Archived XML Schema Files

The following documents were created by the International Standards program during development of the Standards referenced below. These files are a part of those Standards. These documents were developed and published prior to the establishment of Complementary Files and Various Materials as defined in the SEMI Standards Regulations. Please reference the text of the standards to understand the role of the various XML files (e.g., requirements, examples, related information, etc.).

The XML files are provided here for direct use by software developers as part of the implementation process of the related Standards.

 


NOTICE WHERE APPLICABLE:
 

SEMI hereby grants permission to reproduce and use the following material, subject to the following reservations and conditions: These digital files are supplied for the users' convenience. They are used with the Standard or Safety Guideline from which they were excerpted. All notices and disclaimers which pertain to the original Standards or Safety Guidelines are in effect for these files except where otherwise noted. SEMI retains all other rights.


Item

Committee / Applicable Standard

Complementary File for SEMI E142-0211

Standards - Information & Control / SEMI E142-0211

Download E142-V0211-SCHEMA.ZIP 7.6K

 

Complementary File for SEMI E172-0115

Standards - Information & Control / SEMI E172-0115

Download ZIP 33.4K

 

Complementary File for SEMI E172-1015

Standards - Information & Control / SEMI E172-1015

Download E172-00-1015-CF.ZIP 33.5K

 

XML Files for SEMI E164-0313

Standards - Information & Control / SEMI E164-0313

Download ZIP 213.6K

 

XML Files for SEMI E164-0712

Standards - Information & Control / SEMI E164-0712

Download ZIP 213.1K

 

XML Schema for SEMI E120.1-0310

Standards - Information & Control / SEMI E120.1-0310

Download ZIP 1.5K

 

XML Schema for SEMI E120.1-0705

Standards - Information & Control / SEMI E120.1-0705

Download XSD 10.9K

 

XML Schema for SEMI E120.1-0706

Standards - Information & Control / SEMI E120.1-0706

Download ZIP 1.5K

 

XML Schema for SEMI E120.1-1104

Standards - Information & Control / SEMI E120.1-1104

Download XSD 10.9K

 

XML Schema for SEMI E120.1-1108 Revised

Standards - Information & Control / SEMI E120.1-1108

Download XSD 10.9K

 

XML Schema for SEMI E120.1-1108

Standards - Information & Control / SEMI E120.1-1108

Download ZIP 1.4K

 

XML Schema for SEMI E125.1-0305

Standards - Information & Control / SEMI E125.1-0305

Download ZIP 13.2K

 

XML Schema for SEMI E125.1-0307

Standards - Information & Control / SEMI E125.1-0307

Download ZIP 13.2K

 

XML Schema for SEMI E125.1-0308

Standards - Information & Control / SEMI E125.1-0308

Download ZIP 8.3K

 

XML Schema for SEMI E125.1-0310

Standards - Information & Control / SEMI E125.1-0310

Download ZIP 7.7K

 

XML Schema for SEMI E125.1-0709

Standards - Information & Control / SEMI E125.1-0709

Download ZIP 7.9K

 

XML Schema for SEMI E125.1-0710

Standards - Information & Control / SEMI E125.1-0710

Download ZIP 7.8K

 

XML Schema for SEMI E128-0706

Standards - Information & Control / SEMI E128-0706

Download ZIP 1.1K

 

XML Schema for SEMI E132.1-0305

Standards - Information & Control / SEMI E132.1-0305

Download ZIP 9.3K

 

XML Schema for SEMI E132.1-0310E2

Standards - Information & Control / SEMI E132.1-0310E2, Updated January 2011 to add missing discovery interface files.

Download ZIP 13.9K

 

XML Schema for SEMI E132.1-0310E

Standards - Information & Control / SEMI E132.1-0310E

Download ZIP 11.1K

 

XML Schema for SEMI E132.1-0310

Standards - Information & Control / SEMI E132.1-0310

Download ZIP 13.9K

 

XML Schema for SEMI E132.1-1107

Standards - Information & Control / SEMI E132.1-1107

Download ZIP 11.8K

 

XML Schema for SEMI E132.1-1107

Standards - Information & Control / SEMI E132.1-1107

Download ZIP 8.2K

 

XML Schema for SEMI E132.1-1108

Standards - Information & Control / SEMI E132.1-1108

Download ZIP 2.8K

 

XML Schema for SEMI E134.1-0305

Standards - Information & Control / SEMI E134.1-0305

Download ZIP 13.8K

 

XML Schema for SEMI E134.1-0308

Standards - Information & Control / SEMI E134.1-0308

Download ZIP 8.6K

 

XML Schema for SEMI E134.1-0310

Standards - Information & Control / SEMI E134.1-0310

Download ZIP 8.5K

 

XML Schema for SEMI E134.1-0709

Standards - Information & Control / SEMI E134.1-0709

Download ZIP 8.8K

 

XML Schema for SEMI E134.1-0710

Standards - Information & Control / SEMI E134.1-0710

Download ZIP 8.7K

 

XML Schema for SEMI E134.1-1105

Standards - Information & Control / SEMI E134.1-1105

Download ZIP 13.0K

 

XML Schema for SEMI E138-0305

Standards - Information & Control / SEMI E138-0305

Download XSD 1.8K

 

XML Schema for SEMI E138-0309

Standards - Information & Control / SEMI E138-0309

Download XSD 7.8K

 

XML Schema for SEMI E138-0709

Standards - Information & Control / SEMI E138-0709

Download ZIP 1.8K

 

XML Schema for SEMI E139.1-0308

Standards - Information & Control / SEMI E139.1-0308

Download ZIP 1.1K

 

XML Schema for SEMI E139.1-0705

Standards - Information & Control / SEMI E139.1-0705

Download ZIP 1.5K

 

XML Schema for SEMI E139.1-1107

Standards - Information & Control / SEMI E139.1-1107

Download ZIP 1.6K

 

XML Schema for SEMI E139.3-0709

Standards - Information & Control / SEMI E139.3-0709

Download XSD 14.2K

 

XML Schema for SEMI E139.3-1108

Standards - Information & Control / SEMI E139.3-1108

Download ZIP 3.6K

 

XML Schema for SEMI E142.1-0705

Standards - Information & Control / SEMI E142.1-0705

Download ZIP 3.1K

 

XML Schema for SEMI E142.1-0706

Standards - Information & Control / SEMI E142.1-0706

Download ZIP 2.1K

 

XML Schema for SEMI E142.1-1105

Standards - Information & Control / SEMI E142.1-1105

Download ZIP 3.7K

 

XML Schema for SEMI E142.3-0706

Standards - Information & Control / SEMI E142.3-0706

Download ZIP 1.4K

 

XML Schema for SEMI E142.3-1105

Standards - Information & Control / SEMI E142.3-1105

Download SDL 6.8K

 

XML Schema for SEMI E145-0306

Standards - Information & Control / SEMI E145-0306

Download ZIP 4.1K

 


Go to the Current XML Schema Files page