The following documents were created by the International Standards program during development of the Standards referenced below. These files are a part of those Standards. These documents were developed and published prior to the establishment of Complementary Files and Various Materials as defined in the SEMI Standards Regulations. Please reference the text of the standards to understand the role of the various XML files (e.g., requirements, examples, related information, etc.).
The XML files are provided here for direct use by software developers as part of the implementation process of the related Standards.