadata,
Specification for Process Job Management GEM Common EDA Metadata, and Specification for Carrier Management Services Common EDA Metadata to SEMI E164-1224 Specification for EDA Common Metadata |
Authorized Activities
# | Type | SC/TF/WG | Details |
| 7447 | SNARF | GEM 300 TF | Line-Item Revision to SEMI E40-0324 Specification for Processing Management |
| 7448 | SNARF | ESEC TF | Line-Item Revision to SEMI E175-1116 Specification for Subsystem Energy Saving Mode Communication (SESMC) |
| 7449 | SNARF | GUI TF | Line-Item Revision to SEMI E95-1101 (Reapproved 0307) Specification for Human Interface for Semiconductor Manufacturing Equipment |
| 7450 | SNARF | GEM 300 TF | Reapproval of SEMI E173-0721 Specification for XML SECS-II Message Notation (SMN) |
| 7451 | SNARF | Sensor Bus TF | Reapproval of SEMI E54.11-0316 (Reapproved 0721) Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices |
| 7452 | SNARF | Sensor Bus TF | Reapproval of SEMI E54.3-0698 (Reapproved 0721) Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device |
Authorized Ballots
# | When | TF | Details |
| 7070 | Cycle 4-2026 | EDP TF | Revision to Add a New Subordinate Standard: Specification for Common Data for Vacuum Components to Specification for Equipment Data Publication |
| 7187 | Cycle 4-2026 | ESEC TF | Revision to SEMI E167-1213 - Specification for Equipment Energy Saving Mode Communications (EESM) and SEMI E167.1-1213 - Specification for SECS-II Protocol for Equipment Energy Saving Mode Communications |
| 7345B | Cycle 4-2026 | GEM300 TF | Line Item Revision to SEMI E90-0624 - Specification for Substrate Tracking and SEMI E90.1-0624 - Specification for SECS-II Protocol Substrate Tracking |
| 7380A | Cycle 4-2026 | ABFI TF | Line Item Revision to SEMI E142-0225 - Specification for Substrate Mapping,
SEMI E142.1-0225 — Specification for XML Schema for Substrate Mapping,
SEMI E142.2-1016 (0225) — Specification for SECS II Protocol for Substrate Mapping,
SEMI E142.3-1016 (0225) — Specification for Web Services for Substrate Mapping,
SEMI E142.4-1022 (0225) — Specification for SECS II Protocol for Substrate Mapping Using Item Transfer |
| 7381 | Cycle 4-2026 | ABFI TF | Revision to Add a New Subordinate Standard: Specification for Transforming Non-E142 XY Coordinates to SEMI E142-0125: Specification for Substrate Mapping |
| 7419A | Cycle 4-2026 | DDA TF | Line-Item Revision to
SEMI E120-1225 Specification for the Common Equipment Model (CEM),
SEMI E120.2-1225 Specification for Protocol Buffers for Common Equipment Model (CEM),
SEMI E125-1225 Specification for Equipment Self Description (EqSD),
SEMI E125.2-1225 Specification for Protocol Buffers for Equipment Self Description (EqSD),
SEMI E132-1225 Specification for Equipment Client Authentication and Authorization,
SEMI E132.2-1225 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA),
SEMI E134-1225 Specification for Data Collection Management,
SEMI E134.2-1225 Specification for Protocol Buffers of Data Collection Management, and
SEMI E179-1225 Specification for Protocol Buffers Common Components |
| 7420A | Cycle 4-2026 | EDP TF | Line Item Revision to SEMI E190.1-1124 – Specification for Common Data for Etch Components |
| 7422A | Cycle 4-2026 | DDA TF | Revision to
SEMI E164-1224 Specification for EDA Common Metadata
And To Add New Subordinate Standards
Specification for GEM Common EDA Metadata,
Sensor Bus TF
Specification for Carrier Management Services Common EDA Metadata
to SEMI E164-1224 Specification for EDA Common Metadata |
| 7426 | Cycle 4-2026 | CDS TF | Line-Item Revision to SEMI E191-1024 Specification for Computing Device Cybersecurity Status Reporting, and SEMI E191.1-1024 Specification for SECS-II Protocol for Computing Device Cybersecurity Status Reporting |
| 7427 | Cycle 4-2026 | GEM300 TF | Line Item Revision to SEMI E172-0725 Specification for SECS Equipment Data Dictionary (SEDD) |
| 7428A | Cycle 4-2026 | GEM300 TF | Revision to Add a New Subordinate Standard: Specification for Secure High-Speed Secs Message Service (Secure-HSMS) to SEMI E37-0222 Specification for High-Speed SECS Message Services (HSMS) Generic Services |
| 7447 | Cycle 4-2026 | GEM300 TF | Line Item Revision to SEMI E40-0324 Specification for Processing Management |
| 7448 | Cycle 4-2026 | GEM300 TF | Reapproval of SEMI E173-0721 Specification for XML SECS-II Message Notation (SMN) |
| 7449 | Cycle 4-2026 | ESEC TF | Line Item Revision to SEMI E175-1116 - Specification for Subsystem Energy Saving Mode Communication (SESMC) |
| 7451 | Cycle 4-2026 | Sensor Bus TF | Reapproval of SEMI E54.11-0316 (Reapproved 0721) Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices |
| 7452 | Cycle 4-2026 | Sensor Bus TF | Reapproval of SEMI E54.3-0698 (Reapproved 0721) Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device |
| 7456 | Cycle 4-2026 | EDP TF | Revision to Add a New Subordinate Standard: Specification for Common Data for Deposition Components to Specification for Equipment Data Publication |
| 7457 | Cycle 4-2026 | EDP TF | Revision to Add a New Subordinate Standard: Specification for Common Data for Ion Implant Components to Specification for Equipment Data Publication |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
Monday, May 11, 2026
- 9:00-10:00 – NA I&C Leadership Meeting
- 10:00-11:00 – ABFI Task Force
- 11:00-12:00 – ESEC Task Force
- 13:00-16:00 – GEM300 Task Force
- 16:00-17:30 – EDP Task Force
Tuesday, May 12, 2026
- 8:00-10:00 – GUI Task Force
- 10:00-12:00 – Digital Twins + PCS Task Force
- 13:00-16:00 – DDA Task Force
- 16:00-17:30 – CDS Task Force
- 16:00-16:30 – Sensor Bus Task Force
Wednesday, May 13, 2026
- 9:00-12:00, 13:00-16:00 – I&C NA TC Chapter Meeting
|